| Patent | Date |
|---|
Method and apparatus for detection of particle size in a fluid
Grant 11,441,992 - Vaez-Iravani , et al. September 13, 2 | 2022-09-13 |
In-situ full wafer metrology system
Grant 11,204,312 - Sade , et al. December 21, 2 | 2021-12-21 |
Method And Apparatus For Detection Of Particle Size In A Fluid
App 20210372911 - VAEZ-IRAVANI; Mehdi ; et al. | 2021-12-02 |
In-situ Full Wafer Metrology System
App 20210285865 - Sade; Ami ; et al. | 2021-09-16 |
Particle detection for substrate processing
Grant 11,119,051 - Egan , et al. September 14, 2 | 2021-09-14 |
Metrology For Oled Manufacturing Using Photoluminescence Spectroscopy
App 20210208077 - GHOSH; Avishek ; et al. | 2021-07-08 |
Metrology for OLED manufacturing using photoluminescence spectroscopy
Grant 10,935,492 - Ghosh , et al. March 2, 2 | 2021-03-02 |
Metrology system for substrate deformation measurement
Grant 10,923,371 - Vaez-Iravani , et al. February 16, 2 | 2021-02-16 |
Particle Detection For Substrate Processing
App 20210018449 - EGAN; Todd ; et al. | 2021-01-21 |
Optical stack deposition and on-board metrology
Grant 10,886,155 - Zhu , et al. January 5, 2 | 2021-01-05 |
Pecvd Process
App 20200399756 - RAJAGOPALAN; Nagarajan ; et al. | 2020-12-24 |
Particle detection for substrate processing
Grant 10,845,317 - Egan , et al. November 24, 2 | 2020-11-24 |
PECVD process
Grant 10,793,954 - Rajagopalan , et al. October 6, 2 | 2020-10-06 |
Optical Stack Deposition And On-board Metrology
App 20200227294 - ZHU; Mingwei ; et al. | 2020-07-16 |
Equipment cleaning apparatus and method
Grant 10,695,804 - Mostovoy , et al. | 2020-06-30 |
Portable electronic device sales, provisioning, and user care vending kiosk
Grant 10,592,880 - Engles , et al. | 2020-03-17 |
In-situ metrology method for thickness measurement during PECVD processes
Grant 10,527,407 - Paul , et al. J | 2020-01-07 |
Monitoring system for deposition and method of operation thereof
Grant 10,522,375 - Budiarto , et al. Dec | 2019-12-31 |
Metrology systems with multiple derivative modules for substrate stress and deformation measurement
Grant 10,510,624 - Vaez-Iravani , et al. Dec | 2019-12-17 |
Metrology For Oled Manufacturing Using Photoluminescence Spectroscopy
App 20190317021 - GHOSH; Avishek ; et al. | 2019-10-17 |
Equipment Cleaning Apparatus And Method
App 20190224723 - MOSTOVOY; Roman M. ; et al. | 2019-07-25 |
In-situ Metrology Method For Thickness Measurement During Pecvd Processes
App 20190212128 - PAUL; Khokan C. ; et al. | 2019-07-11 |
In-situ metrology method for thickness measurement during PECVD processes
Grant 10,281,261 - Paul , et al. | 2019-05-07 |
Metrology System For Substrate Deformation Measurement
App 20190074201 - VAEZ-IRAVANI; Mehdi ; et al. | 2019-03-07 |
Particle Detection For Substrate Processing
App 20190072497 - EGAN; Todd ; et al. | 2019-03-07 |
Methods and apparatus for substrate edge cleaning
Grant 10,217,650 - Holden , et al. Feb | 2019-02-26 |
Portable Electronic Device Sales, Provisioning, And User Care Vending Kiosk
App 20190057366 - Engles; Edward ; et al. | 2019-02-21 |
Metrology Systems For Substrate Stress And Deformation Measurement
App 20190057910 - VAEZ-IRAVANI; Mehdi ; et al. | 2019-02-21 |
Wafer placement and gap control optimization through in situ feedback
Grant 10,196,741 - Griffin , et al. Fe | 2019-02-05 |
Portable electronic device sales, provisioning, and user care vending kiosk
Grant 10,140,601 - Engles , et al. Nov | 2018-11-27 |
Damage isolation by shaped beam delivery in laser scribing process
Grant 10,112,259 - Holden , et al. October 30, 2 | 2018-10-30 |
