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name:-0.055478096008301
name:-0.056135892868042
name:-0.00057101249694824
Ebihara; Akimitsu Patent Filings

Ebihara; Akimitsu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ebihara; Akimitsu.The latest application filed is for "exposure apparatus, and device manufacturing method".

Company Profile
0.61.45
  • Ebihara; Akimitsu - Fukaya JP
  • EBIHARA; Akimitsu - Fukaya-shi JP
  • Ebihara; Akimitsu - Sennan-gun JP
  • Ebihara; Akimitsu - Osaka N/A JP
  • Ebihara; Akimitsu - Sennangun Osaka JP
  • Ebihara; Akimitsu - Nishi kyo JP
  • Ebihara; Akimitsu - Saitama-ken JP
  • Ebihara; Akimitsu - Kyoto-Fu JP
  • Ebihara; Akimitsu - Nishi kyo-ku JP
  • Ebihara; Akimitsu - Kyoto JP
  • Ebihara, Akimitsu - Kyoto-shi JP
  • Ebihara; Akimitsu - San Mateo CA
  • Ebihara; Akimitsu - Kanagawa JP
  • Ebihara; Akimitsu - Kanagawa-ken JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Exposure apparatus, and device manufacturing method
Grant 10,191,388 - Ebihara Ja		2019-01-29
Exposure Apparatus, And Device Manufacturing Method
App 20180299788 - EBIHARA; Akimitsu		2018-10-18
Exposure apparatus and device manufacturing method
Grant 10,007,188 - Ebihara June 26, 2		2018-06-26
Exposure Apparatus And Device Manufacturing Method
App 20180039185 - EBIHARA; Akimitsu		2018-02-08
Exposure apparatus and device manufacturing method
Grant 9,810,995 - Ebihara November 7, 2		2017-11-07
Exposure Apparatus And Device Manufacturing Method
App 20170123326 - EBIHARA; Akimitsu		2017-05-04
Exposure apparatus and device manufacturing method
Grant 9,551,943 - Ebihara January 24, 2		2017-01-24
Exposure Apparatus And Device Manufacturing Method
App 20160202617 - EBIHARA; Akimitsu		2016-07-14
Exposure apparatus and device manufacturing method
Grant 9,274,437 - Ebihara March 1, 2		2016-03-01
Exposure Apparatus And Device Manufacturing Method
App 20150198897 - EBIHARA; Akimitsu		2015-07-16
Exposure apparatus, and device manufacturing method
Grant 9,025,129 - Ebihara May 5, 2		2015-05-05
Exposure apparatus and device manufacturing method
Grant 9,019,473 - Ebihara April 28, 2		2015-04-28
Exposure apparatus and device manufacturing method
Grant 9,001,307 - Ebihara April 7, 2		2015-04-07
Exposure apparatus and making method thereof
Grant 8,953,148 - Ebihara February 10, 2		2015-02-10
Exposure Apparatus, And Device Manufacturing Method
App 20140293252 - EBIHARA; Akimitsu		2014-10-02
Exposure apparatus, and device manufacturing method
Grant 8,830,445 - Ebihara September 9, 2		2014-09-09
Motor device, method of manufacturing motor device, and robot device
Grant 8,796,905 - Nagase , et al. August 5, 2		2014-08-05
Exposure Apparatus And Device Manufacturing Method
App 20140211176 - EBIHARA; Akimitsu		2014-07-31
Exposure Apparatus And Device Manufacturing Method
App 20140211177 - EBIHARA; Akimitsu		2014-07-31
Projection optical device and exposure apparatus
Grant 8,767,172 - Ebihara , et al. July 1, 2		2014-07-01
Exposure apparatus, and device manufacturing method
Grant 8,767,177 - Ebihara July 1, 2		2014-07-01
Exposure apparatus, and device manufacturing method
Grant 8,724,085 - Ebihara May 13, 2		2014-05-13
Exposure apparatus, and device manufacturing method
Grant 8,717,537 - Ebihara May 6, 2		2014-05-06
Exposure apparatus, and device manufacturing method
Grant 8,705,001 - Ebihara April 22, 2		2014-04-22
Exposure apparatus, and device manufacturing method
Grant 8,692,976 - Ebihara April 8, 2		2014-04-08
Stage device and coordinate correction method for the same, exposure apparatus, and device manufacturing method
Grant 8,681,314 - Ebihara , et al. March 25, 2		2014-03-25
