Patent | Date |
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Particle source for producing a particle beam and particle-optical apparatus Grant 10,446,360 - Drexel , et al. Oc | 2019-10-15 |
Particle Source For Producing A Particle Beam And Particle-optical Apparatus App 20180330912 - Drexel; Volker ;   et al. | 2018-11-15 |
Electron beam source and method of manufacturing the same Grant 8,723,138 - Drexel , et al. May 13, 2 | 2014-05-13 |
Electron beam source and method of manufacturing the same Grant 8,536,773 - Buehler , et al. September 17, 2 | 2013-09-17 |
Electron beam device Grant 8,431,894 - Essers , et al. April 30, 2 | 2013-04-30 |
Objective lens Grant 8,362,443 - Drexel January 29, 2 | 2013-01-29 |
Electron Beam Source And Method Of Manufacturing The Same App 20120248959 - Buehler; Wolfram ;   et al. | 2012-10-04 |
Objective Lens App 20120205550 - Drexel; Volker | 2012-08-16 |
Electron Beam Source And Method Of Manufacturing The Same App 20120131785 - Drexel; Volker ;   et al. | 2012-05-31 |
Objective lens Grant 8,178,849 - Drexel May 15, 2 | 2012-05-15 |
Electron beam source and method of manufacturing the same Grant 8,164,071 - Drexel , et al. April 24, 2 | 2012-04-24 |
Electron-beam device and detector system Grant 7,910,887 - Steigerwald , et al. March 22, 2 | 2011-03-22 |
Electron Beam Source And Method Of Manufacturing The Same App 20100078557 - Drexel; Volker ;   et al. | 2010-04-01 |
Objective Lens App 20100038538 - Drexel; Volker | 2010-02-18 |
Electron-beam device and detector system App 20090309024 - STEIGERWALD; MICHAEL D.G. ;   et al. | 2009-12-17 |
Electron-beam device and detector system Grant 7,507,962 - Steigerwald , et al. March 24, 2 | 2009-03-24 |
Electron beam device App 20090039257 - Essers; Erik ;   et al. | 2009-02-12 |
Detector for variable pressure areas and an electron microscope comprising a corresponding detector Grant 7,462,839 - Gnauck , et al. December 9, 2 | 2008-12-09 |
Electron-beam device and detector system Grant 7,425,701 - Steigerwald , et al. September 16, 2 | 2008-09-16 |
Electron-beam device and detector system App 20070120071 - Steigerwald; Michael D.G. ;   et al. | 2007-05-31 |
Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system Grant 7,060,978 - Drexel , et al. June 13, 2 | 2006-06-13 |
Detector for variable pressure areas and an electron microscope comprising a corresponding detector App 20050173644 - Gnauck, Peter ;   et al. | 2005-08-11 |
Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam device Grant 6,872,956 - Gnauck , et al. March 29, 2 | 2005-03-29 |
Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam device App 20040076529 - Gnauck, Peter ;   et al. | 2004-04-22 |
Particle beam device Grant 6,498,345 - Weimer , et al. December 24, 2 | 2002-12-24 |
Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system App 20020011565 - Drexel, Volker ;   et al. | 2002-01-31 |