loadpatents
Patent applications and USPTO patent grants for Dyer; Timothy S..The latest application filed is for "extreme ultraviolet light source".
Patent | Date |
---|---|
Anodes for fluorine gas discharge lasers Grant 7,851,011 - Dyer December 14, 2 | 2010-12-14 |
Extreme ultraviolet light source App 20100176313 - Melnychuk; Stephan T. ;   et al. | 2010-07-15 |
Line narrowing module App 20100097704 - Algots; J. Martin ;   et al. | 2010-04-22 |
Gas discharge laser chamber improvements Grant 7,522,650 - Partlo , et al. April 21, 2 | 2009-04-21 |
Line narrowing module App 20080151944 - Algots; J. Martin ;   et al. | 2008-06-26 |
Extreme ultraviolet light source Grant 7,368,741 - Melnychuk , et al. May 6, 2 | 2008-05-06 |
Line narrowing module Grant 7,366,219 - Algots , et al. April 29, 2 | 2008-04-29 |
Electrodes for fluorine gas discharge lasers Grant 7,339,973 - Morton , et al. March 4, 2 | 2008-03-04 |
Extreme ultraviolet light source App 20080023657 - Melnychuk; Stephen T. ;   et al. | 2008-01-31 |
Anodes for fluorine gas discharge lasers App 20080002752 - Dyer; Timothy S. ;   et al. | 2008-01-03 |
Halogen gas discharge laser electrodes Grant 7,301,980 - Steiger , et al. November 27, 2 | 2007-11-27 |
EUV light source optical elements App 20070170378 - Bowering; Norbert R. ;   et al. | 2007-07-26 |
Orbiting indexable belt polishing station for chemical mechanical polishing Grant 7,229,343 - Chadda , et al. June 12, 2 | 2007-06-12 |
Anodes for fluorine gas discharge lasers Grant 7,230,965 - Dyer , et al. June 12, 2 | 2007-06-12 |
EUV light source optical elements Grant 7,193,228 - Bowering , et al. March 20, 2 | 2007-03-20 |
High rep-rate laser with improved electrodes Grant 7,132,123 - Morton , et al. November 7, 2 | 2006-11-07 |
Cathodes for fluorine gas discharge lasers Grant 7,095,774 - Morton , et al. August 22, 2 | 2006-08-22 |
Line narrowing module App 20060114957 - Algots; J. Martin ;   et al. | 2006-06-01 |
Extreme ultraviolet light source Grant 6,972,421 - Melnychuk , et al. December 6, 2 | 2005-12-06 |
Extreme ultraviolet light source App 20050230645 - Melnychuk, Stephan T. ;   et al. | 2005-10-20 |
Gas discharge laser chamber improvements App 20050226301 - Partlo, William N. ;   et al. | 2005-10-13 |
EUV light source optical elements App 20050199830 - Bowering, Norbert R. ;   et al. | 2005-09-15 |
High rep-rate laser with improved electrodes Grant 6,937,635 - Morton , et al. August 30, 2 | 2005-08-30 |
Halogen gas discharge laser electrodes App 20050047471 - Steiger, Thomas D. ;   et al. | 2005-03-03 |
Orbiting Indexable Belt Polishing Station For Chemical Mechanical Polishing App 20050009452 - Chadda, Saket ;   et al. | 2005-01-13 |
Orbiting indexable belt polishing station for chemical mechanical polishing Grant 6,793,565 - Chadda , et al. September 21, 2 | 2004-09-21 |
Electrodes for fluorine gas discharge lasers App 20040165638 - Morton, Richard G. ;   et al. | 2004-08-26 |
Discharge produced plasma EUV light source App 20040160155 - Partlo, William N. ;   et al. | 2004-08-19 |
Extreme ultraviolet light source App 20040108473 - Melnychuk, Stephan T. ;   et al. | 2004-06-10 |
Anodes for fluorine gas discharge lasers App 20040071178 - Dyer, Timothy S. ;   et al. | 2004-04-15 |
Cathodes for fluorine gas discharge lasers App 20040066827 - Steiger, Thomas D. ;   et al. | 2004-04-08 |
High rep-rate laser with improved electrodes App 20040037338 - Morton, Richard G. ;   et al. | 2004-02-26 |
High rep-rate laser with improved electrodes Grant 6,690,706 - Morton , et al. February 10, 2 | 2004-02-10 |
High rep-rate laser with improved electrodes App 20040022292 - Morton, Richard G. ;   et al. | 2004-02-05 |
Laser chamber insulator with sealed electrode feedthrough Grant 6,661,826 - Ujazdowski , et al. December 9, 2 | 2003-12-09 |
Dynamic slurry distribution control for CMP Grant 6,652,366 - Dyer November 25, 2 | 2003-11-25 |
Laser chamber insulator with sealed electrode feedthrough App 20020196830 - Ujazdowski, Richard C. ;   et al. | 2002-12-26 |
High rep-rate laser with improved electrodes App 20020191661 - Morton, Richard G. ;   et al. | 2002-12-19 |
Dynamic Slurry Distribution Control For Cmp App 20020173249 - Dyer, Timothy S. | 2002-11-21 |
Electric discharge laser with two-material electrodes App 20020154670 - Morton, Richard G. ;   et al. | 2002-10-24 |
Carriers with concentric balloons supporting a diaphragm Grant 6,447,368 - Fruitman , et al. September 10, 2 | 2002-09-10 |
Abrasive free polishing in copper damascene applications App 20020098784 - Chadda, Saket ;   et al. | 2002-07-25 |
Rigid polishing pad conditioner for chemical mechanical polishing tool Grant 6,409,580 - Lougher , et al. June 25, 2 | 2002-06-25 |
Reinforced CMP carrier bladders App 20020077049 - Fruitman, Clinton O. ;   et al. | 2002-06-20 |
Apparatus and method for chemical mechanical planarization using a fixed-abrasive polishing pad App 20020072307 - Fruitman, Clinton O. ;   et al. | 2002-06-13 |
Ion milling planarization of semiconductor workpieces Grant 6,288,357 - Dyer September 11, 2 | 2001-09-11 |
Chemical mechanical polishing tool components with improved corrosion resistance Grant 6,203,417 - Dyer , et al. March 20, 2 | 2001-03-20 |
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