Donnelly; Vincent M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Donnelly; Vincent M..The latest application filed is for "atomic layer etching with pulsed plasmas".
- Donnelly; Vincent M. - Houston TX
- Donnelly; Vincent M - Houston TX
- Donnelly; Vincent M. - Berkeley Heights NJ
| Patent | Date |
|---|---|
| Atomic layer etching with pulsed plasmas Grant 10,515,782 - Donnelly , et al. Dec | 2019-12-24 |
| Systems and methods for rapidly fabricating nanopatterns in a parallel fashion over large areas Grant 10,207,469 - Donnelly , et al. Feb | 2019-02-19 |
| Atomic Layer Etching with Pulsed Plasmas App 20180226227 - Donnelly; Vincent M. ; et al. | 2018-08-09 |
| Systems And Methods For Rapidly Fabricating Nanopatterns In A Parallel Fashion Over Large Areas App 20170361551 - Donnelly; Vincent M. ; et al. | 2017-12-21 |
| Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus Grant 8,968,588 - Zhao , et al. March 3, 2 | 2015-03-03 |
| Low Electron Temperature Microwave Surface-wave Plasma (swp) Processing Method And Apparatus App 20130256272 - Zhao; Jianping ; et al. | 2013-10-03 |
| System and method for nano-pantography Grant 8,030,620 - Donnelly , et al. October 4, 2 | 2011-10-04 |
| Atomic Layer Etching With Pulsed Plasmas App 20110139748 - DONNELLY; Vincent M. ; et al. | 2011-06-16 |
| Method and apparatus for nano-pantography Grant 7,883,839 - Donnelly , et al. February 8, 2 | 2011-02-08 |
| Hyperthermal neutral beam source and method of operating Grant 7,638,759 - Economou , et al. December 29, 2 | 2009-12-29 |
| System And Method For Nano-pantography App 20090283215 - Donnelly; Vincent M. ; et al. | 2009-11-19 |
| Hyperthermal Neutral Beam Source And Method Of Operating App 20080135742 - Economou; Demetre J. ; et al. | 2008-06-12 |
| Hyperthermal neutral beam source and method of operating Grant 7,358,484 - Economou , et al. April 15, 2 | 2008-04-15 |
| Method and apparatus for nano-pantography App 20070131646 - Donnelly; Vincent M. ; et al. | 2007-06-14 |
| Hyperthermal neutral beam source and method of operating App 20070069118 - Economou; Demetre J. ; et al. | 2007-03-29 |
| Deposition of III-V semiconductor materials Grant 4,645,687 - Donnelly , et al. February 24, 1 | 1987-02-24 |
| Etching techniques Grant 4,498,953 - Cook , et al. February 12, 1 | 1985-02-12 |
| Crystallographic etching of III-V semiconductor materials Grant 4,397,711 - Donnelly , et al. August 9, 1 | 1983-08-09 |
| Spectroscopic monitoring of gas-solid processes Grant 4,394,237 - Donnelly , et al. July 19, 1 | 1983-07-19 |
| Plasma-assisted etch process with endpoint detection Grant 4,377,436 - Donnelly , et al. March 22, 1 | 1983-03-22 |
| Radiation induced deposition of metal on semiconductor surfaces Grant 4,359,485 - Donnelly , et al. November 16, 1 | 1982-11-16 |
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