| Patent | Date |
|---|
Flow rate regulating valve and fluid control apparatus using the same
Grant 11,421,800 - Kobayashi , et al. August 23, 2 | 2022-08-23 |
Self-diagnosis method for flow rate control device
Grant 11,391,608 - Sugita , et al. July 19, 2 | 2022-07-19 |
Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device
Grant 11,346,457 - Dohi , et al. May 31, 2 | 2022-05-31 |
Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller
Grant 11,226,257 - Harada , et al. January 18, 2 | 2022-01-18 |
Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus
Grant 11,187,346 - Takimoto , et al. November 30, 2 | 2021-11-30 |
Pressure Sensor
App 20210356346 - HIDAKA; Atsushi ; et al. | 2021-11-18 |
Flow rate adjustment valve, and fluid control apparatus in which the flow rate adjustment valve is used
Grant 11,149,871 - Dohi , et al. October 19, 2 | 2021-10-19 |
Piezoelectric Driven Valve, Pressure-type Flow Rate Control Device, And Vaporization Supply Device
App 20210239230 - DOHI; Ryousuke ; et al. | 2021-08-05 |
Flow rate control device
Grant 11,079,774 - Sugita , et al. August 3, 2 | 2021-08-03 |
Piezoelectric-element-driven valve and flow rate control device
Grant 11,054,052 - Dohi , et al. July 6, 2 | 2021-07-06 |
Valve Device, Its Control Device, Control Methods Using The Same, Fluid Control Device And Semiconductor Manufacturing Apparatus
App 20200370671 - TAKIMOTO; Masahiko ; et al. | 2020-11-26 |
Self-diagnosis Method For Flow Rate Control Device
App 20200348158 - SUGITA; Katsuyuki ; et al. | 2020-11-05 |
Flow Rate Control Device
App 20200348704 - SUGITA; Katsuyuki ; et al. | 2020-11-05 |
Flow dividing valve
Grant 10,711,902 - Tanikawa , et al. | 2020-07-14 |
Flow Rate Regulating Valve And Fluid Control Apparatus Using The Same
App 20200124064 - Kobayashi; Keigo ; et al. | 2020-04-23 |
Fluid control valve unit
Grant D879,248 - Shigyou , et al. | 2020-03-24 |
Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device
Grant 10,573,801 - Shigyou , et al. Feb | 2020-02-25 |
Piezoelectric-element-driven Valve And Flow Rate Control Device
App 20200018413 - DOHI; Ryousuke ; et al. | 2020-01-16 |
Gas divided flow supplying apparatus for semiconductor manufacturing equipment
Grant 10534376 - | 2020-01-14 |
Flow Rate Adjustment Valve, And Fluid Control Apparatus In Which The Flow Rate Adjustment Valve Is Used
App 20190316703 - Dohi; Ryousuke ; et al. | 2019-10-17 |
Fixing structure for seal member in fluid control apparatus, joint, and fluid control apparatus
Grant 10,385,998 - Shigyou , et al. A | 2019-08-20 |
Pressure-type flow controller
Grant 10,386,863 - Hirata , et al. A | 2019-08-20 |
Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same
Grant 10,386,861 - Hirata , et al. A | 2019-08-20 |
Pressure-type flow rate control device
Grant 10,372,145 - Hirose , et al. | 2019-08-06 |
Flow passage sealing structure
Grant 10,309,561 - Dohi , et al. | 2019-06-04 |
Pressure-type flow rate control device
Grant 10,261,522 - Nagase , et al. | 2019-04-16 |
Flow Dividing Valve
App 20190040965 - Tanikawa; Tsuyoshi ; et al. | 2019-02-07 |
Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve
Grant 10,174,858 - Hirata , et al. J | 2019-01-08 |
Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device
Grant 10,156,295 - Yasumoto , et al. Dec | 2018-12-18 |
Flow meter and flow control device provided therewith
Grant 10,073,469 - Nagase , et al. September 11, 2 | 2018-09-11 |
Piezoelectric Linear Actuator, Piezoelectrically Driven Valve, And Flow Rate Control Device
App 20180240961 - SHIGYOU; Kohei ; et al. | 2018-08-23 |
Diaphragm valve
Grant 10,030,789 - Shinohara , et al. July 24, 2 | 2018-07-24 |
