| Patent | Date |
|---|
Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide
Grant 11,373,882 - Sun , et al. June 28, 2 | 2022-06-28 |
Erosion Resistant Metal Fluoride Coatings, Methods Of Preparation And Methods Of Use Thereof
App 20220181124 - Duan; Ren-Guan ; et al. | 2022-06-09 |
Magnetic-material Shield Around Plasma Chambers Near Pedestal
App 20220139679 - KONNOTH JOSEPH; Job George ; et al. | 2022-05-05 |
Plasma corrision resistive heater for high temperature processing
Grant 11,299,805 - Khaja , et al. April 12, 2 | 2022-04-12 |
Heat treated ceramic substrate having ceramic coating
Grant 11,279,661 - Sun , et al. March 22, 2 | 2022-03-22 |
Processing equipment component plating
Grant 11,270,870 - Duan , et al. March 8, 2 | 2022-03-08 |
High temperature electrostatic chuck bonding adhesive
Grant 11,264,261 - Sun , et al. March 1, 2 | 2022-03-01 |
Ceramic Material With High Thermal Shock Resistance And High Erosion Resistance
App 20220041508 - Duan; Ren-Guan ; et al. | 2022-02-10 |
Fluoride Coating To Improve Chamber Performance
App 20220037126 - Sun; Jennifer Y. ; et al. | 2022-02-03 |
Process Kit With Protective Ceramic Coatings For Hydrogen And Nh3 Plasma Application
App 20220013336 - WU; Jian ; et al. | 2022-01-13 |
Heat Treated Ceramic Substrate Having Ceramic Coating
App 20210317049 - Sun; Jennifer Y. ; et al. | 2021-10-14 |
Chamber liner for high temperature processing
Grant 11,047,043 - Baluja , et al. June 29, 2 | 2021-06-29 |
Coated Article And Semiconductor Chamber Apparatus Formed From Yttrium Oxide And Zirconium Oxide
App 20200395226 - Sun; Jennifer Y. ; et al. | 2020-12-17 |
Method of forming a bulk article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide
Grant 10,847,386 - Sun , et al. November 24, 2 | 2020-11-24 |
Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide
Grant 10,840,112 - Sun , et al. November 17, 2 | 2020-11-17 |
Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide
Grant 10,840,113 - Sun , et al. November 17, 2 | 2020-11-17 |
Processing Equipment Component Plating
App 20200321197 - DUAN; Ren-Guan ; et al. | 2020-10-08 |
Alumina layer formation on aluminum surface to protect aluminum parts
Grant 10,711,350 - Duan , et al. | 2020-07-14 |
Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
Grant 10,622,194 - Sun , et al. | 2020-04-14 |
Method and system for high temperature clean
Grant 10,612,135 - Baluja , et al. | 2020-04-07 |
Chamber Liner For High Temperature Processing
App 20200080198 - BALUJA; Sanjeev ; et al. | 2020-03-12 |
Chamber liner for high temperature processing
Grant 10,480,068 - Baluja , et al. Nov | 2019-11-19 |
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system
Grant 10,403,535 - Ye , et al. Sep | 2019-09-03 |
Heat Treated Ceramic Substrate Having Ceramic Coating
App 20190233343 - Sun; Jennifer Y. ; et al. | 2019-08-01 |
Heat treated ceramic substrate having ceramic coating
Grant 10,364,197 - Sun , et al. July 30, 2 | 2019-07-30 |
Plasma Corrision Resistive Heater For High Temperature Processing
App 20190203350 - KHAJA; Abdul Aziz ; et al. | 2019-07-04 |
Ceramic article with reduced surface defect density
Grant 10,336,656 - Duan , et al. | 2019-07-02 |
Method Of Forming A Bulk Article And Semiconductor Chamber Apparatus From Yttrium Oxide And Zirconium Oxide
App 20190157114 - Sun; Jennifer Y. ; et al. | 2019-05-23 |
Coated Article And Semiconductor Chamber Apparatus Formed From Yttrium Oxide And Zirconium Oxide
App 20190157113 - Sun; Jennifer Y. ; et al. | 2019-05-23 |
