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Edge ring assembly for improving feature profile tilting at extreme edge of wafer Grant 10,854,492 - Bosch , et al. December 1, 2 | 2020-12-01 |
Apparatus and method for improved perpendicular recording medium using ion implantation in a magnetic field Grant 9,704,528 - Kontos , et al. July 11, 2 | 2017-07-11 |
Edge Ring Assembly For Improving Feature Profile Tilting At Extreme Edge Of Wafer App 20170053820 - Bosch; William Frederick ;   et al. | 2017-02-23 |
Apparatus And Method For Ion Implantation In A Magnetic Field App 20140272181 - Kontos; Alexander C. ;   et al. | 2014-09-18 |
Apparatus and Method for Improved Perpendicular Recording Medium Using Ion Implantation in a Magnetic Field App 20140272180 - Kontos; Alexander C. ;   et al. | 2014-09-18 |
Magnetic storage device Grant 8,830,616 - Sinclair , et al. September 9, 2 | 2014-09-09 |
Transformer-coupled RF source for plasma processing tool Grant 8,692,468 - Hadidi , et al. April 8, 2 | 2014-04-08 |
System and method for selectively controlling ion composition of ion sources Grant 8,664,561 - Hadidi , et al. March 4, 2 | 2014-03-04 |
Magnetic Storage Device App 20130141818 - Sinclair; Frank ;   et al. | 2013-06-06 |
Transformer-coupled Rf Source For Plasma Processing Tool App 20130082599 - Hadidi; Kamal ;   et al. | 2013-04-04 |
Technique For Limiting Fault Current Transmission App 20120256614 - Sinclair; Frank ;   et al. | 2012-10-11 |
Plasma Uniformity System And Method App 20120000606 - Dorai; Rajesh ;   et al. | 2012-01-05 |
Particle beam assisted modification of thin film materials Grant 8,003,498 - England , et al. August 23, 2 | 2011-08-23 |
System And Method For Selectively Controlling Ion Composition Of Ion Sources App 20110000896 - Hadidi; Kamal ;   et al. | 2011-01-06 |
Techniques for providing a multimode ion source Grant 7,812,321 - Kurunczi , et al. October 12, 2 | 2010-10-12 |
Method and apparatus for controlling beam current uniformity in an ion implanter Grant 7,767,986 - Dorai , et al. August 3, 2 | 2010-08-03 |
Technique for confining secondary electrons in plasma-based ion implantation Grant 7,667,208 - Dorai February 23, 2 | 2010-02-23 |
Techniques for confining electrons in an ion implanter Grant 7,655,922 - Smatlak , et al. February 2, 2 | 2010-02-02 |
Method And Apparatus For Controlling Beam Current Uniformity In An Ion Implanter App 20090314962 - DORAI; Rajesh ;   et al. | 2009-12-24 |
Techniques For Providing A Multimode Ion Source App 20090309041 - Kurunczi; Peter ;   et al. | 2009-12-17 |
Particle Beam Assisted Modification Of Thin Film Materials App 20090124064 - ENGLAND; Jonathan G. ;   et al. | 2009-05-14 |
Particle Beam Assisted Modification Of Thin Film Materials App 20090124065 - ENGLAND; Jonathan G. ;   et al. | 2009-05-14 |
Particle Beam Assisted Modification Of Thin Film Materials App 20090124066 - ENGLAND; Jonathan G. ;   et al. | 2009-05-14 |
Tilted Plasma Doping App 20080317968 - SINGH; Vikram ;   et al. | 2008-12-25 |
Techniques For Confining Electrons In An Ion Implanter App 20080135775 - Smatlak; Donna L. ;   et al. | 2008-06-12 |
Technique For Confining Secondary Electrons In Plasma-based Ion Implantation App 20080087839 - DORAI; Rajesh | 2008-04-17 |
Faraday dose and uniformity monitor for plasma based ion implantation Grant 7,132,672 - Walther , et al. November 7, 2 | 2006-11-07 |
Tilted Plasma Doping App 20060236931 - Singh; Vikram ;   et al. | 2006-10-26 |
Faraday dose and uniformity monitor for plasma based ion implantation App 20050223991 - Walther, Steven R. ;   et al. | 2005-10-13 |