Patent | Date |
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Passivation of nonlinear optical crystals Grant 11,227,770 - Chuang , et al. January 18, 2 | 2022-01-18 |
Passivation of nonlinear optical crystals Grant 11,180,866 - Chuang , et al. November 23, 2 | 2021-11-23 |
193nm laser and inspection system Grant 10,439,355 - Chuang , et al. O | 2019-10-08 |
183 nm CW laser and inspection system Grant 10,429,719 - Chuang , et al. O | 2019-10-01 |
Passivation of Nonlinear Optical Crystals App 20190198330 - Chuang; Yung-Ho Alex ;   et al. | 2019-06-27 |
Passivation of nonlinear optical crystals Grant 10,283,366 - Chuang , et al. | 2019-05-07 |
183 nm CW Laser and Inspection System App 20190107766 - Chuang; Yung-Ho Alex ;   et al. | 2019-04-11 |
In-Situ Passivation for Nonlinear Optical Crystals App 20190056637 - Paranjape; Mandar ;   et al. | 2019-02-21 |
183NM laser and inspection system Grant 10,199,149 - Chuang , et al. Fe | 2019-02-05 |
Semiconductor inspection and metrology system using laser pulse multiplier Grant 10,193,293 - Chuang , et al. Ja | 2019-01-29 |
183 nm CW laser and inspection system Grant 10,175,555 - Chuang , et al. J | 2019-01-08 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier App 20180233872 - Chuang; Yung-Ho ;   et al. | 2018-08-16 |
193nm Laser And Inspection System App 20180191126 - Chuang; Yung-Ho ;   et al. | 2018-07-05 |
183 nm CW Laser And Inspection System App 20180188633 - Chuang; Yung-Ho Alex ;   et al. | 2018-07-05 |
Semiconductor inspection and metrology system using laser pulse multiplier Grant 9,972,959 - Chuang , et al. May 15, 2 | 2018-05-15 |
193nm laser and inspection system Grant 9,935,421 - Chuang , et al. April 3, 2 | 2018-04-03 |
183NM Laser And Inspection System App 20170323716 - Chuang; Yung-Ho Alex ;   et al. | 2017-11-09 |
Semiconductor inspection and metrology system using laser pulse multiplier Grant 9,793,673 - Chuang , et al. October 17, 2 | 2017-10-17 |
183NM laser and inspection system Grant 9,748,729 - Chuang , et al. August 29, 2 | 2017-08-29 |
Inspection System Using 193nm Laser App 20170229829 - Chuang; Yung-Ho Alex ;   et al. | 2017-08-10 |
193 nm laser and an inspection system using a 193 nm laser Grant 9,608,399 - Chuang , et al. March 28, 2 | 2017-03-28 |
193nm Laser And Inspection System App 20170063026 - Chuang; Yung-Ho ;   et al. | 2017-03-02 |
Passivation of Nonlinear Optical Crystals App 20170025281 - Chuang; Yung-Ho ;   et al. | 2017-01-26 |
193nm laser and inspection system Grant 9,529,182 - Chuang , et al. December 27, 2 | 2016-12-27 |
Inspection System Using 193nm Laser App 20160365693 - Chuang; Yung-Ho Alex ;   et al. | 2016-12-15 |
Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population Grant 9,461,435 - Dribinski , et al. October 4, 2 | 2016-10-04 |
Passivation of nonlinear optical crystals Grant 9,459,215 - Chuang , et al. October 4, 2 | 2016-10-04 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier App 20160285223 - Chuang; Yung-Ho ;   et al. | 2016-09-29 |
Laser assembly and inspection system using monolithic bandwidth narrowing apparatus Grant 9,419,407 - Deng , et al. August 16, 2 | 2016-08-16 |
Multi-stage ramp-up annealing for frequency-conversion crystals Grant 9,413,134 - Dribinski , et al. August 9, 2 | 2016-08-09 |
Passivation of Nonlinear Optical Crystals App 20160169815 - Chuang; Yung-Ho ;   et al. | 2016-06-16 |
193nm laser and inspection system Grant 9,318,869 - Chuang , et al. April 19, 2 | 2016-04-19 |
183NM Laser And Inspection System App 20160099540 - Chuang; Yung-Ho Alex ;   et al. | 2016-04-07 |
Laser Assembly And Inspection System Using Monolithic Bandwidth Narrowing Apparatus App 20160094011 - Deng; Yujun ;   et al. | 2016-03-31 |
193nm Laser And An Inspection System Using A 193nm Laser App 20160056606 - Chuang; Yung-Ho ;   et al. | 2016-02-25 |
Passivation of nonlinear optical crystals Grant 9,250,178 - Chuang , et al. February 2, 2 | 2016-02-02 |
Multi-Stage Ramp-Up Annealing For Frequency-Conversion Crystals App 20150299893 - Dribinski; Vladimir ;   et al. | 2015-10-22 |
Alleviation Of Laser-Induced Damage In Optical Materials By Suppression Of Transient Color Centers Formation And Control Of Phonon Population App 20150222079 - Dribinski; Vladimir ;   et al. | 2015-08-06 |
Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal Grant 9,097,683 - Dribinski , et al. August 4, 2 | 2015-08-04 |
Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population Grant 9,059,560 - Dribinski , et al. June 16, 2 | 2015-06-16 |
193NM Laser And Inspection System App 20150155680 - Chuang; Yung-Ho ;   et al. | 2015-06-04 |
Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal App 20150022805 - Dribinski; Vladimir ;   et al. | 2015-01-22 |
193NM laser and inspection system Grant 8,929,406 - Chuang , et al. January 6, 2 | 2015-01-06 |
Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal Grant 8,873,596 - Dribinski , et al. October 28, 2 | 2014-10-28 |
Passivation of Nonlinear Optical Crystals App 20140305367 - Chuang; Yung-Ho Alex ;   et al. | 2014-10-16 |
193nm Laser And Inspection System App 20140226140 - Chuang; Yung-Ho ;   et al. | 2014-08-14 |
193NM Laser And Inspection System App 20140204963 - Chuang; Yung-Ho ;   et al. | 2014-07-24 |
Alleviation Of Laser-Induced Damage In Optical Materials By Suppression Of Transient Color Centers Formation And Control Of Phonon Population App 20140198818 - Dribinski; Vladimir ;   et al. | 2014-07-17 |
Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population Grant 8,711,896 - Dribinski , et al. April 29, 2 | 2014-04-29 |
Solid-State Laser And Inspection System Using 193nm Laser App 20130313440 - Chuang; Yung-Ho ;   et al. | 2013-11-28 |
Hydrogen Passivation Of Nonlinear Optical Crystals App 20130088706 - Chuang; Yung-Ho ;   et al. | 2013-04-11 |
Solid-State Laser And Inspection System Using 193nm Laser App 20130077086 - Chuang; Yung-Ho ;   et al. | 2013-03-28 |
Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal App 20130021602 - Dribinski; Vladimir ;   et al. | 2013-01-24 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier App 20120314286 - Chuang; Yung-Ho ;   et al. | 2012-12-13 |
Alleviation Of Laser-Induced Damage In Optical Materials By Suppression Of Transient Color Centers Formation And Control Of Phonon Population App 20110164648 - Dribinski; Vladimir ;   et al. | 2011-07-07 |