loadpatents
Patent applications and USPTO patent grants for Egashira; Koji.The latest application filed is for "substrate processing apparatus and substrate processing method".
Patent | Date |
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Substrate Processing Apparatus And Substrate Processing Method App 20180240684 - Egashira; Koji ;   et al. | 2018-08-23 |
Liquid processing apparatus Grant 9,452,452 - Egashira September 27, 2 | 2016-09-27 |
Substrate processing apparatus Grant 9,305,818 - Kamikawa , et al. April 5, 2 | 2016-04-05 |
Liquid processing apparatus Grant 9,272,310 - Egashira March 1, 2 | 2016-03-01 |
Substrate Processing Apparatus App 20140356106 - KAMIKAWA; Yuji ;   et al. | 2014-12-04 |
Substrate processing apparatus Grant 8,851,819 - Kamikawa , et al. October 7, 2 | 2014-10-07 |
Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method Grant 8,567,417 - Kamikawa , et al. October 29, 2 | 2013-10-29 |
Liquid Processing Apparatus App 20130233360 - Egashira; Koji | 2013-09-12 |
Liquid Processing Apparatus App 20130233361 - Egashira; Koji | 2013-09-12 |
Batch forming apparatus, substrate processing system, batch forming method, and storage medium Grant 8,002,511 - Kamikawa , et al. August 23, 2 | 2011-08-23 |
Ultrasonic Cleaning Apparatus, Ultrasonic Cleaning Method, And Storage Medium Storing Computer Program For Executing Ultrasonic Cleaning Method App 20110079240 - KAMIKAWA; Yuji ;   et al. | 2011-04-07 |
Substrate Processing Apparatus App 20100215461 - KAMIKAWA; Yuji ;   et al. | 2010-08-26 |
Batch forming apparatus, substrate processing system, batch forming method, and storage medium App 20090010748 - Kamikawa; Yuji ;   et al. | 2009-01-08 |
Liquid processing apparatus and method Grant 7,412,981 - Egashira , et al. August 19, 2 | 2008-08-19 |
Rotary shaft sealing mechanism and liquid processing apparatus Grant 7,347,214 - Egashira , et al. March 25, 2 | 2008-03-25 |
Liquid processing apparatus with nozzle having planar ejecting orifices Grant 7,314,054 - Egashira , et al. January 1, 2 | 2008-01-01 |
Substrate processing apparatus Grant 7,240,680 - Egashira July 10, 2 | 2007-07-10 |
Liquid processing apparatus and method App 20070028950 - Egashira; Koji ;   et al. | 2007-02-08 |
Rotary substrate processing apparatus and method Grant 6,743,297 - Egashira , et al. June 1, 2 | 2004-06-01 |
Liquid processing apparatus Grant 6,725,868 - Kamikawa , et al. April 27, 2 | 2004-04-27 |
Processing apparatus with sealing mechanism Grant 6,698,439 - Kamikawa , et al. March 2, 2 | 2004-03-02 |
Liquid processing apparatus and method Grant 6,663,721 - Egashira , et al. December 16, 2 | 2003-12-16 |
Substrate processing apparatus App 20030221713 - Egashira, Koji | 2003-12-04 |
Rotary shaft sealing mechanism and liquid processing apparatus App 20030178785 - Egashira, Koji ;   et al. | 2003-09-25 |
Rotary substrate processing apparatus and method App 20020170571 - Egashira, Koji ;   et al. | 2002-11-21 |
Liquid processing apparatus App 20020056471 - Kamikawa, Yuji ;   et al. | 2002-05-16 |
Processing apparatus with sealing mechanism App 20020053367 - Kamikawa, Yuji ;   et al. | 2002-05-09 |
Rotary processing apparatus App 20020029852 - Egashira, Koji | 2002-03-14 |
Liquid processing apparatus and method App 20020029789 - Egashira, Koji ;   et al. | 2002-03-14 |
Liquid processing apparatus and method App 20010013555 - Egashira, Koji ;   et al. | 2001-08-16 |
Method of and apparatus for making fiber-reinforced polymer compositions Grant 5,106,564 - Iwanami , et al. April 21, 1 | 1992-04-21 |
Fiber-reinforced polymer composition and method of producing same Grant 4,990,550 - Iwanami , et al. February 5, 1 | 1991-02-05 |
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