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Micromechanical Structure And Method Of Providing The Same App 20210387851 - DRABE; Christian ;   et al. | 2021-12-16 |
Micromechanical Structure, Micromechanical System And Method Of Providing A Micromechanical Structure App 20210380401 - DRABE; Christian ;   et al. | 2021-12-09 |
Production method Grant 9,620,375 - Langa , et al. April 11, 2 | 2017-04-11 |
Production Method App 20150200105 - LANGA; Sergiu ;   et al. | 2015-07-16 |
Torsion spring for micromechanical applications Grant 8,511,657 - Drabe , et al. August 20, 2 | 2013-08-20 |
Semiconductor substrate and methods for the production thereof Grant 8,357,944 - Drabe , et al. January 22, 2 | 2013-01-22 |
Method for structuring a device layer of a substrate Grant 8,199,390 - Drabe , et al. June 12, 2 | 2012-06-12 |
Method for generating a micromechanical structure Grant 7,940,439 - Jung , et al. May 10, 2 | 2011-05-10 |
Oscillating, deflectable micromechanical element and method for use thereof Grant 7,932,788 - Schenk , et al. April 26, 2 | 2011-04-26 |
Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure Grant 7,872,319 - Drabe January 18, 2 | 2011-01-18 |
Semiconductor Substrate And Methods For The Production Thereof App 20100295066 - Drabe; Christian ;   et al. | 2010-11-25 |
Oscillating, deflectable micromechanical element and method for use thereof App 20090302960 - Schenk; Harald ;   et al. | 2009-12-10 |
Method for Structuring a Device Layer of a Substrate App 20090303563 - Drabe; Christian ;   et al. | 2009-12-10 |
Torsion Resilient Element For Hanging Micromechanical Elements Which Can Be Deflected App 20090250853 - Wolter; Alexander ;   et al. | 2009-10-08 |
Micromechanical device with tilted electrodes Grant 7,466,474 - Jung , et al. December 16, 2 | 2008-12-16 |
Micromechanical Device With Tilted Electrodes App 20080239446 - Jung; Denis ;   et al. | 2008-10-02 |
Micromechanical Device Of Increased Rigidity App 20080239431 - KLOSE; Thomas ;   et al. | 2008-10-02 |
Method For Generating A Micromechanical Structure App 20080242049 - JUNG; Denis ;   et al. | 2008-10-02 |
Deflectable Structure, Micromechanical Structure Comprising Same, And Method For Adjusting A Micromechanical Structure App 20080241462 - DRABE; Christian | 2008-10-02 |
Micro-optical arrangement Grant 7,301,690 - Schenk , et al. November 27, 2 | 2007-11-27 |
Torsion spring for micromechanical applications App 20070018368 - Drabe; Christian ;   et al. | 2007-01-25 |
Micro-optical arrangement App 20060250708 - Schenk; Harald ;   et al. | 2006-11-09 |
Acceleration sensor and method for detecting an acceleration Grant 7,059,189 - Drabe , et al. June 13, 2 | 2006-06-13 |
Micromechanical element having adjustable resonant frequency App 20060071578 - Drabe; Christian ;   et al. | 2006-04-06 |
Acceleration sensor and method for detecting an acceleration App 20060048574 - Drabe; Christian ;   et al. | 2006-03-09 |
Method of forming an isolation layer and method of manufacturing a trench capacitor Grant 6,984,556 - Drabe , et al. January 10, 2 | 2006-01-10 |
Method of forming an isolation layer and method of manufacturing a trench capacitor App 20040198015 - Drabe, Christian ;   et al. | 2004-10-07 |