Egashira; Shinichi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Egashira; Shinichi.The latest application filed is for "method of determining set of sample shot regions, method of obtaining measurement value, information processing apparatus, lithography apparatus, storage medium, and article manufacturing method".

Company Profile

5.12.18

Egashira; Shinichi - Utsunomiya JP
Egashira; Shinichi - Tochigi JP
Egashira; Shinichi - Utsunomiya-shi JP
Egashira; Shinichi - Kawasaki JP
Egashira; Shinichi - Osaka JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Alignment apparatus, alignment method, lithography apparatus, and method of manufacturing article Grant 11,360,401 - Egashira , et al. June 14, 2	2022-06-14
Method Of Determining Set Of Sample Shot Regions, Method Of Obtaining Measurement Value, Information Processing Apparatus, Lithography Apparatus, Storage Medium, And Article Manufacturing Method App 20220100108 - Egashira; Shinichi	2022-03-31
Measurement apparatus, exposure apparatus, and method of manufacturing article Grant 11,067,908 - Egashira July 20, 2	2021-07-20
Method And Apparatus Of Determining Mark Position App 20210090231 - Egashira; Shinichi	2021-03-25
Alignment Apparatus, Alignment Method, Lithography Apparatus, And Method Of Manufacturing Article App 20200387075 - Egashira; Shinichi ; et al.	2020-12-10
Pattern forming apparatus, deciding method, storage medium, information processing apparatus, and article manufacturing method Grant 10,831,116 - Egashira November 10, 2	2020-11-10
Measurement Apparatus, Exposure Apparatus, And Method Of Manufacturing Article App 20200264524 - Egashira; Shinichi	2020-08-20
Pattern Forming Apparatus, Deciding Method, Storage Medium, Information Processing Apparatus, And Article Manufacturing Method App 20190064679 - Egashira; Shinichi	2019-02-28
Measurement apparatus, lithography apparatus, and method of manufacturing article Grant 10,185,235 - Egashira Ja	2019-01-22
Lithography apparatus and article manufacturing method Grant 10,185,225 - Egashira Ja	2019-01-22
Lithography Apparatus And Article Manufacturing Method App 20180107125 - EGASHIRA; Shinichi	2018-04-19
Exposure apparatus, exposure method, and device manufacturing method Grant 9,575,413 - Tsujikawa , et al. February 21, 2	2017-02-21
Management apparatus and management method Grant 9,524,528 - Nogawa , et al. December 20, 2	2016-12-20
Measurement Apparatus, Lithography Apparatus, And Method Of Manufacturing Article App 20160202620 - Egashira; Shinichi	2016-07-14
Exposure Apparatus, Exposure Method, And Device Manufacturing Method App 20150338746 - Tsujikawa; Takuro ; et al.	2015-11-26
Inspection Supporting Apparatus And Inspection Supporting Method App 20150261738 - IZUMI; Hirofumi ; et al.	2015-09-17
Management Apparatus And Management Method App 20150199809 - NOGAWA; Hiroshi ; et al.	2015-07-16
Measuring Method, And Exposure Method And Apparatus App 20130321811 - Maeda; Hironori ; et al.	2013-12-05
Mark position detection apparatus Grant 8,518,614 - Egashira August 27, 2	2013-08-27
Exposure apparatus with improved alignment mark position measurement condition setting feature, and device manufacturing method using the same Grant 8,107,051 - Egashira January 31, 2	2012-01-31
USB host system and method for transferring transfer data Grant 7,921,238 - Sakai , et al. April 5, 2	2011-04-05
Device Control Method And Device Selecting Apparatus App 20110022737 - KONO; Ryouichi ; et al.	2011-01-27
Exposure Apparatus App 20100277710 - Egashira; Shinichi	2010-11-04
Exposure apparatus and device manufacturing method Grant 7,764,357 - Egashira July 27, 2	2010-07-27
Positioning Apparatus, Exposure Apparatus, And Method Of Manufacturing Device App 20090191651 - Egashira; Shinichi	2009-07-30
Exposure Apparatus And Device Manufacturing Method App 20090091722 - Egashira; Shinichi	2009-04-09
Usb Host System And Method For Transferring Transfer Data App 20080301330 - SAKAI; Ryo ; et al.	2008-12-04
Exposure Apparatus App 20080129972 - Egashira; Shinichi	2008-06-05
Mark Position Detection Apparatus App 20080063956 - Egashira; Shinichi	2008-03-13

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