Dziura; Thaddeus Gerard

Patent Applications and Registrations

Patent applications and USPTO patent grants for Dziura; Thaddeus Gerard.The latest application filed is for "full beam metrology for x-ray scatterometry systems".

Company Profile

8.20.20

Dziura; Thaddeus Gerard - San Jose CA

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Patent Activity

Patent	Date
Full Beam Metrology For X-Ray Scatterometry Systems App 20220268714 - Gellineau; Antonio Arion ; et al.	2022-08-25
Methods And Systems For Accurate Measurement Of Deep Structures Having Distorted Geometry App 20220252395 - Hench; John J. ; et al.	2022-08-11
Full beam metrology for x-ray scatterometry systems Grant 11,313,816 - Gellineau , et al. April 26, 2	2022-04-26
Process Monitoring Of Deep Structures With X-Ray Scatterometry App 20210407864 - Gellineau; Antonio Arion ; et al.	2021-12-30
Process monitoring of deep structures with X-ray scatterometry Grant 11,145,559 - Gellineau , et al. October 12, 2	2021-10-12
Process Monitoring Of Deep Structures With X-Ray Scatterometry App 20200303265 - Gellineau; Antonio Arion ; et al.	2020-09-24
Full Beam Metrology For X-Ray Scatterometry Systems App 20200300790 - Gellineau; Antonio Arion ; et al.	2020-09-24
Full beam metrology for X-ray scatterometry systems Grant 10,775,323 - Gellineau , et al. Sept	2020-09-15
Process monitoring of deep structures with X-ray scatterometry Grant 10,727,142 - Gellineau , et al.	2020-07-28
Measurement of multiple patterning parameters Grant 10,612,916 - Shchegrov , et al.	2020-04-07
Methods and apparatus for patterned wafer characterization Grant 10,502,694 - Dziura , et al. Dec	2019-12-10
X-ray scatterometry metrology for high aspect ratio structures Grant 10,352,695 - Dziura , et al. July 16, 2	2019-07-16
Model optimization approach based on spectral sensitivity Grant 10,255,385 - Pandev , et al.	2019-04-09
Signal response metrology based on measurements of proxy structures Grant 10,151,986 - Shchegrov , et al. Dec	2018-12-11
System, method and computer program product for combining raw data from multiple metrology tools Grant 10,152,678 - Pandev , et al. Dec	2018-12-11
Process Monitoring Of Deep Structures With X-Ray Scatterometry App 20180350699 - Gellineau; Antonio Arion ; et al.	2018-12-06
Full Beam Metrology For X-Ray Scatterometry Systems App 20180106735 - Gellineau; Antonio Arion ; et al.	2018-04-19
Measurement Of Multiple Patterning Parameters App 20180051984 - Shchegrov; Andrei V. ; et al.	2018-02-22
Measurement of multiple patterning parameters Grant 9,816,810 - Shchegrov , et al. November 14, 2	2017-11-14
Metrology tool with combined XRF and SAXS capabilities Grant 9,778,213 - Bakeman , et al. October 3, 2	2017-10-03
X-Ray Scatterometry Metrology For High Aspect Ratio Structures App 20170167862 - Dziura; Thaddeus Gerard ; et al.	2017-06-15
Measurement Of Multiple Patterning Parameters App 20170003123 - Shchegrov; Andrei V. ; et al.	2017-01-05
Combined x-ray and optical metrology Grant 9,535,018 - Peterlinz , et al. January 3, 2	2017-01-03
Measurement of multiple patterning parameters Grant 9,490,182 - Shchegrov , et al. November 8, 2	2016-11-08
Optical parametric model optimization Grant 9,435,735 - Dziura September 6, 2	2016-09-06
System, Method And Computer Program Product For Combining Raw Data From Multiple Metrology Tools App 20160141193 - Pandev; Stilian Ivanov ; et al.	2016-05-19
Metrology system optimization for parameter tracking Grant 9,255,877 - Veldman , et al. February 9, 2	2016-02-09
Signal Response Metrology Based On Measurements Of Proxy Structures App 20160003609 - Shchegrov; Andrei V. ; et al.	2016-01-07
Measurement Of Multiple Patterning Parameters App 20150176985 - Shchegrov; Andrei V. ; et al.	2015-06-25
Metrology Tool With Combined XRF And SAXS Capabilities App 20150051877 - Bakeman; Michael S. ; et al.	2015-02-19
Methods And Apparatus For Patterned Wafer Characterization App 20150046121 - Dziura; Thaddeus Gerard ; et al.	2015-02-12
Combined X-Ray and Optical Metrology App 20150032398 - Peterlinz; Kevin A. ; et al.	2015-01-29
Metrology System Optimization For Parameter Tracking App 20140347666 - Veldman; Andrei ; et al.	2014-11-27
Optical metrology using targets with field enhancement elements Grant 8,879,073 - Madsen , et al. November 4, 2	2014-11-04
Metrology systems and methods for high aspect ratio and large lateral dimension structures Grant 8,860,937 - Dziura , et al. October 14, 2	2014-10-14
Model Optimization Approach Based On Spectral Sensitivity App 20130262044 - Pandev; Stilian Ivanov ; et al.	2013-10-03
Optical Metrology Using Targets With Field Enhancement Elements App 20130222795 - Madsen; Jonathan M. ; et al.	2013-08-29

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