Economou; Demetre J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Economou; Demetre J..The latest application filed is for "atomic layer etching with pulsed plasmas".

Company Profile

1.10.10

Economou; Demetre J. - Houston TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Atomic layer etching with pulsed plasmas Grant 10,515,782 - Donnelly , et al. Dec	2019-12-24
Systems and methods for rapidly fabricating nanopatterns in a parallel fashion over large areas Grant 10,207,469 - Donnelly , et al. Feb	2019-02-19
Atomic Layer Etching with Pulsed Plasmas App 20180226227 - Donnelly; Vincent M. ; et al.	2018-08-09
Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus Grant 9,852,893 - Chen , et al. December 26, 2	2017-12-26
Systems And Methods For Rapidly Fabricating Nanopatterns In A Parallel Fashion Over Large Areas App 20170361551 - Donnelly; Vincent M. ; et al.	2017-12-21
Dipole Ring Magnet Assisted Microwave Radial Line Slot Antenna Plasma Processing Method And Apparatus App 20160293389 - Chen; Lee ; et al.	2016-10-06
Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus Grant 8,968,588 - Zhao , et al. March 3, 2	2015-03-03
Low Electron Temperature Microwave Surface-wave Plasma (swp) Processing Method And Apparatus App 20130256272 - Zhao; Jianping ; et al.	2013-10-03
System and method for nano-pantography Grant 8,030,620 - Donnelly , et al. October 4, 2	2011-10-04
Atomic Layer Etching With Pulsed Plasmas App 20110139748 - DONNELLY; Vincent M. ; et al.	2011-06-16
Method and apparatus for nano-pantography Grant 7,883,839 - Donnelly , et al. February 8, 2	2011-02-08
Hyperthermal neutral beam source and method of operating Grant 7,638,759 - Economou , et al. December 29, 2	2009-12-29
System And Method For Nano-pantography App 20090283215 - Donnelly; Vincent M. ; et al.	2009-11-19
Hyperthermal Neutral Beam Source And Method Of Operating App 20080135742 - Economou; Demetre J. ; et al.	2008-06-12
Hyperthermal neutral beam source and method of operating Grant 7,358,484 - Economou , et al. April 15, 2	2008-04-15
Method and apparatus for nano-pantography App 20070131646 - Donnelly; Vincent M. ; et al.	2007-06-14
Hyperthermal neutral beam source and method of operating App 20070069118 - Economou; Demetre J. ; et al.	2007-03-29
Method for measuring plasma properties in semiconductor processing Grant 4,859,277 - Barna , et al. August 22, 1	1989-08-22

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