loadpatents
Patent applications and USPTO patent grants for Durukan; Ilker.The latest application filed is for "part, sensor, and metrology data integration".
Patent | Date |
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Part, Sensor, And Metrology Data Integration App 20220260978 - Sin; Garrett Ho-Yee ;   et al. | 2022-08-18 |
Methods And Apparatus To Reduce Pressure Fluctuations In An Ampoule Of A Chemical Delivery System App 20220162752 - DURUKAN; Ilker ;   et al. | 2022-05-26 |
Heater Cover Plate For Uniformity Improvement App 20210343557 - RASHEED; Muhammad M. ;   et al. | 2021-11-04 |
High temperature process chamber lid Grant 10,879,090 - Durukan , et al. December 29, 2 | 2020-12-29 |
Apparatus and method for providing a uniform flow of gas Grant 10,519,546 - Jallepally , et al. Dec | 2019-12-31 |
Apparatus And Method For Providing A Uniform Flow Of Gas App 20190078205 - Jallepally; Ravi ;   et al. | 2019-03-14 |
Apparatus and method for providing a uniform flow of gas Grant 10,167,553 - Rasheed , et al. J | 2019-01-01 |
Methods and apparatus for liquid chemical delivery Grant 9,914,632 - Durukan , et al. March 13, 2 | 2018-03-13 |
High Temperature Process Chamber Lid App 20180053667 - Durukan; Ilker ;   et al. | 2018-02-22 |
High temperature process chamber lid Grant 9,831,109 - Durukan , et al. November 28, 2 | 2017-11-28 |
Apparatus And Method For Providing A Uniform Flow Of Gas App 20170283947 - Rasheed; Muhammad M. ;   et al. | 2017-10-05 |
Methods And Apparatus For Liquid Chemical Delivery App 20160052772 - DURUKAN; ILKER ;   et al. | 2016-02-25 |
High Temperature Process Chamber Lid App 20140252015 - Durukan; Ilker ;   et al. | 2014-09-11 |
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