Method Of Forming A Coated Article And Semiconductor Chamber Apparatus From Yttrium Oxide And Zirconium Oxide
App 20190157115 - Sun; Jennifer Y. ; et al. | 2019-05-23 |
Plasma corrosion resistive heater for high temperature processing
Grant 10,266,943 - Khaja , et al. | 2019-04-23 |
Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance
Grant 10,242,888 - Sun , et al. | 2019-03-26 |
Plasma Resistant Semiconductor Processing Chamber Components
App 20190019655 - Sun; Jennifer Y. ; et al. | 2019-01-17 |
Semiconductor processing apparatus with protective coating including amorphous phase
Grant 10,157,731 - Sun , et al. Dec | 2018-12-18 |
Semiconductor processing apparatus with protective coating including amorphous phase
App 20180226232 - Sun; Jennifer Y. ; et al. | 2018-08-09 |
Semiconductor Processing Apparatus With A Ceramic-comprising Surface Which Exhibits Fracture Toughness And Halogen Plasma Resistance
App 20180174866 - Sun; Jennifer Y. ; et al. | 2018-06-21 |
Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heater
Grant 9,975,320 - Duan , et al. May 22, 2 | 2018-05-22 |
Ceramic Component Formed From Ceramic Portions Bonded Together With A Halogen Plasma Resistant Bonding Agent
App 20180134612 - Sun; Jennifer Y. ; et al. | 2018-05-17 |
Ceramic component formed ceramic portions bonded together with a halogen plasma resistant bonding agent
Grant 9,896,376 - Sun , et al. February 20, 2 | 2018-02-20 |
A Method And System For High Temperature Clean
App 20180023193 - BALUJA; Sanjeev ; et al. | 2018-01-25 |
Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
App 20170372874 - Sun; Jennifer Y. ; et al. | 2017-12-28 |
Electrostatic Chuck Having Properties For Optimal Thin Film Deposition Or Etch Processes
App 20170352569 - KHAJA; Abdul Aziz ; et al. | 2017-12-07 |
Alumina Layer Formation On Aluminum Surface To Protect Aluminum Parts
App 20170275763 - DUAN; Ren-Guan ; et al. | 2017-09-28 |
Chamber Liner For High Temperature Processing
App 20170275753 - BALUJA; Sanjeev ; et al. | 2017-09-28 |
Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
App 20170110293 - Sun; Jennifer Y. ; et al. | 2017-04-20 |
High Temperature Electrostatic Chuck Bonding Adhesive
App 20170092525 - SUN; JENNIFER Y. ; et al. | 2017-03-30 |
Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof
Grant 9,597,734 - Sun , et al. March 21, 2 | 2017-03-21 |
Yttria-based material coated chemical vapor deposition chamber heater
Grant 9,556,507 - Duan , et al. January 31, 2 | 2017-01-31 |
High temperature electrostatic chuck bonding adhesive
Grant 9,520,314 - Sun , et al. December 13, 2 | 2016-12-13 |
Semiconductor processing apparatus with protective coating including amorphous phase
App 20160276141 - Sun; Jennifer Y. ; et al. | 2016-09-22 |
Critical chamber component surface improvement to reduce chamber particles
Grant 9,428,424 - Duan , et al. August 30, 2 | 2016-08-30 |
Plasma resistant ceramic coated conductive article
Grant 9,394,615 - Sun , et al. July 19, 2 | 2016-07-19 |
Chamber coatings
Grant 9,384,950 - Duan , et al. July 5, 2 | 2016-07-05 |
Heat Treated Ceramic Substrate Having Ceramic Coating
App 20160060181 - Sun; Jennifer Y. ; et al. | 2016-03-03 |
Method And Apparatus Of Processing Wafers With Compressive Or Tensile Stress At Elevated Temperatures In A Plasma Enhanced Chemical Vapor Deposition System
App 20160049323 - YE; Zheng John ; et al. | 2016-02-18 |
Wet Cleaning Of A Chamber Component
App 20160017263 - DUAN; Ren-Guan ; et al. | 2016-01-21 |
Plasma Corrosion Resistive Heater For High Temperature Processing
App 20150376780 - KHAJA; Abdul Aziz ; et al. | 2015-12-31 |
Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
Grant 9,212,099 - Sun , et al. December 15, 2 | 2015-12-15 |
Ceramic Coated Article And Process For Applying Ceramic Coating
App 20150299050 - Sun; Jennifer Y. ; et al. | 2015-10-22 |
Critical Chamber Component Surface Improvement To Reduce Chamber Particles
App 20150251961 - DUAN; Ren-Guan ; et al. | 2015-09-10 |
Chamber Coatings
App 20150221480 - DUAN; Ren-Guan ; et al. | 2015-08-06 |
Ceramic Article With Reduced Surface Defect Density
App 20150218057 - Duan; Ren-Guan ; et al. | 2015-08-06 |
Ceramic coated article and process for applying ceramic coating
Grant 9,090,046 - Sun , et al. July 28, 2 | 2015-07-28 |
Diffusion Bonded Plasma Resisted Chemical Vapor Deposition (cvd) Chamber Heater
App 20150201461 - DUAN; Ren-Guan ; et al. | 2015-07-16 |
Semiconductor processing apparatus comprising a solid solution ceramic formed from yttrium oxide, zirconium oxide, and aluminum oxide
Grant 9,051,219 - Sun , et al. June 9, 2 | 2015-06-09 |
Semiconductor Processing Apparatus With A Ceramic-comprising Surface Which Exhibits Fracture Toughness And Halogen Plasma Resistance
App 20150143677 - Sun; Jennifer Y. ; et al. | 2015-05-28 |
Ceramic article with reduced surface defect density and process for producing a ceramic article
Grant 9,034,199 - Duan , et al. May 19, 2 | 2015-05-19 |
Protective coatings resistant to reactive plasma processing
Grant 9,017,765 - Sun , et al. April 28, 2 | 2015-04-28 |
Electrostatic Chuck And Showerhead With Enhanced Thermal Properties And Methods Of Making Thereof
App 20150061237 - SUN; Jennifer ; et al. | 2015-03-05 |
Ceramic Component formed ceramic portions bonded together with a halogen plasma resistant bonding agent
App 20150004418 - Sun; Jennifer Y. ; et al. | 2015-01-01 |
Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof
Grant 8,916,021 - Sun , et al. December 23, 2 | 2014-12-23 |
Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber
Grant 8,871,312 - Sun , et al. October 28, 2 | 2014-10-28 |
Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas
Grant 8,858,745 - Sun , et al. October 14, 2 | 2014-10-14 |
Transparent Yttria Coated Quartz Showerhead
App 20140262037 - DUAN; Ren-Guan ; et al. | 2014-09-18 |
Yttria-based Material Coated Chemical Vapor Deposition Chamber Heater
App 20140263272 - DUAN; Ren-Guan ; et al. | 2014-09-18 |
Thermal Treated Sandwich Structure Layer To Improve Adhesive Strength
App 20140272341 - DUAN; Ren-Guan ; et al. | 2014-09-18 |
PLASMA EROSION RESISTED TRANSPARENT Mg-Al-Y-Si-O
App 20140274653 - DUAN; Ren-Guan ; et al. | 2014-09-18 |
Method of producing a plasma-resistant thermal oxide coating
Grant 8,758,858 - Sun , et al. June 24, 2 | 2014-06-24 |
Semiconductor processing apparatus comprising a coating formed from a solid solution of yttrium oxide and zirconium oxide
Grant 8,623,527 - Sun , et al. January 7, 2 | 2014-01-07 |
Plasma Resistant Ceramic Coated Conductive Article
App 20130284373 - Sun; Jennifer Y. ; et al. | 2013-10-31 |
Plasma Spray Coating Process Enhancement For Critical Chamber Components
App 20130288037 - Sun; Jennifer Y. ; et al. | 2013-10-31 |
Ceramic Coated Ring And Process For Applying Ceramic Coating
App 20130273313 - Sun; Jennifer Y. ; et al. | 2013-10-17 |
Ceramic Coated Article And Process For Applying Ceramic Coating
App 20130273327 - Sun; Jennifer Y. ; et al. | 2013-10-17 |
Semiconductor processing apparatus comprising a solid solution ceramic formed from yttrium oxide, zirconium oxide, and aluminum oxide
App 20130224498 - Sun; Jennifer Y. ; et al. | 2013-08-29 |
