| Patent | Date |
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Dispersion liquid of silica particles and production method therefor
Grant 11,427,730 - Egami , et al. August 30, 2 | 2022-08-30 |
Production method for dispersion liquid of silica particle
Grant 11,312,634 - Egami , et al. April 26, 2 | 2022-04-26 |
Silica particle liquid dispersion and production method therefor
Grant 11,254,580 - Egami , et al. February 22, 2 | 2022-02-22 |
Porous Silica Particles And Method For Producing Same
App 20210094835 - EGAMI; Miki ; et al. | 2021-04-01 |
Silica Particle Dispersion Liquid And Production Method Thereof
App 20210094832 - EGAMI; Miki ; et al. | 2021-04-01 |
Silica Particle Dispersion Liquid And Production Method Thereof
App 20210094833 - HAYASHI; Shogo ; et al. | 2021-04-01 |
Dispersion Liquid Of Silica Particles, Polishing Composition, And Method For Producing Dispersion Liquid Of Silica Particles
App 20210002513 - EGAMI; Miki ; et al. | 2021-01-07 |
Method For Producing Chain-like Particle Dispersion, And Dispersion Of Chain-like Particles
App 20200392385 - EGAMI; Miki ; et al. | 2020-12-17 |
Dispersion Liquid Of Silica Particles And Production Method Therefor
App 20200392374 - EGAMI; Miki ; et al. | 2020-12-17 |
Production Method For Dispersion Liquid Of Silica Particle
App 20200231451 - EGAMI; Miki ; et al. | 2020-07-23 |
Silica Particle Liquid Dispersion And Production Method Therefor
App 20190359491 - EGAMI; Miki ; et al. | 2019-11-28 |
Method for producing disintegrated silica particles
Grant 10,358,353 - Muraguchi , et al. July 23, 2 | 2019-07-23 |
Silica particle dispersion and production method of the same
Grant 10,301,183 - Egami , et al. | 2019-05-28 |
Silica-based polishing particle and abrasive
Grant 10,190,023 - Kumazawa , et al. Ja | 2019-01-29 |
Silica-based polishing particle and abrasive
Grant 10,184,069 - Kumazawa , et al. Ja | 2019-01-22 |
Silica Particle Dispersion And Production Method Of The Same
App 20180179076 - EGAMI; Miki ; et al. | 2018-06-28 |
Silica-based Polishing Particle And Abrasive
App 20180155591 - KUMAZAWA; Mitsuaki ; et al. | 2018-06-07 |
Silica-based Polishing Particle And Abrasive
App 20180127627 - KUMAZAWA; Mitsuaki ; et al. | 2018-05-10 |
Method for Producing Disintegrated Silica Particles
App 20160159654 - Muraguchi; Ryo ; et al. | 2016-06-09 |
Coating liquid for forming low dielectric constant amorphous silica-based coating film and the coating film obtained from the same
Grant 8,686,101 - Egami , et al. April 1, 2 | 2014-04-01 |
Support For Protein Immobilization, Immobilized Protein, And Methods For Producing The Same
App 20130109072 - Tsunoda; Tatsuo ; et al. | 2013-05-02 |
Method for forming amorphous silica-based coating film with low dielectric constant and thus obtained amorphous silica-based coating film
Grant 8,227,028 - Egami , et al. July 24, 2 | 2012-07-24 |
Coating liquid for forming amorphous silica-based coating film with low dielectric constant
Grant 8,062,414 - Nakashima , et al. November 22, 2 | 2011-11-22 |
Coating liquid for formation of protective film for semiconductor processing and method for preparation of the same
Grant 7,998,567 - Egami , et al. August 16, 2 | 2011-08-16 |
Method For Forming Amorphous Silica-Based Coating Film With Low Dielectric Constant And Thus Obtained Amorphous Silica-Based Coating Film
App 20100003181 - Egami; Miki ; et al. | 2010-01-07 |
Coating liquid for formation of protective film for semiconductor processing, method for preparation of the same, and protective film for semiconductor processing made from the coating liquid
App 20090061199 - Egami; Miki ; et al. | 2009-03-05 |
Coating Liquid for Forming Low Dielectric Constant Amorphous Silica-Based Coating Film and the Coating Film Obtained From the Same
App 20090025609 - Egami; Miki ; et al. | 2009-01-29 |
Coating Liquid for Forming Low Dielectric Constant Amorphous Silica-Based Coating Film, Method for Preparing the Same, and Low Dielectric Constant Amorphous Silica-Based Coating Film Obtained From the Same
App 20080011987 - Arao; Hiroki ; et al. | 2008-01-17 |
Method of forming amorphous silica-based coating film with low dielectric constant and thus obtained silica-based coating film
Grant 7,232,769 - Nakashima , et al. June 19, 2 | 2007-06-19 |
Method of forming amorphous silica-based coating film with low dielectric constant and thus obtained silica-based coating film
App 20060084277 - Nakashima; Akira ; et al. | 2006-04-20 |
Process for producing semiconductor substrates
Grant 6,716,773 - Egami , et al. April 6, 2 | 2004-04-06 |
Method of forming a silica-containing coating film with a low dielectric constant and semiconductor substrate coated with such a film
Grant 6,599,846 - Komatsu , et al. July 29, 2 | 2003-07-29 |
Process for producing semiconductor substrates and semiconductor substrates
App 20030062599 - Egami, Miki ; et al. | 2003-04-03 |
Method of forming a silica-containing coating film with a low dielectric constant and semiconductor substrate coated with such a film
App 20020187652 - Komatsu, Michio ; et al. | 2002-12-12 |
Coating liquid for forming low-permittivity silica film and substrate having low-permittivity coating film
Grant 6,261,357 - Egami , et al. July 17, 2 | 2001-07-17 |
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