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Patent applications and USPTO patent grants for Dzengeleski; Joseph P..The latest application filed is for "negative ribbon ion beams from pulsed plasmas".
Patent | Date |
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Negative ribbon ion beams from pulsed plasmas Grant 10,290,470 - Distaso , et al. | 2019-05-14 |
Negative Ribbon Ion Beams from Pulsed Plasmas App 20170309454 - Distaso; Daniel ;   et al. | 2017-10-26 |
Negative ribbon ion beams from pulsed plasmas Grant 9,734,991 - Distaso , et al. August 15, 2 | 2017-08-15 |
Negative Ribbon Ion Beams from Pulsed Plasmas App 20170032937 - Distaso; Daniel ;   et al. | 2017-02-02 |
Processing apparatus and method of treating a substrate Grant 9,287,085 - Allen , et al. March 15, 2 | 2016-03-15 |
Processing Apparatus And Method Of Treating A Substrate App 20150325405 - Allen; Ernest E. ;   et al. | 2015-11-12 |
Ion beam measurement system and method Grant 8,698,108 - Dzengeleski , et al. April 15, 2 | 2014-04-15 |
System And Method For Controlling Plasma Deposition Uniformity App 20120021136 - Dzengeleski; Joseph P. ;   et al. | 2012-01-26 |
Plasma Ion Process Uniformity Monitor App 20100159120 - Dzengeleski; Joseph P. ;   et al. | 2010-06-24 |
Method And Apparatus For Plasma Dose Measurement App 20100155600 - Dzengeleski; Joseph P ;   et al. | 2010-06-24 |
Techniques for ion beam current measurement using a scanning beam current transformer Grant 7,652,270 - Dzengeleski , et al. January 26, 2 | 2010-01-26 |
Automated faraday sensor test system Grant 7,564,048 - Dzengeleski , et al. July 21, 2 | 2009-07-21 |
Magnetic monitoring of a Faraday cup for an ion implanter Grant 7,521,691 - Dzengeleski , et al. April 21, 2 | 2009-04-21 |
Scan pattern for an ion implanter Grant 7,498,590 - Dzengeleski March 3, 2 | 2009-03-03 |
Techniques For Ion Beam Current Measurement Using A Scanning Beam Current Transformer App 20080302955 - Dzengeleski; Joseph P. ;   et al. | 2008-12-11 |
Ion beam implant current, spot width and position tuning Grant 7,442,944 - Chang , et al. October 28, 2 | 2008-10-28 |
Magnetic Monitoring Of A Faraday Cup For An Ion Implanter App 20080135776 - Dzengeleski; Joseph P. ;   et al. | 2008-06-12 |
Faraday system integrity determination Grant 7,383,141 - Aggarwal , et al. June 3, 2 | 2008-06-03 |
Scan pattern for an ion implanter App 20080073575 - Dzengeleski; Joseph P. | 2008-03-27 |
Automated faraday sensor test system App 20080073551 - Dzengeleski; Joseph P. ;   et al. | 2008-03-27 |
Faraday system integrity determination App 20070100567 - Aggarwal; Vinay ;   et al. | 2007-05-03 |
Ion beam implant current, spot width and position tuning App 20060076510 - Chang; Shengwu ;   et al. | 2006-04-13 |
Method and system for in-situ calibration of a dose controller for ion implantation App 20050133728 - Onat, Tamer B. ;   et al. | 2005-06-23 |
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