Patent | Date |
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CMP Slurry/Method for Polishing Ruthenium and Other Films App 20120329279 - Shi; Xiaobo | 2012-12-27 |
Method and composition for chemical mechanical planarization of a metal-containing substrate Grant 8,222,145 - Shi July 17, 2 | 2012-07-17 |
Chemical Mechanical Planarization Composition And Method With Low Corrosiveness App 20120142191 - Shi; Xiaobo ;   et al. | 2012-06-07 |
Fluoride-modified silica sols for chemical mechanical planarization Grant 8,163,049 - Siddiqui April 24, 2 | 2012-04-24 |
Dihydroxy enol compounds used in chemical mechanical polishing compositions having metal ion oxidizers Grant 8,114,775 - Siddiqui , et al. February 14, 2 | 2012-02-14 |
Method for Chemical Mechanical Planarization of a Tungsten-Containing Substrate App 20120028466 - McConnell; Rachel Dianne ;   et al. | 2012-02-02 |
Method For Chemical Mechanical Planarization Of A Copper-containing Substrate App 20110312181 - Shi; Xiaobo | 2011-12-22 |
Method for Forming Through-Base Wafer Vias for Fabrication of Stacked Devices App 20110300710 - Henry; James Matthew ;   et al. | 2011-12-08 |
Compositions and methods for rapidly removing overfilled substrates Grant 8,057,696 - Chelle , et al. November 15, 2 | 2011-11-15 |
Method For Exposing Through-base Wafer Vias For Fabrication Of Stacked Devices App 20110237079 - Kim; Hyoung Sik ;   et al. | 2011-09-29 |
Method and Slurry for Tuning Low-K Versus Copper Removal Rates During Chemical Mechanical Polishing App 20110165777 - Siddiqui; Junaid Ahmed ;   et al. | 2011-07-07 |
Periodic acid compositions for polishing ruthenium/low K substrates Grant 7,968,465 - Small , et al. June 28, 2 | 2011-06-28 |
Method for chemical mechanical planarization of chalcogenide materials Grant 7,915,071 - Siddiqui , et al. March 29, 2 | 2011-03-29 |
Method and Composition for Chemical Mechanical Planarization of A Metal App 20100167545 - Shi; Xiaobo ;   et al. | 2010-07-01 |
Polishing Slurry for Copper Films App 20100101448 - Sawayda; Rebecca A. ;   et al. | 2010-04-29 |
Method for immobilizing ligands and organometallic compounds on silica surface, and their application in chemical mechanical planarization Grant 7,691,287 - Siddiqui , et al. April 6, 2 | 2010-04-06 |
Method for Forming Through-base Wafer Vias in Fabrication of Stacked Devices App 20100081279 - Palmer; Bentley J. ;   et al. | 2010-04-01 |
Method for chemical mechanical planarization of chalcogenide materials Grant 7,678,605 - Schlueter , et al. March 16, 2 | 2010-03-16 |
Compositions of chemical mechanical planarization slurries contacting noble-metal-featured substrates Grant 7,524,346 - Small , et al. April 28, 2 | 2009-04-28 |
Chemical-mechanical planarization composition having benzenesulfonic acid and per-compound oxidizing agents, and associated method for use Grant 7,514,363 - Banerjee , et al. April 7, 2 | 2009-04-07 |
Free radical-forming activator attached to solid and used to enhance CMP formulations Grant 7,513,920 - Siddiqui , et al. April 7, 2 | 2009-04-07 |
Method for Chemical Mechanical Planarization of Chalcogenide Materials App 20090057661 - Siddiqui; Junaid Ahmed ;   et al. | 2009-03-05 |
Method for Chemical Mechanical Planarization of A Metal-containing Substrate App 20090061630 - Palmer; Bentley J. ;   et al. | 2009-03-05 |
Method for Chemical Mechanical Planarization of Chalcogenide Materials App 20090057834 - Schlueter; James Allen ;   et al. | 2009-03-05 |
Reverse Shallow Trench Isolation Process App 20090047870 - Siddiqui; Junaid Ahmed ;   et al. | 2009-02-19 |
Free radical-forming activator attached to solid and used to enhance CMP formulations App 20090029553 - Scott; Brandon Shane ;   et al. | 2009-01-29 |
Dihydroxy enol compounds used in chemical mechanical polishing compositions having metal ion oxidizers Grant 7,476,620 - Siddiqui , et al. January 13, 2 | 2009-01-13 |
Surface modified colloidal abrasives, including stable bimetallic surface coated silica sols for chemical mechanical planarization Grant 7,429,338 - Siddiqui September 30, 2 | 2008-09-30 |
Particulate or particle-bound chelating agents Grant 7,427,361 - Small , et al. September 23, 2 | 2008-09-23 |
Free radical-forming activator attached to solid and used to enhance CMP formulations Grant 7,427,305 - Scott , et al. September 23, 2 | 2008-09-23 |
Composition and associated method for catalyzing removal rates of dielectric films during chemical mechanical planarization Grant 7,351,662 - Siddiqui , et al. April 1, 2 | 2008-04-01 |
Alumina abrasive for chemical mechanical polishing Grant 7,344,988 - Chelle March 18, 2 | 2008-03-18 |
Polishing method to reduce dishing of tungsten on a dielectric Grant 7,316,976 - Nojo , et al. January 8, 2 | 2008-01-08 |
Chemical mechanical polishing composition and process Grant 7,276,180 - Small , et al. October 2, 2 | 2007-10-02 |
CMP method for copper, tungsten, titanium, polysilicon, and other substrates using organosulfonic acids as oxidizers Grant 7,247,566 - Carter , et al. July 24, 2 | 2007-07-24 |
Tunable composition and method for chemical-mechanical planarization with aspartic acid/tolyltriazole Grant 7,153,335 - Siddiqui , et al. December 26, 2 | 2006-12-26 |
Free radical-forming activator attached to solid and used to enhance CMP formulations App 20060180788 - Scott; Brandon Shane ;   et al. | 2006-08-17 |
Surface modified colloidal abrasives, including stable bimetallic surface coated silica sols for chemical mechanical planarization Grant 7,077,880 - Siddiqui July 18, 2 | 2006-07-18 |
Chemical mechanical polishing composition and process Grant 7,033,942 - Small , et al. April 25, 2 | 2006-04-25 |
Catalyst attached to solid and used to promote free radical formation in CMP formulations Grant 7,029,508 - Scott , et al. April 18, 2 | 2006-04-18 |
Chemical-mechanical planarization composition with nitrogen containing polymer and method for use Grant 7,022,255 - Siddiqui , et al. April 4, 2 | 2006-04-04 |
Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same Grant 7,014,669 - Small , et al. March 21, 2 | 2006-03-21 |
Low defectivity product slurry for CMP and associated production method Grant 6,979,252 - Siddiqui , et al. December 27, 2 | 2005-12-27 |
Composition and associated methods for chemical mechanical planarization having high selectivity for metal removal Grant 6,893,476 - Siddiqui , et al. May 17, 2 | 2005-05-17 |
Gel-free colloidal abrasive polishing compositions and associated methods Grant 6,743,267 - Jernakoff , et al. June 1, 2 | 2004-06-01 |