Structure for attaching pressure detector
Grant 10,012,334 - Dohi , et al. July 3, 2 | 2018-07-03 |
Fluid control valve unit
Grant D820,394 - Shigyou , et al. June 12, 2 | 2018-06-12 |
Joint member for a fluid controller
Grant D820,395 - Shigyou , et al. June 12, 2 | 2018-06-12 |
Fastening structure for brittle-fracturable panel, and method for fastening light transmission window panel comprising brittle-fracturable panel employing same
Grant 9,983,051 - Nagase , et al. May 29, 2 | 2018-05-29 |
Fixing Structure For Seal Member In Fluid Control Apparatus, Joint, And Fluid Control Apparatus
App 20180112805 - Shigyou; Kohei ; et al. | 2018-04-26 |
Flow rate range variable type flow rate control apparatus
Grant 9,921,089 - Ohmi , et al. March 20, 2 | 2018-03-20 |
Pressure type flow control system with flow monitoring
Grant 9,870,006 - Hirata , et al. January 16, 2 | 2018-01-16 |
Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device
Grant 9,841,770 - Hirata , et al. December 12, 2 | 2017-12-12 |
Piezoelectric Element-driven Valve And Flow Rate Control Device Including Piezoelectric Element-driven Valve
App 20170254430 - Hirata; Kaoru ; et al. | 2017-09-07 |
Multi-hole orifice plate for flow control, and flow controller using the same
Grant 9,746,856 - Hirata , et al. August 29, 2 | 2017-08-29 |
Pressure Type Flow Control System With Flow Monitoring, And Method For Detecting Anomaly In Fluid Supply System And Handling Method At Abnormal Monitoring Flow Rate Using The Same
App 20170234455 - Hirata; Kaoru ; et al. | 2017-08-17 |
Pressure-type Flow Rate Control Device
App 20170212531 - NAGASE; Masaaki ; et al. | 2017-07-27 |
Leakage detection device and fluid controller including same
Grant 9,702,781 - Dohi , et al. July 11, 2 | 2017-07-11 |
Raw material fluid density detector
Grant 9,651,467 - Deguchi , et al. May 16, 2 | 2017-05-16 |
Calibration method and flow rate measurement method for flow rate controller for gas supply device
Grant 9,638,560 - Nagase , et al. May 2, 2 | 2017-05-02 |
Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same
Grant 9,632,511 - Hirata , et al. April 25, 2 | 2017-04-25 |
Pressure type flow rate control device
Grant 9,574,917 - Hidaka , et al. February 21, 2 | 2017-02-21 |
Flow Passage Sealing Structure
App 20170037987 - DOHI; Ryousuke ; et al. | 2017-02-09 |
Raw material gas supply apparatus for semiconductor manufacturing equipment
Grant 9,556,518 - Nagase , et al. January 31, 2 | 2017-01-31 |
Pressure Type Flow Control System With Flow Monitoring
App 20160370808 - Hirata; Kaoru ; et al. | 2016-12-22 |
Piezoelectric Linear Actuator, Piezoelectrically Driven Valve, And Flow Rate Control Device
App 20160363231 - Yasumoto; Naofumi ; et al. | 2016-12-15 |
Pressure-type Flow Rate Control Device
App 20160349763 - Hirose; Takashi ; et al. | 2016-12-01 |
Variable orifice type pressure-controlled flow controller
Grant 9,507,352 - Dohi , et al. November 29, 2 | 2016-11-29 |
Pressure type flow control system with flow monitoring
Grant 9,494,947 - Hirata , et al. November 15, 2 | 2016-11-15 |
Pressure-type Flow Control Device And Method For Preventing Overshooting At Start Of Flow Control Performed By Said Device
App 20160327963 - HIRATA; Kaoru ; et al. | 2016-11-10 |
Apparatus for dividing and supplying gas and method for dividing and supplying gas
Grant 9,477,232 - Takahashi , et al. October 25, 2 | 2016-10-25 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20160274595 - Ohmi; Tadahiro ; et al. | 2016-09-22 |
Wearable thermometer for measuring temperature inside a person's clothes
Grant D766,113 - Dohi , et al. September 13, 2 | 2016-09-13 |
