Ebert; Earl William

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ebert; Earl William.The latest application filed is for "patterning device support, lithographic apparatus, and method of controlling patterning device temperature".

Company Profile

0.4.5

Ebert; Earl William - Oxford CT
Ebert; Earl William - Wilton CT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,977,351 - Ebert , et al. May 22, 2	2018-05-22
Measuring method, measurement apparatus, lithographic apparatus and device manufacturing method Grant 9,891,540 - Ebert , et al. February 13, 2	2018-02-13
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20170307986 - EBERT; Earl William ; et al.	2017-10-26
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,766,557 - Ebert , et al. September 19, 2	2017-09-19
Measuring Method, Measurement Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20170235230 - EBERT; Earl William ; et al.	2017-08-17
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20170160652 - EBERT; Earl William ; et al.	2017-06-08
Reticle Heater to Keep Reticle Heating Uniform App 20150212432 - Onvlee; Johannes ; et al.	2015-07-30
Tunable wavelength illumination system Grant 8,730,476 - Den Boef , et al. May 20, 2	2014-05-20
Tunable Wavelength Illumination System App 20130258316 - DEN BOEF; Arie Jeffrey ; et al.	2013-10-03

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