| Patent | Date |
|---|
Method of supporting and adjusting optical element in exposure apparatus
Grant 7,136,238 - Ebinuma November 14, 2 | 2006-11-14 |
Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device
Grant 7,113,263 - Ebinuma , et al. September 26, 2 | 2006-09-26 |
Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device
Grant 6,867,848 - Ebinuma , et al. March 15, 2 | 2005-03-15 |
Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device
App 20050046815 - Ebinuma, Ryuichi ; et al. | 2005-03-03 |
Driving device and exposure apparatus
Grant 6,750,947 - Tomita , et al. June 15, 2 | 2004-06-15 |
Method of supporting and adjusting optical element in exposure apparatus
App 20040105177 - Ebinuma, Ryuichi | 2004-06-03 |
Stage system and stage driving method for use in exposure apparatus
App 20030098966 - Korenaga, Nobushige ; et al. | 2003-05-29 |
Stage system and stage driving method for use in exposure apparatus
Grant 6,570,645 - Korenaga , et al. May 27, 2 | 2003-05-27 |
Stage System And Stage Driving Method For Use In Exposure Apparatus
App 20020145721 - KORENAGA, NOBUSHIGE ; et al. | 2002-10-10 |
Stage system for exposure apparatus and device manufacturing method in which a stage supporting member and a countermass supporting member provide vibration isolation
Grant 6,396,566 - Ebinuma , et al. May 28, 2 | 2002-05-28 |
Stage System For Exposure Apparatus And Device Manufacturing Method Using The Same
App 20020003616 - EBINUMA, RYUICHI ; et al. | 2002-01-10 |
Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device
App 20010039126 - Ebinuma, Ryuichi ; et al. | 2001-11-08 |
Linear motor and stage system, and scanning exposure apparatus using the same
Grant 6,252,314 - Ebinuma June 26, 2 | 2001-06-26 |
Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus
Grant 6,037,680 - Korenaga , et al. March 14, 2 | 2000-03-14 |
Exposure apparatus and device manufacturing method using the same
Grant 5,933,215 - Inoue , et al. August 3, 1 | 1999-08-03 |
Scan exposure method and apparatus
Grant 5,917,580 - Ebinuma , et al. June 29, 1 | 1999-06-29 |
Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus
Grant 5,841,250 - Korenage , et al. November 24, 1 | 1998-11-24 |
Optical structure and device manufacturing method using the same
Grant 5,822,133 - Mizuno , et al. October 13, 1 | 1998-10-13 |
Exposure method and projection exposure apparatus using the same
Grant 5,822,043 - Ebinuma October 13, 1 | 1998-10-13 |
Alignment apparatus and SOR X-ray exposure apparatus having same
Grant 5,822,389 - Uzawa , et al. October 13, 1 | 1998-10-13 |
Mask, method of producing a device using the mask and aligner with the mask
Grant 5,800,949 - Edo , et al. September 1, 1 | 1998-09-01 |
Mounting method
Grant 5,687,947 - Iwamoto , et al. November 18, 1 | 1997-11-18 |
Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus
Grant 5,593,800 - Fujioka , et al. January 14, 1 | 1997-01-14 |
Temperature controlling device for mask and wafer holders
Grant 5,577,552 - Ebinuma , et al. November 26, 1 | 1996-11-26 |
Recording apparatus having an ink mist evacuation system
Grant 5,552,812 - Ebinuma , et al. September 3, 1 | 1996-09-03 |
Movable stage mechanism and exposure apparatus using the same
Grant 5,537,186 - Korenaga , et al. July 16, 1 | 1996-07-16 |
Recording apparatus and ink cartridge