Motor device, apparatus and driving method for rotor
Grant 8,674,586 - Ebihara March 18, 2		2014-03-18
Exposure Apparatus, And Device Manufacturing Method
App 20130250257 - EBIHARA; Akimitsu		2013-09-26
Exposure Apparatus, And Device Manufacturing Method
App 20130229637 - EBIHARA; Akimitsu		2013-09-05
Exposure Apparatus, And Device Manufacturing Method
App 20130215403 - EBIHARA; Akimitsu		2013-08-22
Motor device, method of manufacturing motor device, and robot device
Grant 8,441,171 - Okada , et al. May 14, 2		2013-05-14
Exposure apparatus, and device manufacturing method
Grant 8,436,978 - Ebihara May 7, 2		2013-05-07
Exposing method, exposure apparatus, and device fabricating method
Grant 8,436,981 - Ebihara May 7, 2		2013-05-07
Exposure apparatus, and device manufacturing method
Grant 8,436,979 - Ebihara May 7, 2		2013-05-07
Exposure apparatus, and device manufacturing method
Grant 8,319,941 - Ebihara November 27, 2		2012-11-27
Exposure Apparatus, And Device Manufacturing Method
App 20120200837 - EBIHARA; Akimitsu		2012-08-09
Isolation System For An Optical Element Of An Exposure Apparatus
App 20120127445 - Ebihara; Akimitsu ;   et al.		2012-05-24
Exposure apparatus, and device manufacturing method
App 20120008111 - Ebihara; Akimitsu		2012-01-12
Motor device, method of manufacturing motor device, and robot device
App 20110241485 - Nagase; Takashi ;   et al.		2011-10-06
Motor device, method of manufacturing motor device, and robot device
App 20110241484 - OKADA; Masashi ;   et al.		2011-10-06
Exposure apparatus, and device manufacturing method
Grant 8,027,027 - Ebihara September 27, 2		2011-09-27
Exposure apparatus, and device manufacturing method
Grant 8,018,575 - Ebihara September 13, 2		2011-09-13
Projection optical device and exposure apparatus
App 20110043781 - Ebihara; Akimitsu ;   et al.		2011-02-24
Exposure apparatus, and device manufacturing method
App 20110025996 - Ebihara; Akimitsu		2011-02-03
Exposure apparatus, and device manufacturing method
App 20110025997 - Ebihara; Akimitsu		2011-02-03
Exposure apparatus, and device manufacturing method
Grant 7,812,925 - Ebihara October 12, 2		2010-10-12
Motor device, apparatus and driving method for rotor
App 20100164326 - Ebihara; Akimitsu		2010-07-01
Wafer positioner with planar motor and mag-lev fine stage
Grant RE41,232 - Hazelton , et al. April 20, 2		2010-04-20
Exposing method, exposure apparatus, and device fabricating method
App 20090268177 - Ebihara; Akimitsu		2009-10-29
Electromagnetic alignment and scanning apparatus
Grant 7,573,225 - Ebihara August 11, 2		2009-08-11
Exposure apparatus, and device manufacturing method
App 20090190112 - Ebihara; Akimitsu		2009-07-30
Exposure apparatus, and device manufacturing method
Grant 7,486,385 - Ebihara February 3, 2		2009-02-03
Stage Apparatus and Exposing Apparatus
App 20080236997 - Ebihara; Akimitsu		2008-10-02
Projection Optical Device And Exposure Apparatus
App 20080068568 - Ebihara; Akimitsu ;   et al.		2008-03-20
Exposure apparatus, and device manufacturing method
Grant 7,321,419 - Ebihara January 22, 2		2008-01-22
Exposure apparatus, and device manufacturing method
App 20080002166 - Ebihara; Akimitsu		2008-01-03
Exposure apparatus, and device manufacturing method
App 20070211234 - Ebihara; Akimitsu		2007-09-13
Exposure apparatus and making method thereof
App 20070206170 - Ebihara; Akimitsu		2007-09-06
Stage device and coordinate correction method for the same, exposure apparatus, and device manufacturing method
App 20070109522 - Ebihara; Akimitsu ;   et al.		2007-05-17
Utility transfer apparatus, stage apparatus, exposure apparatus, and device manufacturing method
App 20070095739 - Ebihara; Akimitsu		2007-05-03
