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Patent applications and USPTO patent grants for DYNAMIC MICRO SYSTEMS.The latest application filed is for "buffer station for stocker system".
Patent | Date |
---|---|
Removable compartments for workpiece stocker Grant 10,672,633 - Rebstock | 2020-06-02 |
Removable compartments for workpiece stocker Grant 10,643,878 - Rebstock | 2020-05-05 |
Clean transfer robot Grant 9,943,969 - Barker , et al. April 17, 2 | 2018-04-17 |
Buffer station for stocker system Grant 9,919,871 - Rebstock March 20, 2 | 2018-03-20 |
Tool compiler Grant 9,880,817 - Tanguy , et al. January 30, 2 | 2018-01-30 |
Transfer mechanism with multiple wafer handling capability Grant 9,728,436 - Tabrizi , et al. August 8, 2 | 2017-08-08 |
Redundantable robot assembly for workpiece transfer Grant 9,122,272 - Rebstock September 1, 2 | 2015-09-01 |
Substrate carrier having drip edge configurations Grant 9,064,687 - Rebstock June 23, 2 | 2015-06-23 |
Buffer station for stocker system App 20150012128 - Rebstock; Lutz | 2015-01-08 |
Tool compiler App 20140289698 - Tanguy; Francois ;   et al. | 2014-09-25 |
Substrate carrier having drip edge configurations App 20130302994 - Rebstock; Lutz | 2013-11-14 |
Method for operating equipment using buffer station having emergency access Grant 7,751,919 - Rebstock July 6, 2 | 2010-07-06 |
Removable compartments for workpiece stocker App 20090028669 - Rebstock; Lutz | 2009-01-29 |
Integrated gripper for workpiece transfer App 20080131239 - Rebstock; Lutz | 2008-06-05 |
Removable compartments for workpiece stocker App 20080112787 - Rebstock; Lutz | 2008-05-15 |
Redundantable robot assembly for workpiece transfer App 20080085174 - Rebstock; Lutz | 2008-04-10 |
Redundantable robot assembly for workpiece transfer App 20080086237 - Rebstock; Lutz | 2008-04-10 |
Buffer station for stocker system App 20080041694 - Rebstock; Lutz | 2008-02-21 |
Buffer station for stocker system App 20080046108 - Rebstock; Lutz | 2008-02-21 |
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