Portable Electronic Device Sales, Provisioning, And User Care Vending Kiosk
App 20180293566 - ENGLES; Edward ; et al. | 2018-10-11 |
Pecvd Process
App 20180258535 - RAJAGOPALAN; Nagarajan ; et al. | 2018-09-13 |
PECVD process
Grant 10,060,032 - Rajagopalan , et al. August 28, 2 | 2018-08-28 |
PECVD apparatus and process
Grant 10,030,306 - Rajagopalan , et al. July 24, 2 | 2018-07-24 |
Monitoring System For Deposition And Method Of Operation Thereof
App 20180114711 - Budiarto; Edward W. ; et al. | 2018-04-26 |
Pecvd Process
App 20180066364 - RAJAGOPALAN; Nagarajan ; et al. | 2018-03-08 |
Endpoint Detection For A Chamber Cleaning Process
App 20180057935 - BUDIARTO; Edward ; et al. | 2018-03-01 |
Monitoring system for deposition and method of operation thereof
Grant 9,870,935 - Budiarto , et al. January 16, 2 | 2018-01-16 |
PECVD process
Grant 9,816,187 - Rajagopalan , et al. November 14, 2 | 2017-11-14 |
Integrated Metrology And Process Tool To Enable Local Stress/overlay Correction
App 20170287752 - GODET; Ludovic ; et al. | 2017-10-05 |
Multi-layer mask including non-photodefinable laser energy absorbing layer for substrate dicing by laser and plasma etch
Grant 9,620,379 - Lei , et al. April 11, 2 | 2017-04-11 |
Pecvd Process
App 20170016118 - RAJAGOPALAN; Nagarajan ; et al. | 2017-01-19 |
Methods And Apparatus For Substrate Edge Cleaning
App 20170018441 - HOLDEN; JAMES MATTHEW ; et al. | 2017-01-19 |
In-situ Metrology Method For Thickness Measurement During Pecvd Processes
App 20160370173 - PAUL; Khokan C. ; et al. | 2016-12-22 |
Method of aligning substrate-scale mask with substrate
Grant 9,490,154 - Ravid , et al. November 8, 2 | 2016-11-08 |
PECVD process
Grant 9,458,537 - Rajagopalan , et al. October 4, 2 | 2016-10-04 |
Methods and apparatus for substrate edge cleaning
Grant 9,443,714 - Holden , et al. September 13, 2 | 2016-09-13 |
Substrate-scale Mask Alignment
App 20160211185 - Ravid; Abraham ; et al. | 2016-07-21 |
Monitoring System For Deposition And Method Of Operation Thereof
App 20160181134 - Budiarto; Edward W. ; et al. | 2016-06-23 |
Multi-layer Mask Including Non-photodefinable Laser Energy Absorbing Layer For Substrate Dicing By Laser And Plasma Etch
App 20160035577 - LEI; Wei-Sheng ; et al. | 2016-02-04 |
Laser and plasma etch wafer dicing with partial pre-curing of UV release dicing tape for film frame wafer application
Grant 9,252,057 - Chowdhury , et al. February 2, 2 | 2016-02-02 |
Pecvd Process
App 20160017497 - RAJAGOPALAN; NAGARAJAN ; et al. | 2016-01-21 |
Wafer Placement And Gap Control Optimization Through In Situ Feedback
App 20150376782 - Griffin; Kevin ; et al. | 2015-12-31 |
Method of coating water soluble mask for laser scribing and plasma etch
Grant 9,177,864 - Lei , et al. November 3, 2 | 2015-11-03 |
PECVD process
Grant 9,157,730 - Rajagopalan , et al. October 13, 2 | 2015-10-13 |
Pecvd Apparatus And Process
App 20150226540 - Rajagopalan; Nagarajan ; et al. | 2015-08-13 |
Damage Isolation By Shaped Beam Delivery In Laser Scribing Process
App 20150217401 - HOLDEN; James M. ; et al. | 2015-08-06 |
Measurement Of Film Thickness On An Arbitrary Substrate
App 20150203966 - BUDIARTO; Edward ; et al. | 2015-07-23 |
Uniform masking for wafer dicing using laser and plasma etch
Grant 9,048,309 - Chowdhury , et al. June 2, 2 | 2015-06-02 |
Damage isolation by shaped beam delivery in laser scribing process
Grant 9,029,242 - Holden , et al. May 12, 2 | 2015-05-12 |
Laser And Plasma Etch Wafer Dicing With A Double Sided Uv-curable Adhesive Film
App 20150122419 - Chowdhury; Mohammad Kamruzzaman ; et al. | 2015-05-07 |
Method Of Diced Wafer Transportation