Exposure apparatus, and device manufacturing method
App 20070064214 - Ebihara; Akimitsu		2007-03-22
Low spring constant, pneumatic suspension with vacuum chamber, air bearing, active force compensation, and sectioned vacuum chambers
App 20070030462 - Yuan; Bausan ;   et al.		2007-02-08
Exposure apparatus, and device manufacturing method
App 20060132739 - Ebihara; Akimitsu		2006-06-22
Exposure apparatus, and device manufacturing method
App 20060132740 - Ebihara; Akimitsu		2006-06-22
Exposure apparatus, and device manufacturing method
App 20060114445 - Ebihara; Akimitsu		2006-06-01
Electromagnetic alignment and scanning apparatus
Grant 7,012,398 - Ebihara , et al. March 14, 2		2006-03-14
Electromagnetic alignment and scanning apparatus
App 20050280390 - Ebihara, Akimitsu		2005-12-22
Electromagnetic alignment and scanning apparatus
Grant 6,969,966 - Ebihara , et al. November 29, 2		2005-11-29
Electromagnetic alignment and scanning apparatus
App 20050088133 - Ebihara, Akimitsu ;   et al.		2005-04-28
Electromagnetic alignment and scanning apparatus
App 20050083006 - Ebihara, Akimitsu ;   et al.		2005-04-21
Electromagnetic alignment and scanning apparatus
Grant 6,844,696 - Ebihara , et al. January 18, 2		2005-01-18
Electromagnetic alignment and scanning apparatus
Grant 6,844,695 - Ebihara , et al. January 18, 2		2005-01-18
Electromagnetic alignment and scanning apparatus
Grant 6,693,402 - Ebihara , et al. February 17, 2		2004-02-17
Stage apparatus and method of using the same
Grant 6,677,691 - Ebihara January 13, 2		2004-01-13
Electromagnetic alignment and scanning apparatus
App 20030184253 - Ebihara, Akimitsu ;   et al.		2003-10-02
Electromagnetic alignment and scanning apparatus
App 20030184254 - Ebihara, Akimitsu ;   et al.		2003-10-02
Wafer stage with magnetic bearings
App 20030173833 - Hazelton, Andrew J. ;   et al.		2003-09-18
Three-dimensional shape measuring apparatus
App 20030058455 - Ebihara, Akimitsu ;   et al.		2003-03-27
Stage apparatus and method of using the same
App 20020140296 - Ebihara, Akimitsu		2002-10-03
Wafer positioner with planar motor and mag-lev fine stage
Grant 6,437,463 - Hazelton , et al. August 20, 2		2002-08-20
Apparatus and method for measuring three-dimensional shape of object
Grant 6,396,589 - Ebihara May 28, 2		2002-05-28
Scanning exposure methods
Grant 6,391,503 - Ebihara May 21, 2		2002-05-21
Electromagnetic alignment and scanning apparatus
App 20020017890 - Ebihara, Akimitsu ;   et al.		2002-02-14
Electromagnetic alignment and scanning apparatus
Grant 6,329,780 - Ebihara , et al. December 11, 2		2001-12-11
Electromagnetic alignment and scanning apparatus
Grant 6,323,935 - Ebihara , et al. November 27, 2		2001-11-27
Scanning exposure methods
App 20010038959 - Ebihara, Akimitsu		2001-11-08
Electromagnetic alignment and scanning apparatus
Grant 6,255,796 - Ebihara , et al. July 3, 2		2001-07-03
Electromagnetic alignment and scanning apparatus
Grant 6,252,370 - Ebihara , et al. June 26, 2		2001-06-26
Electromagnetic alignment and scanning apparatus
Grant 6,246,204 - Ebihara , et al. June 12, 2		2001-06-12
Scanning Exposure Method
App 20010003028 - Ebihara, Akimitsu		2001-06-07
Precision motion stage with single guide beam and follower stage
Grant 5,996,437 - Novak , et al. December 7, 1		1999-12-07
Tilt and movement apparatus using flexure and air cylinder
Grant 5,806,193 - Ebihara September 15, 1		1998-09-15
Stage apparatus
Grant 5,726,542 - Ebihara March 10, 1		1998-03-10
Precision motion stage with single guide beam and follower stage
Grant 5,623,853 - Novak , et al. April 29, 1		1997-04-29

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