DUSA; Mircea

Patent Applications and Registrations

Patent applications and USPTO patent grants for DUSA; Mircea.The latest application filed is for "method and apparatus for angular-resolved spectroscopic lithography characterization".

Company Profile

4.34.36

DUSA; Mircea - Campbell CA
Dusa; Mircea - San Jose CA
Dusa; Mircea - Wezembeek-Oppem BE
Dusa; Mircea - Campell CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20210208083 - DEN BOEF; Arie Jeffrey ; et al.	2021-07-08
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 10,955,353 - Den Boef , et al. March 23, 2	2021-03-23
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method Grant 10,656,536 - Leenders , et al.	2020-05-19
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20190170657 - DEN BOEF; Arie Jeffrey Maria ; et al.	2019-06-06
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 10,241,055 - Den Boef , et al.	2019-03-26
Substrate Support, Method For Loading A Substrate On A Substrate Support Location, Lithographic Apparatus And Device Manufacturing Method App 20170192359 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2017-07-06
Methods for providing spaced lithography features on a substrate by self-assembly of block copolymers Grant 9,368,366 - Wuister , et al. June 14, 2	2016-06-14
Methods For Providing Spaced Lithography Features On A Substrate By Self-assembly Of Block Copolymers App 20150364335 - WUISTER; Sander Frederik ; et al.	2015-12-17
Alignment target contrast in a lithographic double patterning process Grant 8,980,724 - Sewell , et al. March 17, 2	2015-03-17
Method of preparing a pattern, method of forming a mask set, device manufacturing method and computer program Grant 8,945,800 - Chiou , et al. February 3, 2	2015-02-03
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20140233025 - DEN BOEF; Arie Jeffrey Maria ; et al.	2014-08-21
Alignment Target Contrast in a Lithographic Double Patterning Process App 20140192333 - SEWELL; Harry ; et al.	2014-07-10
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,760,662 - Den Boef , et al. June 24, 2	2014-06-24
Improving alignment target contrast in a lithographic double patterning process Grant 8,709,908 - Sewell , et al. April 29, 2	2014-04-29
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20140055788 - DEN BOEF; Arie Jeffrey Maria ; et al.	2014-02-27
Method Of Preparing A Pattern, Method Of Forming A Mask Set, Device Manufacturing Method And Computer Program App 20140051016 - CHIOU; Tsann-Bim ; et al.	2014-02-20
Method and system for increasing alignment target contrast Grant 8,625,096 - Sewell , et al. January 7, 2	2014-01-07
Optimization method and a lithographic cell Grant 8,612,045 - Mos , et al. December 17, 2	2013-12-17
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,553,230 - Den Boef , et al. October 8, 2	2013-10-08
Apparatus and Method for Providing Resist Alignment Marks in a Double Patterning Lithographic Process App 20130017378 - Doytcheva; Maya Angelova ; et al.	2013-01-17
Apparatus and method for providing resist alignment marks in a double patterning lithographic process Grant 8,329,366 - Doytcheva , et al. December 11, 2	2012-12-11
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 8,189,195 - Den Boef , et al. May 29, 2	2012-05-29
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20120038929 - Den Boef; Arie Jeffrey Maria ; et al.	2012-02-16
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,054,467 - Den Boef , et al. November 8, 2	2011-11-08
Method and System for Increasing Alignment Target Contrast App 20110075238 - SEWELL; Harry ; et al.	2011-03-31
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 7,916,284 - Dusa , et al. March 29, 2	2011-03-29
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20110007314 - Den Boef; Arie Jeffrey Maria ; et al.	2011-01-13
Apparatus and Method for Providing Resist Alignment Marks in a Double Patterning Lithographic Process App 20100323171 - DOYTCHEVA; Maya Angelova ; et al.	2010-12-23
Alignment Target Contrast in a Lithographic Double Patterning Process App 20100301458 - Sewell; Harry ; et al.	2010-12-02
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 7,791,727 - Den Boef , et al. September 7, 2	2010-09-07
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 7,791,732 - Den Boef , et al. September 7, 2	2010-09-07
