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Position and temperature monitoring of ALD platen susceptor
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Rf Power Delivery Architecture With Switchable Match And Frequency Tuning
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Multi-zone Heater Control For Wafer Processing Equipment
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Vertically Adjustable Plasma Source
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Paired Dynamic Parallel Plate Capacitively Coupled Plasmas
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Plasma Source With Ceramic Electrode Plate
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Bipolar Electrostatic Chuck To Limit Dc Discharge
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Shaped electrodes for improved plasma exposure from vertical plasma source
Grant 11,315,763 - Bera , et al. April 26, 2 | 2022-04-26 |
High Temperature Bipolar Electrostatic Chuck
App 20220122875 - Li; Jian ; et al. | 2022-04-21 |
Multi-pressure Bipolar Electrostatic Chucking
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Real Time Bias Detection And Correction For Electrostatic Chuck
App 20220122874 - Li; Jian ; et al. | 2022-04-21 |
Power Supply Signal Conditioning For An Electrostatic Chuck
App 20220102179 - Ye; Zheng John ; et al. | 2022-03-31 |
Paired dynamic parallel plate capacitively coupled plasmas
Grant 11,282,676 - Ponnekanti , et al. March 22, 2 | 2022-03-22 |
Plasma Source With Floating Electrodes
App 20220084796 - Truong; Quoc ; et al. | 2022-03-17 |
Substrate transfer structure
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Microwave Plasma Source For Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
App 20210327686 - Li; Xiaopu ; et al. | 2021-10-21 |
Phased array modular high-frequency source
Grant 11,114,282 - Kraus , et al. September 7, 2 | 2021-09-07 |
Geometrically selective deposition of dielectric films utilizing low frequency bias
Grant 11,081,318 - Ohno , et al. August 3, 2 | 2021-08-03 |
RF Power Source Operation In Plasma Enhanced Processes
App 20210125820 - Moghadam; Farhad ; et al. | 2021-04-29 |
Methods and Apparatus for Controlling RF Parameters at Multiple Frequencies
App 20210059037 - Ye; Zheng John ; et al. | 2021-02-25 |
Microwave Plasma Source For Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
App 20210050187 - Kudela; Jozef ; et al. | 2021-02-18 |
Shaped Electrodes For Improved Plasma Exposure From Vertical Plasma Source
App 20200395194 - Bera; Kallol ; et al. | 2020-12-17 |
Spatial atomic layer deposition chamber with plasma pulsing to prevent charge damage
Grant 10,854,428 - Tanaka , et al. December 1, 2 | 2020-12-01 |
Phased Array Modular High-frequency Source
App 20200303167 - Kraus; Philip Allan ; et al. | 2020-09-24 |
Shaped electrodes for improved plasma exposure from vertical plasma source
Grant 10,763,085 - Bera , et al. Sep | 2020-09-01 |
Phased array modular high-frequency source
Grant 10,720,311 - Kraus , et al. | 2020-07-21 |
Phased Array Modular High-frequency Source
App 20200066490 - Kraus; Philip Allan ; et al. | 2020-02-27 |
Paired Dynamic Parallel Plate Capacitively Coupled Plasmas
App 20190385819 - Ponnekanti; Hari ; et al. | 2019-12-19 |
Phased array modular high-frequency source
Grant 10,504,699 - Kraus , et al. Dec | 2019-12-10 |
Phased Array Modular High-frequency Source
App 20190326096 - KRAUS; PHILIP ALLAN ; et al. | 2019-10-24 |
Microwave Plasma Source With Split Window
App 20190311886 - Chandrasekar; Siva ; et al. | 2019-10-10 |
Position And Temperature Monitoring Of ALD Platen Susceptor
App 20190244842 - Ravid; Abraham ; et al. | 2019-08-08 |
Shaped Electrodes For Improved Plasma Exposure From Vertical Plasma Source
App 20190189404 - Bera; Kallol ; et al. | 2019-06-20 |
Geometrically Selective Deposition Of Dielectric Films Utilizing Low Frequency Bias
App 20190189400 - Ohno; Kenichi ; et al. | 2019-06-20 |
Spatial Atomic Layer Deposition Chamber With Plasma Pulsing To Prevent Charge Damage
App 20190180985 - Tanaka; Tsutomu ; et al. | 2019-06-13 |
Position and temperature monitoring of ALD platen susceptor
Grant 10,312,120 - Ravid , et al. | 2019-06-04 |
Fast and continuous eddy-current metrology of a conductive film
Grant 10,234,261 - Budiarto , et al. | 2019-03-19 |
Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods
Grant 9,986,598 - Busche , et al. May 29, 2 | 2018-05-29 |
Non-Contact Sheet Resistance Measurement of Barrier and/or Seed Layers Prior to Electroplating
App 20170226655 - Ravid; Abraham ; et al. | 2017-08-10 |
Non-contact sheet resistance measurement of barrier and/or seed layers prior to electroplating
Grant 9,631,919 - Ravid , et al. April 25, 2 | 2017-04-25 |
Film measurement
Grant 9,335,151 - Budiarto , et al. May 10, 2 | 2016-05-10 |
Position And Temperature Monitoring Of ALD Platen Susceptor
App 20160027675 - Ravid; Abraham ; et al. | 2016-01-28 |
Temperature Control Apparatus Including Groove-routed Optical Fiber Heating, Substrate Temperature Control Systems, Electronic Device Processing Systems, And Processing Methods
App 20160007411 - Busche; Matthew ; et al. | 2016-01-07 |
Fast And Continuous Eddy-current Metrology Of A Conductive Film
App 20140367266 - Budiarto; Edward J. ; et al. | 2014-12-18 |
Non-contact Sheet Resistance Measurement Of Barrier And/or Seed Layers Prior To Electroplating
App 20140367265 - Ravid; Abraham ; et al. | 2014-12-18 |
Methods and apparatus for processing substrates using model-based control
Grant 8,880,210 - Porthouse , et al. November 4, 2 | 2014-11-04 |
Film Measurement
App 20140117982 - BUDIARTO; Edward W. ; et al. | 2014-05-01 |
Methods And Apparatus For Processing Substrates Using Model-based Control
App 20130018500 - PORTHOUSE; KEITH BRIAN ; et al. | 2013-01-17 |
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