Patent | Date |
---|
Atomic layer deposition method of depositing an oxide on a substrate Grant 7,838,084 - Derderian , et al. November 23, 2 | 2010-11-23 |
Substrate susceptors for receiving semiconductor substrates to be deposited upon Grant 7,585,371 - Blomiley , et al. September 8, 2 | 2009-09-08 |
Atomic layer deposition method of depositing an oxide on a substrate Grant 7,431,966 - Derderian , et al. October 7, 2 | 2008-10-07 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces Grant 7,427,425 - Carpenter , et al. September 23, 2 | 2008-09-23 |
Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers Grant 7,335,396 - Carpenter , et al. February 26, 2 | 2008-02-26 |
Substrate susceptor for receiving semiconductor substrates to be deposited upon App 20070087576 - Blomiley; Eric R. ;   et al. | 2007-04-19 |
Atomic layer deposition method of depositing an oxide on a substrate App 20060257584 - Derderian; Garo J. ;   et al. | 2006-11-16 |
Atomic layer deposition methods App 20060251815 - Hamer; Kevin T. ;   et al. | 2006-11-09 |
Substrate susceptors for receiving semiconductor substrates to be deposited upon App 20060243209 - Blomiley; Eric R. ;   et al. | 2006-11-02 |
Substrate susceptors for receiving semiconductor substrates to be deposited upon App 20060243208 - Blomiley; Eric R. ;   et al. | 2006-11-02 |
Methods of depositing materials over semiconductor substrates App 20060216945 - Blomiley; Eric R. ;   et al. | 2006-09-28 |
Atomic layer deposition methods and apparatus App 20060019029 - Hamer; Kevin T. ;   et al. | 2006-01-26 |
Substrate susceptors for receiving semiconductor substrates to be deposited upon and methods of depositing materials over semiconductor substrates App 20050223994 - Blomiley, Eric R. ;   et al. | 2005-10-13 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces Grant 6,926,775 - Carpenter , et al. August 9, 2 | 2005-08-09 |
Atomic layer deposition method of depositing an oxide on a substrate App 20050123690 - Derderian, Garo J. ;   et al. | 2005-06-09 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces App 20050028734 - Carpenter, Craig M. ;   et al. | 2005-02-10 |
Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers App 20040226507 - Carpenter, Craig M. ;   et al. | 2004-11-18 |
Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces App 20040154538 - Carpenter, Craig M. ;   et al. | 2004-08-12 |
Faceplates having scrubbed cathodoluminescent layers for field emission displays Grant 6,414,429 - Watkins , et al. July 2, 2 | 2002-07-02 |
Low-voltage cathode for scrubbing cathodoluminescent layers for field emission displays and method App 20020031976 - Watkins, Charles M. ;   et al. | 2002-03-14 |
Low-voltage cathode for scrubbing cathodoluminescent layers for field emission displays and method App 20020019188 - Watkins, Charles M. ;   et al. | 2002-02-14 |
Low-voltage cathode for scrubbing cathodoluminescent layers for field emission displays and method App 20020014830 - Watkins, Charles M. ;   et al. | 2002-02-07 |
Low-voltage cathode for scrubbing cathodoluminescent layers for field emission displays and method App 20020014831 - Watkins, Charles M. ;   et al. | 2002-02-07 |
Low-voltage cathode for scrubbing cathodoluminescent layers for field emission displays and method App 20020013116 - Watkins, Charles M. ;   et al. | 2002-01-31 |
Method for evacuating and sealing field emission displays Grant 5,997,378 - Dynka , et al. December 7, 1 | 1999-12-07 |
Low temperature method for evacuating and sealing field emission displays Grant 5,827,102 - Watkins , et al. October 27, 1 | 1998-10-27 |
Field emission display package and method of fabrication Grant 5,788,551 - Dynka , et al. August 4, 1 | 1998-08-04 |
Method for evacuating and sealing field emission displays Grant 5,697,825 - Dynka , et al. December 16, 1 | 1997-12-16 |