Pressure-type Flow Controller
App 20160252913 - HIRATA; Kaoru ; et al. | 2016-09-01 |
Flow Meter And Flow Control Device Provided Therewith
App 20160239026 - NAGASE; Masaaki ; et al. | 2016-08-18 |
Flow rate range variable type flow rate control apparatus
Grant 9,383,758 - Ohmi , et al. July 5, 2 | 2016-07-05 |
Diaphragm Valve
App 20160123497 - Shinohara; Tsutomu ; et al. | 2016-05-05 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20160109886 - Ohmi; Tadahiro ; et al. | 2016-04-21 |
Fastening Structure For Brittle-fracturable Panel, And Method For Fastening Light Transmission Window Panel Comprising Brittle-fracturable Panel Employing Same
App 20160084700 - NAGASE; Masaaki ; et al. | 2016-03-24 |
Multi-hole Orifice Plate For Flow Control, And Flow Controller Using The Same
App 20160070271 - HIRATA; Kaoru ; et al. | 2016-03-10 |
Raw Material Fluid Density Detector
App 20160061704 - DEGUCHI; Yoshihiro ; et al. | 2016-03-03 |
Structure For Attaching Pressure Detector
App 20160053925 - DOHI; Ryousuke ; et al. | 2016-02-25 |
Apparatus for dividing and supplying gas and method for dividing and supplying gas by use of this apparatus
Grant 9,261,884 - Sawada , et al. February 16, 2 | 2016-02-16 |
Mixed gas supply device
Grant 9,233,347 - Nagase , et al. January 12, 2 | 2016-01-12 |
Gasket-integrated Ceramic Orifice Plate
App 20150362105 - NAGASE; Masaaki ; et al. | 2015-12-17 |
Opening degree detection device for manual valve
Grant 9,200,725 - Dohi , et al. December 1, 2 | 2015-12-01 |
Fluid control apparatus
Grant 9,169,558 - Hirose , et al. October 27, 2 | 2015-10-27 |
Flow rate measurement device and flow rate measurement method for flow rate controller for gas supply device
Grant 9,163,969 - Sawada , et al. October 20, 2 | 2015-10-20 |
Piezoelectrically driven valve and piezoelectrically driven flow rate control device
Grant 9,163,743 - Hidaka , et al. October 20, 2 | 2015-10-20 |
Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed
Grant 9,133,951 - Ohmi , et al. September 15, 2 | 2015-09-15 |
Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller
Grant 9,098,082 - Sugiyama , et al. August 4, 2 | 2015-08-04 |
Gas Divided Flow Supplying Apparatus For Semiconductor Manufacturing Equipment
App 20150192932 - Nishino; Kouji ; et al. | 2015-07-09 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20150160662 - Ohmi; Tadahiro ; et al. | 2015-06-11 |
Leakage Detection Device And Fluid Controller Including Same
App 20150143876 - Dohi; Ryousuke ; et al. | 2015-05-28 |
Opening degree detection device for automatically operated valve
Grant 9,038,663 - Dohi , et al. May 26, 2 | 2015-05-26 |
Variable Orifice Type Pressure-controlled Flow Controller
App 20150114499 - Dohi; Ryousuke ; et al. | 2015-04-30 |
Flow rate range variable type flow rate control apparatus
Grant 9,010,369 - Ohmi , et al. April 21, 2 | 2015-04-21 |
Apparatus For Dividing And Supplying Gas And Method For Dividing And Supplying Gas
App 20150059859 - Takahashi; Eiji ; et al. | 2015-03-05 |
Gas supply apparatus equipped with vaporizer
Grant 8,931,506 - Nagata , et al. January 13, 2 | 2015-01-13 |
Gas Branched Flow Supplying Apparatus For Semiconductor Manufacturing Equipment
App 20140373935 - Nishino; Kouji ; et al. | 2014-12-25 |
Cam control valve
Grant 8,833,730 - Sawada , et al. September 16, 2 | 2014-09-16 |
Pressure Type Flow Control System With Flow Monitoring, And Method For Detecting Anomaly In Fluid Supply System And Handling Method At Abnormal Monitoring Flow Rate Using The Same
App 20140230911 - Hirata; Kaoru ; et al. | 2014-08-21 |
Raw Material Vaporizing And Supplying Apparatus
App 20140216339 - Nagase; Masaaki ; et al. | 2014-08-07 |
