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Modeling and cross correlation of design predicted criticalities for optimization of semiconductor manufacturing Grant 8,407,630 - Chan , et al. March 26, 2 | 2013-03-26 |
Methods, systems, and computer program product for implementing hotspot detection, repair, and optimization of an electronic circuit design Grant 8,302,052 - Lee , et al. October 30, 2 | 2012-10-30 |
Method and system for mask optimization Grant 8,156,450 - Chan , et al. April 10, 2 | 2012-04-10 |
Method and system for process optimization Grant 8,146,024 - Chan , et al. March 27, 2 | 2012-03-27 |
Methods, Systems, And Computer Program Product For Implementing Hotspot Detection, Repair, And Optimization Of An Electronic Circuit Design App 20100324878 - LEE; Brian ;   et al. | 2010-12-23 |
Optical metrology of structures formed on semiconductor wafers using machine learning systems Grant 7,831,528 - Doddi , et al. November 9, 2 | 2010-11-09 |
Modeling and cross correlation of design predicted criticalities for optimization of semiconductor manufacturing Grant 7,694,244 - Chan , et al. April 6, 2 | 2010-04-06 |
Methods, System, And Computer Program Prodcut For Implementing Compact Manufacturing Model In Electronic Design Automation App 20100083200 - Song; Li J. ;   et al. | 2010-04-01 |
Method and system for inspection optimization in design and production of integrated circuits Grant 7,665,048 - Chan , et al. February 16, 2 | 2010-02-16 |
Optical metrology model optimization based on goals Grant 7,588,949 - Vuong , et al. September 15, 2 | 2009-09-15 |
Optical Metrology Of Structures Formed On Semiconductor Wafers Using Machine Learning Systems App 20090198635 - Doddi; Srinivas ;   et al. | 2009-08-06 |
Selecting a profile model for use in optical metrology using a machine learning system Grant 7,523,076 - Drege , et al. April 21, 2 | 2009-04-21 |
Model and parameter selection for optical metrology Grant 7,505,153 - Vuong , et al. March 17, 2 | 2009-03-17 |
Selection of wavelengths for integrated circuit optical metrology Grant 7,474,993 - Doddi , et al. January 6, 2 | 2009-01-06 |
Selecting a hypothetical profile to use in optical metrology Grant 7,394,554 - Vuong , et al. July 1, 2 | 2008-07-01 |
Model And Parameter Selection For Optical Metrology App 20080151269 - Vuong; Vi ;   et al. | 2008-06-26 |
Method And System For Process Optimization App 20080148194 - Chan; Kevin ;   et al. | 2008-06-19 |
Method And System For Mask Optimization App 20080148216 - Chan; Kevin ;   et al. | 2008-06-19 |
Method And System For Inspection Optimization App 20080148195 - Chan; Kevin ;   et al. | 2008-06-19 |
Modeling And Cross Correlation Of Design Predicted Criticalities For Optimization Of Semiconductor Manufacturing App 20080147374 - Chan; Kevin ;   et al. | 2008-06-19 |
Model and parameter selection for optical metrology Grant 7,330,279 - Vuong , et al. February 12, 2 | 2008-02-12 |
Selection of wavelengths for integrated circuit optical metrology App 20070198211 - Doddi; Srinivas ;   et al. | 2007-08-23 |
Optical metrology model optimization based on goals App 20070135959 - Vuong; Vi ;   et al. | 2007-06-14 |
Selection of wavelengths for integrated circuit optical metrology Grant 7,216,045 - Doddi , et al. May 8, 2 | 2007-05-08 |
Optical metrology model optimization based on goals Grant 7,171,284 - Vuong , et al. January 30, 2 | 2007-01-30 |
Edge roughness measurement in optical metrology Grant 7,046,375 - Bischoff , et al. May 16, 2 | 2006-05-16 |
Optical metrology model optimization based on goals App 20060064280 - Vuong; Vi ;   et al. | 2006-03-23 |
Selecting a profile model for use in optical metrology using a machine learining system App 20050192914 - Drege, Emmanuel ;   et al. | 2005-09-01 |
Selecting a hypothetical profile to use in optical metrology App 20050057748 - Vuong, Vi ;   et al. | 2005-03-17 |
Metrology hardware adaptation with universal library Grant 6,853,942 - Drege , et al. February 8, 2 | 2005-02-08 |
Integrated circuit profile value determination Grant 6,842,261 - Bao , et al. January 11, 2 | 2005-01-11 |
Optical metrology of structures formed on semiconductor wafer using machine learning systems App 20040267397 - Doddi, Srinivas ;   et al. | 2004-12-30 |
Edge roughness measurement in optical metrology App 20040218192 - Bischoff, Joerg ;   et al. | 2004-11-04 |
Diffraction order selection for optical metrology simulation App 20040090629 - Drege, Emmanuel ;   et al. | 2004-05-13 |
Integrated circuit profile value determination App 20040039473 - Bao, Junwei ;   et al. | 2004-02-26 |
Model and parameter selection for optical metrology App 20040017574 - Vuong, Vi ;   et al. | 2004-01-29 |
Selection of wavelengths for integrated circuit optical metrology App 20030225535 - Doddi, Srinivas ;   et al. | 2003-12-04 |
Metrology hardware adaptation with universal library App 20030187604 - Drege, Emmanuel ;   et al. | 2003-10-02 |