| Patent | Date |
|---|
Implementing the post-porosity plasma protection (P4) process using I-CVD
Grant 11,371,143 - Lionti , et al. June 28, 2 | 2022-06-28 |
Implementing The Post-porosity Plasma Protection (p4) Process Using I-cvd
App 20200378001 - Lionti; Krystelle ; et al. | 2020-12-03 |
In-situ hardmask generation
Grant 9,058,983 - Dubois , et al. June 16, 2 | 2015-06-16 |
Overburden removal for pore fill integration approach
Grant 8,927,430 - Bruce , et al. January 6, 2 | 2015-01-06 |
In-situ Hardmask Generation
App 20140367356 - Dubois; Geraud Jean-Michel ; et al. | 2014-12-18 |
Reduction of pore fill material dewetting
Grant 8,871,632 - Dubois , et al. October 28, 2 | 2014-10-28 |
Homogeneous modification of porous films
Grant 8,828,489 - Dubois , et al. September 9, 2 | 2014-09-09 |
Semiconductor interconnect structure having enhanced performance and reliability
Grant 8,648,465 - Cabral, Jr. , et al. February 11, 2 | 2014-02-11 |
Homogeneous porous low dielectric constant materials
Grant 8,623,741 - Purushothaman , et al. January 7, 2 | 2014-01-07 |
Poly-oxycarbosilane compositions for use in imprint lithography
Grant 08617786 - | 2013-12-31 |
Poly-oxycarbosilane compositions for use in imprint lithography
Grant 8,617,786 - Dipietro , et al. December 31, 2 | 2013-12-31 |
Polyhedral oligomeric silsesquioxane based imprint materials and imprint process using polyhedral oligomeric silsesquioxane based imprint materials
Grant 8,603,584 - Allen , et al. December 10, 2 | 2013-12-10 |
Reduction of pore fill material dewetting
Grant 8,541,301 - Dubois , et al. September 24, 2 | 2013-09-24 |
Homogeneous porous low dielectric constant materials
Grant 8,492,239 - Bruce , et al. July 23, 2 | 2013-07-23 |
Semiconductor Interconnect Structure Having Enhanced Performance And Reliability
App 20130075908 - Cabral, JR.; Cyril ; et al. | 2013-03-28 |
Nanoporous media with lamellar structures
Grant 8,389,589 - Cha , et al. March 5, 2 | 2013-03-05 |
Homogeneous Modification Of Porous Films
App 20130045337 - DUBOIS; GERAUD JEAN-MICHEL ; et al. | 2013-02-21 |
Reduction Of Pore Fill Material Dewetting
App 20130045608 - Dubois; Geraud Jean-Michel ; et al. | 2013-02-21 |
Reduction Of Pore Fill Material Dewetting
App 20130017688 - Dubois; Geraud Jean-Michel ; et al. | 2013-01-17 |
Overburden Removal For Pore Fill Integration Approach
App 20130017682 - Bruce; Robert L. ; et al. | 2013-01-17 |
Homogeneous Porous Low Dielectric Constant Materials
App 20120329273 - Bruce; Robert L. ; et al. | 2012-12-27 |
Homogeneous porous low dielectric constant materials
Grant 8,314,005 - Purushothaman , et al. November 20, 2 | 2012-11-20 |
Homogeneous Porous Low Dielectric Constant Materials
App 20120282784 - Purushothaman; Sampath ; et al. | 2012-11-08 |
Nanoporous media templated from unsymmetrical amphiphilic porogens
Grant 8,268,903 - Dubois , et al. September 18, 2 | 2012-09-18 |
Polyhedral Oligomeric Silsesquioxane Based Imprint Materials And Imprint Process Using Polyhedral Oligomeric Silsesquioxane Based Imprint Materials
App 20110256713 - Allen; Robert David ; et al. | 2011-10-20 |
Nanoporous Media Templated from Unsymmetrical Amphiphilic Porogens
App 20110245418 - Dubois; Geraud Jean-Michel ; et al. | 2011-10-06 |
Polyhedral oligomeric silsesquioxane based imprint materials and imprint process using polyhedral oligomeric silsesquioxane based imprint materials
Grant 8,026,293 - Allen , et al. September 27, 2 | 2011-09-27 |
Homogeneous Porous Low Dielectric Constant Materials
App 20110183525 - Purushothaman; Sampath ; et al. | 2011-07-28 |
Nanoporous media templated from unsymmetrical amphiphilic porogens
Grant 7,960,442 - Cha , et al. June 14, 2 | 2011-06-14 |
Poly-oxycarbosilane Compositions For Use In Imprint Lithography
App 20110136928 - Dipietro; Richard Anthony ; et al. | 2011-06-09 |
Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures
Grant 7,931,829 - Dubois , et al. April 26, 2 | 2011-04-26 |
Method of step-and-flash imprint lithography
Grant 7,927,664 - Dipietro , et al. April 19, 2 | 2011-04-19 |
Photopatternable dielectric materials for BEOL applications and methods for use
Grant 7,919,225 - Allen , et al. April 5, 2 | 2011-04-05 |
Low-k Interlevel Dielectric Materials And Method Of Forming Low-k Interlevel Dielectric Layers And Structures
App 20100311895 - Dubois; Geraud Jean-Michel ; et al. | 2010-12-09 |
Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures
Grant 7,820,242 - Dubois , et al. October 26, 2 | 2010-10-26 |
Nanoporous Media with Lamellar Structures
App 20100055307 - Cha; Jennifer Nam ; et al. | 2010-03-04 |
Photopatternable Dielectric Materials For Beol Applications And Methods For Use
App 20090291389 - Allen; Robert D. ; et al. | 2009-11-26 |
Nanoporous media with lamellar structures
Grant 7,482,389 - Cha , et al. January 27, 2 | 2009-01-27 |
Imprint process using polyhedral oligomeric silsesquioxane based imprint materials
Grant 7,468,330 - Allen , et al. December 23, 2 | 2008-12-23 |
Method of forming low-K interlevel dielectric layers and structures
Grant 7,459,183 - Dubois , et al. December 2, 2 | 2008-12-02 |
Low-k Interlevel Dielectric Materials And Method Of Forming Low-k Interlevel Dielectric Layers And Structures
App 20080171136 - Dubois; Geraud Jean-Michel ; et al. | 2008-07-17 |
Polyhedral Oligomeric Silsesquioxane Based Imprint Materials And Imprint Process Using Polyhedral Oligomeric Silsesquioxane Based Imprint Materials
App 20080166871 - Allen; Robert David ; et al. | 2008-07-10 |
Compositions Comprising Poly-oxycarbosilane and Methods for Their Use in Imprint Lithography
App 20080050530 - Dipietro; Richard Anthony ; et al. | 2008-02-28 |
Polyhedral oligomeric silsesquioxane based imprint materials and imprint process using polyhedral oligomeric silsesquioxane based imprint materials
App 20070238317 - Allen; Robert David ; et al. | 2007-10-11 |
Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures
App 20070023870 - Dubois; Geraud Jean-Michel ; et al. | 2007-02-01 |
Nanoporous media with lamellar structures
App 20060240240 - Cha; Jennifer Nam ; et al. | 2006-10-26 |
Nanoporous media templated from unsymmetrical amphiphilic porogens
App 20060241194 - Cha; Jennifer Nam ; et al. | 2006-10-26 |
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