| Patent | Date |
|---|
Method And Apparatuses For Disposing Of Excess Material Of A Photolithographic Mask
App 20220299864 - Budach; Michael ; et al. | 2022-09-22 |
Apparatus And Method For Removing A Single Particulate From A Substrate
App 20220011682 - Edinger; Klaus ; et al. | 2022-01-13 |
Device And Method For Analysing A Defect Of A Photolithographic Mask Or Of A Wafer
App 20210247336 - Baralia; Gabriel ; et al. | 2021-08-12 |
Device and method for analysing a defect of a photolithographic mask or of a wafer
Grant 10,983,075 - Baralia , et al. April 20, 2 | 2021-04-20 |
Method And Apparatuses For Disposing Of Excess Material Of A Photolithographic Mask
App 20200103751 - Budach; Michael ; et al. | 2020-04-02 |
Scanning probe microscope and method for examining a surface with a high aspect ratio
Grant 10,119,990 - Baur , et al. November 6, 2 | 2018-11-06 |
Method and apparatus for analyzing and for removing a defect of an EUV photomask
Grant 10,060,947 - Budach , et al. August 28, 2 | 2018-08-28 |
Method And Apparatus For Analyzing And For Removing A Defect Of An Euv Photomask
App 20180106831 - Budach; Michael ; et al. | 2018-04-19 |
Apparatus and method for examining a surface of a mask
Grant 9,910,065 - Budach , et al. March 6, 2 | 2018-03-06 |
Device And Method For Analysing A Defect Of A Photolithographic Mask Or Of A Wafer
App 20170292923 - Baralia; Gabriel ; et al. | 2017-10-12 |
Scanning Probe Microscope And Method For Examining A Surface With A High Aspect Ratio
App 20170102407 - Baur; Christof ; et al. | 2017-04-13 |
Apparatus And Method For Examining A Surface Of A Mask
App 20160341763 - Budach; Michael ; et al. | 2016-11-24 |
Ion sources, systems and methods
Grant 9,236,225 - Ward , et al. January 12, 2 | 2016-01-12 |
Perforated membranes
Grant 9,186,630 - Golzhauser , et al. November 17, 2 | 2015-11-17 |
Apparatus and method for investigating an object
Grant 9,115,981 - Baur , et al. August 25, 2 | 2015-08-25 |
Ion Sources, Systems And Methods
App 20150213997 - Ward; Billy W. ; et al. | 2015-07-30 |
Method for electron beam induced etching
Grant 9,023,666 - Auth , et al. May 5, 2 | 2015-05-05 |
Ion sources, systems and methods
Grant 9,012,867 - Ward , et al. April 21, 2 | 2015-04-21 |
Ion Sources, Systems And Methods
App 20140306121 - Ward; Billy W. ; et al. | 2014-10-16 |
Apparatus and method for analyzing and modifying a specimen surface
Grant 8,769,709 - Baur , et al. July 1, 2 | 2014-07-01 |
Method And Apparatus For Analyzing And For Removing A Defect Of An Euv Photomask
App 20140165236 - Budach; Michael ; et al. | 2014-06-12 |
Ion sources, systems and methods
Grant 8,748,845 - Ward , et al. June 10, 2 | 2014-06-10 |
Method and apparatus for analyzing and/or repairing of an EUV mask defect
Grant 8,674,329 - Budach , et al. March 18, 2 | 2014-03-18 |
Apparatus And Method For Investigating An Object
App 20140027512 - Baur; Christof ; et al. | 2014-01-30 |
Method for electron beam induced etching of layers contaminated with gallium
Grant 8,632,687 - Auth , et al. January 21, 2 | 2014-01-21 |
Methods and systems for removing a material from a sample
Grant 8,623,230 - Auth , et al. January 7, 2 | 2014-01-07 |
Apparatus And Method For Analyzing And Modifying A Specimen Surface
App 20140007306 - Baur; Christof ; et al. | 2014-01-02 |
Method And Apparatus For Analyzing And/or Repairing Of An Euv Mask Defect
App 20130156939 - Budach; Michael ; et al. | 2013-06-20 |
