EBE; Akinori
Patent Applications and Registrations
Patent applications and USPTO patent grants for EBE; Akinori.The latest application filed is for "radio-frequency antenna and plasma processing device".
- EBE; Akinori - Kyoto-shi JP
- Ebe; Akinori - Kyoto N/A JP
- Ebe; Akinori - Osaka JP
| Patent | Date |
|---|---|
| Radio-frequency Antenna And Plasma Processing Device App 20210327683 - EBE; Akinori ; et al. | 2021-10-21 |
| Plasma Source App 20210127476 - EBE; Akinori | 2021-04-29 |
| Plasma Source And Plasma Processing Apparatus App 20190333735 - EBE; Akinori | 2019-10-31 |
| Radio-frequency antenna unit and plasma processing apparatus Grant 9,078,336 - Setsuhara , et al. July 7, 2 | 2015-07-07 |
| Plasma processing apparatus Grant 8,931,433 - Setsuhara , et al. January 13, 2 | 2015-01-13 |
| Plasma generation device and plasma processing device Grant 8,917,022 - Ebe , et al. December 23, 2 | 2014-12-23 |
| Thin-film forming sputtering system Grant 8,916,034 - Setsuhara , et al. December 23, 2 | 2014-12-23 |
| Thin-film Formation Sputtering Device App 20140216928 - Setsuhara; Yuichi ; et al. | 2014-08-07 |
| Antenna For Plasma Processing Device, And Plasma Processing Device Using The Same App 20140210337 - Setsuhara; Yuichi ; et al. | 2014-07-31 |
| Plasma Processing Device App 20140150975 - Ebe; Akinori ; et al. | 2014-06-05 |
| Plasma Processing Device App 20130220548 - Setsuhara; Yuichi ; et al. | 2013-08-29 |
| Plasma Processing Device App 20130192759 - Setsuhara; Yuichi ; et al. | 2013-08-01 |
| Plasma generator, plasma control method and method of producing substrate Grant 8,444,806 - Miyake , et al. May 21, 2 | 2013-05-21 |
| Sputtering System App 20130043128 - Ebe; Akinori ; et al. | 2013-02-21 |
| Plasma Processing Device App 20120031563 - Setsuhara; Yuichi ; et al. | 2012-02-09 |
| Plasma Processing Apparatus App 20120031562 - Setsuhara; Yuichi ; et al. | 2012-02-09 |
| Thin-film Forming Sputtering System App 20110203922 - Setsuhara; Yuichi ; et al. | 2011-08-25 |
| Plasma Generation Device And Plasma Processing Device App 20110115380 - Ebe; Akinori ; et al. | 2011-05-19 |
| Radio-frequency Antenna Unit And Plasma Processing Apparatus App 20110080094 - Setsuhara; Yuichi ; et al. | 2011-04-07 |
| Plasma producing method and apparatus as well as plasma processing apparatus Grant 7,880,392 - Kato , et al. February 1, 2 | 2011-02-01 |
| Plasma Generator, Plasma Control Method And Method Of Producing Substrate App 20100304046 - Miyake; Shoji ; et al. | 2010-12-02 |
| Plasma Processing Apparatus App 20100263797 - Setsuhara; Yuichi ; et al. | 2010-10-21 |
| Plasma generator, plasma control method, and method of producing substrate Grant 7,785,441 - Miyake , et al. August 31, 2 | 2010-08-31 |
| Plasma Generating Method, Plasma Generating Apparatus, And Plasma Processing Apparatus App 20100189921 - DEGUCHI; Hiroshige ; et al. | 2010-07-29 |
| Plasma generating method, plasma generating apparatus, and plasma processing apparatus App 20070193512 - Deguchi; Hiroshige ; et al. | 2007-08-23 |
| Plasma generating method, plasma generating apparatus, and plasma processing apparatus App 20070193513 - Deguchi; Hiroshige ; et al. | 2007-08-23 |
| Plasma producing method and apparatus as well as plasma processing apparatus App 20070144672 - Kato; Kenji ; et al. | 2007-06-28 |
| Plasma producing method and apparatus as well as plasma processing apparatus App 20070095287 - Kato; Kenji ; et al. | 2007-05-03 |
| Plasma generation device, plasma control method, and substrate manufacturing method App 20060049138 - Miyake; Shoji ; et al. | 2006-03-09 |
| Thin polycrystalline silicon film forming apparatus Grant 6,620,247 - Ebe , et al. September 16, 2 | 2003-09-16 |
| Thin polycrystalline silicon film forming method and thin film forming apparatus App 20020192394 - Ebe, Akinori ; et al. | 2002-12-19 |
| Film forming method and apparatus Grant 6,294,479 - Ebe , et al. September 25, 2 | 2001-09-25 |
| Copper crystal film coated organic substrate Grant 5,501,911 - Ebe , et al. March 26, 1 | 1996-03-26 |
| Method of manufacturing film carrier type substrate Grant 5,496,772 - Ebe , et al. March 5, 1 | 1996-03-05 |
| Method of forming copper film on substrate Grant 5,316,802 - Ebe , et al. May 31, 1 | 1994-05-31 |
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