App 20150102467 - Lei; Wei-Sheng ; et al. | 2015-04-16 |
Laser and plasma etch wafer dicing with a double sided UV-curable adhesive film
Grant 8,969,177 - Chowdhury , et al. March 3, 2 | 2015-03-03 |
Laser and plasma etch wafer dicing using UV-curable adhesive film
Grant 8,946,057 - Lei , et al. February 3, 2 | 2015-02-03 |
Method of diced wafer transportation
Grant 8,940,619 - Lei , et al. January 27, 2 | 2015-01-27 |
Method Of Coating Water Soluble Mask For Laser Scribing And Plasma Etch
App 20140377937 - Lei; Wei-Sheng ; et al. | 2014-12-25 |
Method of coating water soluble mask for laser scribing and plasma etch
Grant 8,859,397 - Lei , et al. October 14, 2 | 2014-10-14 |
Methods And Apparatus For Substrate Edge Cleaning
App 20140251375 - HOLDEN; JAMES MATTHEW ; et al. | 2014-09-11 |
Pecvd Process
App 20140118751 - RAJAGOPALAN; Nagarajan ; et al. | 2014-05-01 |
Laser And Plasma Etch Wafer Dicing With Partial Pre-curing Of Uv Release Dicing Tape For Film Frame Wafer Application
App 20140106542 - CHOWDHURY; Mohammad Kamruzzaman ; et al. | 2014-04-17 |
Metrology system for imaging workpiece surfaces at high robot transfer speeds
Grant 8,698,889 - Ravid , et al. April 15, 2 | 2014-04-15 |
Uniform Masking For Wafer Dicing Using Laser And Plasma Etch
App 20140017879 - Chowdhury; Mohammad Kamruzzaman ; et al. | 2014-01-16 |
Method Of Diced Wafer Transportation
App 20140015109 - Lei; Wei-Sheng ; et al. | 2014-01-16 |
Method Of Coating Water Soluble Mask For Laser Scribing And Plasma Etch
App 20140017882 - Lei; Wei-Sheng ; et al. | 2014-01-16 |
Multi-layer Mask For Substrate Dicing By Laser And Plasma Etch
App 20140011337 - Holden; James M. ; et al. | 2014-01-09 |
Laser And Plasma Etch Wafer Dicing With A Double Sided Uv-curable Adhesive Film
App 20140004685 - CHOWDHURY; Mohammad Kamruzzaman ; et al. | 2014-01-02 |
Method for imaging workpiece surfaces at high robot transfer speeds with reduction or prevention of motion-induced distortion
Grant 08620064 - | 2013-12-31 |
Method for imaging workpiece surfaces at high robot transfer speeds with reduction or prevention of motion-induced distortion
Grant 8,620,064 - Ravid , et al. December 31, 2 | 2013-12-31 |
Laser And Plasma Etch Wafer Dicing Using Uv-curable Adhesive Film
App 20130280890 - Lei; Wei-Sheng ; et al. | 2013-10-24 |
Multi-layer mask for substrate dicing by laser and plasma etch
Grant 8,557,682 - Holden , et al. October 15, 2 | 2013-10-15 |
Method for imaging workpiece surfaces at high robot transfer speeds with correction of motion-induced distortion
Grant 8,452,077 - Ravid , et al. May 28, 2 | 2013-05-28 |
Method And Apparatus For The Formation Of Solar Cells With Selective Emitters
App 20130095579 - Egan; Todd ; et al. | 2013-04-18 |
Damage Isolation By Shaped Beam Delivery In Laser Scribing Process
App 20120322240 - HOLDEN; James M. ; et al. | 2012-12-20 |
Multi-layer Mask For Substrate Dicing By Laser And Plasma Etch
App 20120322241 - HOLDEN; James M. ; et al. | 2012-12-20 |
Metrology System For Imaging Workpiece Surfaces At High Robot Transfer Speeds
App 20110199476 - Ravid; Abraham ; et al. | 2011-08-18 |
Method For Imaging Workpiece Surfaces At High Robot Transfer Speeds With Reduction Or Prevention Of Motion-induced Distortion
App 20110199477 - Ravid; Abraham ; et al. | 2011-08-18 |
Method For Imaging Workpiece Surfaces At High Robot Transfer Speeds With Correction Of Motion-induced Distortion
App 20110200247 - Ravid; Abraham ; et al. | 2011-08-18 |
Integrated Vacuum Metrology For Cluster Tool
App 20070196011 - Cox; Damon K. ; et al. | 2007-08-23 |
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