Method for electron beam induced deposition of conductive material
Grant 8,318,593 - Auth , et al. November 27, 2 | 2012-11-27 |
Apparatus and method for investigating and/or modifying a sample
Grant 8,247,782 - Edinger , et al. August 21, 2 | 2012-08-21 |
Ion Sources, Systems And Methods
App 20120141693 - Ward; Billy W. ; et al. | 2012-06-07 |
Perforated Membranes
App 20120138535 - Golzhauser; Armin ; et al. | 2012-06-07 |
Ion sources, systems and methods
Grant 8,110,814 - Ward , et al. February 7, 2 | 2012-02-07 |
Apparatus And Method For Investigating And/or Modifying A Sample
App 20110210181 - Edinger; Klaus ; et al. | 2011-09-01 |
Method For Electron Beam Induced Etching
App 20110183444 - Auth; Nicole ; et al. | 2011-07-28 |
Method For Electron Beam Induced Deposition Of Conductive Material
App 20110183517 - Auth; Nicole ; et al. | 2011-07-28 |
Method For Electron Beam Induced Etching Of Layers Contaminated With Gallium
App 20110183523 - Auth; Nicole ; et al. | 2011-07-28 |
Method For Processing An Object With Miniaturized Structures
App 20100297362 - Budach; Michael ; et al. | 2010-11-25 |
Methods And Systems For Removing A Material From A Sample
App 20100282596 - Auth; Nicole ; et al. | 2010-11-11 |
Method for high-resolution processing of thin layers using electron beams
Grant 7,786,403 - Koops , et al. August 31, 2 | 2010-08-31 |
Ion Sources, Systems And Methods
App 20090179161 - WARD; BILLY W. ; et al. | 2009-07-16 |
Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface
Grant 7,537,708 - Peter Koops , et al. May 26, 2 | 2009-05-26 |
Ion sources, systems and methods
Grant 7,485,873 - Ward , et al. February 3, 2 | 2009-02-03 |
Procedure for etching of materials at the surface with focussed electron beam induced chemical reaction at said surface
Grant 7,452,477 - Koops , et al. November 18, 2 | 2008-11-18 |
Field effect transistor sensor
Grant 7,335,942 - Edinger , et al. February 26, 2 | 2008-02-26 |
Procedure For Etching Of Materials At The Surface With Focussed Electron Beam Induced Chemical Reactions At Said Surface
App 20080011718 - KOOPS; HANS WILFRIED PETER ; et al. | 2008-01-17 |
Ion sources, systems and methods
App 20070194251 - Ward; Billy W. ; et al. | 2007-08-23 |
Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface
Grant 7,238,294 - Koops , et al. July 3, 2 | 2007-07-03 |
Apparatus and method for investigating or modifying a surface with a beam of charged particles
Grant 7,232,997 - Edinger , et al. June 19, 2 | 2007-06-19 |
Apparatus and method for investigating or modifying a surface with a beam of charged particles
App 20050230621 - Edinger, Klaus ; et al. | 2005-10-20 |
Method for high-resolution processing of thin layers using electron beams
App 20050087514 - Koops, Hans ; et al. | 2005-04-28 |
Procedure for etching of materials at the surface with focussed electron beam induced chemical reaction at said surface
App 20050072753 - Koops, Hans Wilfried Peter ; et al. | 2005-04-07 |
Field effect transistor sensor
App 20050062116 - Edinger, Klaus ; et al. | 2005-03-24 |
Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface
App 20040033425 - Koops, Hans Wilfried Peter ; et al. | 2004-02-19 |
Focused ion-beam fabrication of fiber probes for use in near field scanning optical microscopy
Grant 6,633,711 - Pilevar , et al. October 14, 2 | 2003-10-14 |
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