Ceramic Article With Reduced Surface Defect Density And Process For Producing A Ceramic Article
App 20130216783 - Duan; Ren-Guan ; et al. | 2013-08-22 |
Heat Treated Ceramic Substrate Having Ceramic Coating And Heat Treatment For Coated Ceramics
App 20130216821 - Sun; Jennifer Y. ; et al. | 2013-08-22 |
Plasma-resistant ceramics with controlled electrical resistivity
Grant 8,367,227 - Sun , et al. February 5, 2 | 2013-02-05 |
Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber
App 20130022838 - Sun; Jennifer Y. ; et al. | 2013-01-24 |
Method And Apparatus For Refurbishing Gas Distribution Plate Surfaces
App 20120255635 - BANDA; Sumanth ; et al. | 2012-10-11 |
Method of producing a plasma-resistant thermal oxide coating
App 20120125488 - Sun; Jennifer Y. ; et al. | 2012-05-24 |
Electrostatic Chuck And Showerhead With Enhanced Thermal Properties And Methods Of Making Thereof
App 20120104703 - Sun; Jennifer ; et al. | 2012-05-03 |
Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coating
Grant 8,129,029 - Sun , et al. March 6, 2 | 2012-03-06 |
Semiconductor processing apparatus comprising a coating formed from a solid solution of yttrium oxide and zirconium oxide
App 20120034469 - Sun; Jennifer Y. ; et al. | 2012-02-09 |
Semiconductor processing apparatus which is formed from yttrium oxide and zirconium oxide to produce a solid solution ceramic apparatus
Grant 8,034,734 - Sun , et al. October 11, 2 | 2011-10-11 |
Gas Distribution Showerhead With Coating Material For Semiconductor Processing
App 20110198034 - Sun; Jennifer ; et al. | 2011-08-18 |
High Temperature Electrostatic Chuck Bonding Adhesive
App 20100156054 - Sun; Jennifer Y. ; et al. | 2010-06-24 |
Semiconductor processing apparatus comprising a solid solution ceramic of yttrium oxide and zirconium oxide
App 20100160143 - Sun; Jennifer Y. ; et al. | 2010-06-24 |
Filled Polymer Composition For Etch Chamber Component
App 20100140222 - Sun; Jennifer Y. ; et al. | 2010-06-10 |
Protective coatings resistant to reactive plasma processing
App 20100129670 - Sun; Jennifer Y. ; et al. | 2010-05-27 |
Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas
App 20100119844 - Sun; Jennifer Y. ; et al. | 2010-05-13 |
Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmas
Grant 7,696,117 - Sun , et al. April 13, 2 | 2010-04-13 |
Method And Apparatus For Removing Polymer From A Substrate
App 20090302002 - Collins; Kenneth ; et al. | 2009-12-10 |
Ceramic coating comprising yttrium which is resistant to a reducing plasma
App 20090214825 - Sun; Jennifer Y. ; et al. | 2009-08-27 |
Erosion resistant yttrium comprising metal with oxidized coating for plasma chamber components
App 20090162647 - Sun; Jennifer Y. ; et al. | 2009-06-25 |
Plasma-resistant ceramics with controlled electrical resistivity
App 20090036292 - Sun; Jennifer Y. ; et al. | 2009-02-05 |
Method of reducing the erosion rate of semiconductor processing apparatus exposed to halogen-containing plasmas
App 20080264564 - Sun; Jennifer Y. ; et al. | 2008-10-30 |
Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmas
App 20080264565 - Sun; Jennifer Y. ; et al. | 2008-10-30 |
Method of coating semiconductor processing apparatus with protective yttrium-containing coatings
App 20080213496 - Sun; Jennifer Y. ; et al. | 2008-09-04 |
Electrically conductive Si-Ti-C-N ceramics
Grant 7,128,850 - Duan , et al. October 31, 2 | 2006-10-31 |
Electrically conductive Si-Ti-C-N ceramics
App 20040238795 - Duan, Ren-Guan ; et al. | 2004-12-02 |
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