Grant 5,467,114 - Ebinuma , et al. November 14, 1 | 1995-11-14 |
X-ray exposure apparatus
Grant 5,448,612 - Kasumi , et al. September 5, 1 | 1995-09-05 |
Wafer cooling device
Grant 5,413,167 - Hara , et al. May 9, 1 | 1995-05-09 |
Exposure apparatus
Grant 5,377,251 - Mizusawa , et al. December 27, 1 | 1994-12-27 |
Vacuum chuck
Grant 5,374,829 - Sakamoto , et al. December 20, 1 | 1994-12-20 |
Exposure apparatus
Grant 5,317,615 - Ebinuma , et al. May 31, 1 | 1994-05-31 |
Substrate conveying apparatus
Grant 5,277,539 - Matsui , et al. January 11, 1 | 1994-01-11 |
Wafer holding device in an exposure apparatus
Grant 5,220,171 - Hara , et al. June 15, 1 | 1993-06-15 |
Exposure apparatus
Grant 5,172,402 - Mizusawa , et al. December 15, 1 | 1992-12-15 |
Method of manufacture of semiconductor devices
Grant 5,168,512 - Iwamoto , et al. December 1, 1 | 1992-12-01 |
Exposure apparatus
Grant 5,161,176 - Ebinuma , et al. November 3, 1 | 1992-11-03 |
X-ray transmitting window and method of mounting the same
Grant 5,159,621 - Watanabe , et al. October 27, 1 | 1992-10-27 |
Exposure apparatus for controlling intensity of exposure radiation
Grant 5,157,700 - Kurosawa , et al. October 20, 1 | 1992-10-20 |
Optical fiber sealing assembly
Grant 5,151,967 - Ebinuma September 29, 1 | 1992-09-29 |
Exposure apparatus
Grant 5,150,391 - Ebinuma , et al. September 22, 1 | 1992-09-22 |
Exposure apparatus
Grant 5,138,643 - Sakamoto , et al. August 11, 1 | 1992-08-11 |
X-ray exposure apparatus
Grant 5,125,014 - Watanabe , et al. June 23, 1 | 1992-06-23 |
X-Ray exposure apparatus
Grant 5,123,036 - Uno , et al. June 16, 1 | 1992-06-16 |
Alignment system
Grant 5,112,133 - Kurosawa , et al. May 12, 1 | 1992-05-12 |
Ink jet recording apparatus capable of mounting an ink tank and ink tank for use in same
Grant 5,008,688 - Ebinuma , et al. April 16, 1 | 1991-04-16 |
Ink jet recording apparatus comprising mechanism for conveying sheet-like cleaning medium to a recording region, discharge recovery treatment method employed in the same, and cleaning sheet also employed in the same
Grant 4,947,190 - Mizusawa , et al. August 7, 1 | 1990-08-07 |
Recorder having means for supporting the entire width of a continuous recording medium
Grant 4,894,668 - Ozawa , et al. January 16, 1 | 1990-01-16 |
Recording apparatus and ink cartridge
Grant 4,893,137 - Ebinuma , et al. January 9, 1 | 1990-01-09 |
Ink jet recording apparatus and capping device
Grant 4,748,459 - Ichihashi , et al. May 31, 1 | 1988-05-31 |
Ink supply device and an ink jet recording apparatus having the ink supply device
Grant 4,737,801 - Ichihashi , et al. April 12, 1 | 1988-04-12 |
Temperature control system and ink jet printer utilizing the temperature control system
Grant 4,704,620 - Ichihashi , et al. November 3, 1 | 1987-11-03 |
Ink jet recorder
Grant 4,695,855 - Ichihashi , et al. September 22, 1 | 1987-09-22 |
Ink jet recorder with improved system for transporting ink to or from recording heads
Grant 4,680,696 - Ebinuma , et al. July 14, 1 | 1987-07-14 |
Continuous-form recorder having decrumpling means for removing creases in the form
Grant 4,651,173 - Ozawa , et al. March 17, 1 | 1987-03-17 |
Ink reservoir
Grant 4,610,202 - Ebinuma , et al. September 9, 1 | 1986-09-09 |
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