loadpatents
Patent applications and USPTO patent grants for Ebizuka; Yasushi.The latest application filed is for "charged particle beam apparatus".
Patent | Date |
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Beam irradiation device Grant 11,239,042 - Ikegami , et al. February 1, 2 | 2022-02-01 |
Charged Particle Beam Apparatus App 20210398770 - KAWAMOTO; Yuta ;   et al. | 2021-12-23 |
Charged Particle Beam Apparatus App 20210233738 - Kawamoto; Yuta ;   et al. | 2021-07-29 |
Charged-particle beam device Grant 11,056,310 - Kawamoto , et al. July 6, 2 | 2021-07-06 |
Beam Irradiation Device App 20210027976 - IKEGAMI; Akira ;   et al. | 2021-01-28 |
Beam irradiation device Grant 10,832,886 - Ikegami , et al. November 10, 2 | 2020-11-10 |
Charged Particle Beam Apparatus App 20200294757 - KAWAMOTO; Yuta ;   et al. | 2020-09-17 |
Charged-Particle Beam Device App 20190393014 - KAWAMOTO; Yuta ;   et al. | 2019-12-26 |
Beam Irradiation Device App 20190287754 - IKEGAMI; Akira ;   et al. | 2019-09-19 |
Charged particle beam apparatus for measuring surface potential of a sample Grant 9,799,486 - Kanno , et al. October 24, 2 | 2017-10-24 |
Charged-particle beam device for irradiating a charged particle beam on a sample Grant 9,543,113 - Ebizuka , et al. January 10, 2 | 2017-01-10 |
Electrostatic chuck mechanism and charged particle beam apparatus Grant 9,401,297 - Ebizuka , et al. July 26, 2 | 2016-07-26 |
Charged particle beam device Grant 9,245,710 - Gunji , et al. January 26, 2 | 2016-01-26 |
Charged Particle Beam Apparatus App 20160013010 - KANNO; Seiichiro ;   et al. | 2016-01-14 |
Charged-Particle Beam Device App 20150357156 - EBIZUKA; Yasushi ;   et al. | 2015-12-10 |
Electrostatic Chuck Mechanism and Charged Particle Beam Apparatus App 20150262857 - EBIZUKA; Yasushi ;   et al. | 2015-09-17 |
Charged particle beam apparatus Grant 9,105,446 - Ebizuka , et al. August 11, 2 | 2015-08-11 |
Charged Particle Beam Apparatus App 20150097123 - Ebizuka; Yasushi ;   et al. | 2015-04-09 |
Charged Particle Beam Device App 20150060694 - Gunji; Kazuhiro ;   et al. | 2015-03-05 |
Charged particle beam device Grant 8,933,422 - Ishii , et al. January 13, 2 | 2015-01-13 |
Charged Particle Beam Device App 20130200271 - Ishii; Ryoichi ;   et al. | 2013-08-08 |
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