Characterization of transmission losses in an optical system Grant 7,791,724 - Den Boef , et al. September 7, 2	2010-09-07
Semiconductor device for measuring an overlay error, method for measuring an overlay error, lithographic apparatus and device manufacturing method Grant 7,786,477 - Dusa , et al. August 31, 2	2010-08-31
Optimization Method and a Lithographic Cell App 20100161099 - Mos; Everhardus Cornelis ; et al.	2010-06-24
Semiconductor device for measuring an overlay error, method for measuring an overlay error, lithographic apparatus and device manufacturing method Grant 7,704,850 - Dusa , et al. April 27, 2	2010-04-27
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 7,564,555 - Den Boef , et al. July 21, 2	2009-07-21
Focus determination method, device manufacturing method, and mask Grant 7,532,307 - Van Der Schaar , et al. May 12, 2	2009-05-12
Marker Structure, Mask Pattern, Alignment Method, And Lithographic Method And Apparatus App 20090073406 - Finders; Jozef Maria ; et al.	2009-03-19
Lithographic system, sensor, and method of measuring properties of a substrate Grant 7,480,050 - Den Boef , et al. January 20, 2	2009-01-20
Marker structure, mask pattern, alignment method and lithographic method and apparatus Grant 7,466,413 - Finders , et al. December 16, 2	2008-12-16
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method App 20080279442 - Den Boef; Arie Jeffrey ; et al.	2008-11-13
Semiconductor device for measuring an overlay error, method for measuring an overlay error, lithographic apparatus and device manufacturing method App 20080149925 - Dusa; Mircea ; et al.	2008-06-26
Semiconductor device for measuring an overlay error, method for measuring an overlay error, lithographic apparatus and device manufacturing method App 20080061291 - Dusa; Mircea ; et al.	2008-03-13
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20080043239 - Boef; Arie Jeffrey Den ; et al.	2008-02-21
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method App 20080018874 - Dusa; Mircea ; et al.	2008-01-24
Inspection apparatus and method of inspection Grant 7,315,384 - Den Boef , et al. January 1, 2	2008-01-01
Method of characterising the transmission losses of an optical system App 20070296960 - Den Boef; Arie Jeffrey ; et al.	2007-12-27
Test pattern, inspection method, and device manufacturing method Grant 7,312,860 - Den Boef , et al. December 25, 2	2007-12-25
Lithographic system, sensor, and method of measuring properties of a substrate App 20070182964 - Den Boef; Arie Jeffrey ; et al.	2007-08-09
Test pattern, inspection method, and device manufacturing method App 20070052948 - Den Boef; Arie Jeffrey ; et al.	2007-03-08
Focus determination method, device manufacturing method, and mask App 20070003840 - Van Der Schaar; Maurits ; et al.	2007-01-04
Test pattern, inspection method, and device manufacturing method Grant 7,151,594 - Den Boef , et al. December 19, 2	2006-12-19
Test pattern, inspection method, and device manufacturing method Grant 7,148,959 - Dusa , et al. December 12, 2	2006-12-12
Inspection apparatus and method of inspection App 20060256324 - Den Boef; Arie Jeffrey ; et al.	2006-11-16
Device inspection method and apparatus using an asymmetric marker Grant 7,112,813 - Den Boef , et al. September 26, 2	2006-09-26
Latent overlay metrology App 20060139592 - Den Boef; Arie Jeffrey ; et al.	2006-06-29
Latent overlay metrology App 20060109463 - Boef; Arie Jeffrey Den ; et al.	2006-05-25
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20060066855 - Boef; Arie Jeffrey Maria Den ; et al.	2006-03-30
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20060033921 - Den Boef; Arie Jeffrey ; et al.	2006-02-16
Marker structure, mask pattern, alignment method and lithographic method and apparatus App 20050031969 - Finders, Jozef Maria ; et al.	2005-02-10
Device inspection App 20040129900 - Den Boef, Arie Jeffrey ; et al.	2004-07-08
Test pattern, inspection method, and device manufacturing method App 20040119970 - Dusa, Mircea ; et al.	2004-06-24
Test pattern, inspection method, and device manufacturing method App 20040114132 - Den Boef, Arie Jeffrey ; et al.	2004-06-17
Target acquisition technique for CD measurement machine Grant 6,608,920 - Su , et al. August 19, 2	2003-08-19

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