| Patent | Date |
|---|
System and method for detecting design and process defects on a wafer using process monitoring features
Grant 9,710,903 - Fouquet , et al. July 18, 2 | 2017-07-18 |
Coils For Generating A Plasma And For Sputtering
App 20130168232 - NULMAN; Jaim ; et al. | 2013-07-04 |
Coils for generating a plasma and for sputtering
Grant 8,398,832 - Nulman , et al. March 19, 2 | 2013-03-19 |
Systems And Methods For Detecting Design And Process Defects On A Wafer, Reviewing Defects On A Wafer, Selecting One Or More Features Within A Design For Use As Process Monitoring Features, Or Some Combination Thereof
App 20110276935 - Fouquet; Christophe ; et al. | 2011-11-10 |
Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer
Grant 7,893,703 - Rzepiela , et al. February 22, 2 | 2011-02-22 |
Systems configured to perform a non-contact method for determining a property of a specimen
Grant 7,719,294 - Samsavar , et al. May 18, 2 | 2010-05-18 |
Contactless charge measurement of product wafers and control of corona generation and deposition
Grant 7,538,333 - Samsavar , et al. May 26, 2 | 2009-05-26 |
Optical system for measuring samples using short wavelength radiation
Grant 7,369,233 - Nikoonahad , et al. May 6, 2 | 2008-05-06 |
Corona based charge voltage measurement
Grant 7,345,306 - Edelstein , et al. March 18, 2 | 2008-03-18 |
Contactless charge measurement of product wafers and control of corona generation and deposition
Grant 7,248,062 - Samsavar , et al. July 24, 2 | 2007-07-24 |
Systems and Methods for Controlling Deposition of a Charge on a Wafer for Measurement of One or More Electrical Properties of the Wafer
App 20070069759 - Rzepiela; Jeffrey A. ; et al. | 2007-03-29 |
Corona based charge voltage measurement
Grant 7,098,050 - Edelstein , et al. August 29, 2 | 2006-08-29 |
Coils for generating a plasma and for sputtering
App 20060070875 - Nulman; Jaim ; et al. | 2006-04-06 |
Coils for generating a plasma and for sputtering
App 20040256217 - Nulman, Jaim ; et al. | 2004-12-23 |
Coils for generating a plasma and for sputtering
Grant 6,783,639 - Nulman , et al. August 31, 2 | 2004-08-31 |
Optical system for measuring samples using short wavelength radiation
App 20040150820 - Nikoonahad, Mehrdad ; et al. | 2004-08-05 |
Small volume electroplating cell
App 20040104119 - Edelstein, Sergio ; et al. | 2004-06-03 |
Resonant chamber applicator for remote plasma source
Grant 6,603,269 - Vo , et al. August 5, 2 | 2003-08-05 |
Coils for generating a plasma and for sputtering
App 20020144901 - Nulman, Jaim ; et al. | 2002-10-10 |
Alternate steps of IMP and sputtering process to improve sidewall coverage
App 20020084181 - Gopalraja, Praburam ; et al. | 2002-07-04 |
Coils for generating a plasma and for sputtering
Grant 6,368,469 - Nulman , et al. April 9, 2 | 2002-04-09 |
Alternate steps of IMP and sputtering process to improve sidewall coverage
Grant 6,350,353 - Gopalraja , et al. February 26, 2 | 2002-02-26 |
Spin-rinse-drying process for electroplated semiconductor wafers
Grant 6,290,865 - Lloyd , et al. September 18, 2 | 2001-09-18 |
Recessed coil for generating a plasma
App 20010019016 - Subramani, Anantha ; et al. | 2001-09-06 |
Alternate Steps Of Imp And Sputtering Process To Improve Sidewall Coverage
App 20010003607 - GOPALRAJA, PRABURAM ; et al. | 2001-06-14 |
Electrical connector for power transmission in an electrostatic chuck
Grant 5,908,334 - Chen , et al. June 1, 1 | 1999-06-01 |
Wafer heater assembly
Grant 5,796,074 - Edelstein , et al. August 18, 1 | 1998-08-18 |
High temperature polyimide electrostatic chuck
Grant 5,691,876 - Chen , et al. November 25, 1 | 1997-11-25 |
Variable cell size collimator
Grant 5,650,052 - Edelstein , et al. July 22, 1 | 1997-07-22 |
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