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Patent applications and USPTO patent grants for Douta; Kikuo.The latest application filed is for "method of forming a microscopic pattern with far uv pattern exposure, alkaline solution development, and dry etching".
Patent | Date |
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Method of forming a microscopic pattern with far UV pattern exposure, alkaline solution development, and dry etching Grant 4,614,706 - Matsuzawa , et al. September 30, 1 | 1986-09-30 |
Method of forming a microscopic pattern Grant 4,536,421 - Matsuzawa , et al. August 20, 1 | 1985-08-20 |
Method of forming fine pattern of thin, transparent, conductive film Grant 3,957,609 - Sasano , et al. May 18, 1 | 1976-05-18 |
Method for controlling the degree of side-etch in thin oxide films by photo-etching process Grant 3,942,982 - Yanazawa , et al. March 9, 1 | 1976-03-09 |
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