Raw Material Gas Supply Apparatus For Semiconductor Manufacturing Equipment
App 20140190581 - Nagase; Masaaki ; et al. | 2014-07-10 |
Pressure Type Flow Control System With Flow Monitoring
App 20140182692 - Hirata; Kaoru ; et al. | 2014-07-03 |
Automatic pressure regulator for flow rate regulator
Grant 8,757,197 - Hirata , et al. June 24, 2 | 2014-06-24 |
Electrochemical Element
App 20140162094 - Nishino; Atsushi ; et al. | 2014-06-12 |
Vaporizer
Grant 8,724,974 - Ohmi , et al. May 13, 2 | 2014-05-13 |
Raw Material Vaporizing And Supplying Apparatus
App 20140124064 - Hidaka; Atsushi ; et al. | 2014-05-08 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
Grant 8,714,188 - Ohmi , et al. May 6, 2 | 2014-05-06 |
Solenoid valve
Grant 8,662,471 - Ohmi , et al. March 4, 2 | 2014-03-04 |
Flow Rate Measurement Device And Flow Rate Measurement Method For Flow Rate Controller For Gas Supply Device
App 20140013838 - Sawada; Yohei ; et al. | 2014-01-16 |
Device And Method For Supplying Gas While Dividing To Chamber From Gas Supplying Facility Equipped With Flow Controller
App 20130340837 - Sugiyama; Kazuhiko ; et al. | 2013-12-26 |
Opening Degree Detection Device For Manual Valve
App 20130333777 - Dohi; Ryousuke ; et al. | 2013-12-19 |
Gas supply system for semiconductor manufacturing facilities
Grant 8,601,976 - Nishino , et al. December 10, 2 | 2013-12-10 |
Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus
Grant 8,606,412 - Nagase , et al. December 10, 2 | 2013-12-10 |
Opening Degree Detection Device For Automatically Operated Valve
App 20130319551 - Dohi; Ryousuke ; et al. | 2013-12-05 |
Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis function
Grant 8,587,180 - Sugita , et al. November 19, 2 | 2013-11-19 |
Cam valve
Grant 8,561,966 - Dohi , et al. October 22, 2 | 2013-10-22 |
Flow rate ratio variable type fluid supply apparatus
Grant 8,555,920 - Hirata , et al. October 15, 2 | 2013-10-15 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20130220451 - Ohmi; Tadahiro ; et al. | 2013-08-29 |
Apparatus For Dividing And Supplying Gas And Method For Dividing And Supplying Gas By Use Of This Apparatus
App 20130220433 - Sawada; Yohei ; et al. | 2013-08-29 |
Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller
Grant 8,496,022 - Sugiyama , et al. July 30, 2 | 2013-07-30 |
Calibration Method And Flow Rate Measurement Method For Flow Rate Controller For Gas Supply Device
App 20130186471 - Nagase; Masaaki ; et al. | 2013-07-25 |
Flow rate range variable type flow rate control apparatus
Grant 8,418,714 - Ohmi , et al. April 16, 2 | 2013-04-16 |
Vaporizer
App 20130084059 - Ohmi; Tadahiro ; et al. | 2013-04-04 |
Mixed Gas Supply Apparatus
App 20130025718 - Nagase; Masaaki ; et al. | 2013-01-31 |
Method For Water Hammerless Opening Of Fluid Passage, And Method For Supplying Chemical Solutions And Device For Water Hammerless Opening For Which The Method Is Used
App 20130000737 - OHMI; Tadahiro ; et al. | 2013-01-03 |
Pressure Type Flow Rate Control Device
App 20120298220 - HIDAKA; Atsushi ; et al. | 2012-11-29 |
Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Rate Control Device
App 20120273061 - Hidaka; Atsushi ; et al. | 2012-11-01 |
Cam Control Valve
App 20120223265 - Sawada; Yohei ; et al. | 2012-09-06 |
Piezoelectric element driven metal diaphragm control valve
Grant 8,191,856 - Matsumoto , et al. June 5, 2 | 2012-06-05 |
Normally open type piezoelectric element driven metal diaphragm control valve
Grant 8,181,932 - Matsumoto , et al. May 22, 2 | 2012-05-22 |
Fluid Control Apparatus
App 20120031500 - Hirose; Jun ; et al. | 2012-02-09 |
Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith
Grant 8,047,510 - Hirata , et al. November 1, 2 | 2011-11-01 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
Grant 8,047,225 - Ohmi , et al. November 1, 2 | 2011-11-01 |
Automatic Pressure Regulator For Flow Rate Regulator
App 20110139271 - Hirata; Kaoru ; et al. | 2011-06-16 |
Discontinuous Switching Fluid Flow Rate Control Method Using Pressure Type Flow Rate Control Device
App 20110120566 - OHMI; Tadahiro ; et al. | 2011-05-26 |
Solenoid Valve
App 20110121217 - Ohmi; Tadahiro ; et al. | 2011-05-26 |
Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor
Grant 7,945,414 - Nagase , et al. May 17, 2 | 2011-05-17 |
Pressure Control Valve Driving Circuit For Pressure Type Flow Rate Control Device With Flow Rate Self-diagnosis Function
App 20110108138 - Sugita; Katsuyuki ; et al. | 2011-05-12 |
Gas Supply Apparatus Equipped With Vaporizer
App 20110100483 - Nagata; Atsushi ; et al. | 2011-05-05 |
Apparatus and method of dividing and supplying gas to a chamber from a gas supply apparatus equipped with flow-rate control system
App 20110094596 - Sugiyama; Kazuhiko ; et al. | 2011-04-28 |
Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method
Grant 7,926,509 - Ohmi , et al. April 19, 2 | 2011-04-19 |
Piezoelectric Element Driven Metal Diaphragm Control Valve
App 20110042595 - MATSUMOTO; Atsushi ; et al. | 2011-02-24 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
Grant 7,849,869 - Ohmi , et al. December 14, 2 | 2010-12-14 |
Normally Open Type Piezoelectric Element Driven Metal Diaphragm Control Valve
App 20100294964 - Matsumoto; Atsushi ; et al. | 2010-11-25 |
Internal pressure controller of chamber and internal pressure subject-to-control type chamber
Grant 7,798,167 - Ohmi , et al. September 21, 2 | 2010-09-21 |
Flow Rate Ratio Variable Type Fluid Supply Apparatus
App 20100229976 - Hirata; Kaoru ; et al. | 2010-09-16 |
Cam Valve
App 20100207044 - Dohi; Ryousuke ; et al. | 2010-08-19 |
Gas Supply System For Semiconductor Manufactruing Facilities
App 20100192854 - Nishino; Kouji ; et al. | 2010-08-05 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20100139775 - Ohmi; Tadahiro ; et al. | 2010-06-10 |
Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device
Grant 7,669,455 - Ohmi , et al. March 2, 2 | 2010-03-02 |
Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
Grant 7,654,137 - Hirata , et al. February 2, 2 | 2010-02-02 |
Evaporation Supply Apparatus For Raw Material And Automatic Pressure Regulating Device Used Therewith
App 20100012026 - Hirata; Kaoru ; et al. | 2010-01-21 |
Method For Detecting Abnormality In Fluid Supply Line Using Fluid Control Apparatus With Pressure Sensor
App 20090326719 - Nagase; Masaaki ; et al. | 2009-12-31 |
Method For Detecting Malfunction Of Valve On The Downstream Side Of Throttle Mechanism Of Pressure Type Flow Control Apparatus
App 20090292399 - Nagase; Masaaki ; et al. | 2009-11-26 |
Method For Water Hammerless Opening Of Fluid Passage, And Method For Supplying Chemical Solutions And Device For Water Hammerless Opening For Which The Method Is Used
App 20090255587 - OHMI; Tadahiro ; et al. | 2009-10-15 |
Gas supply facility of a chamber and a method for an internal pressure control of the chamber for which the facility is employed
Grant 7,594,517 - Kannan , et al. September 29, 2 | 2009-09-29 |
Gasket Type Orifice And Pressure Type Flow Rate Control Apparatus For Which The Orifice Is Employed
App 20090171507 - Ohmi; Tadahiro ; et al. | 2009-07-02 |
Method for Water Hammerless Opening of Fluid Passage,and Method for Supplying Chemical Solutions and Device for Water Hammerless Opening for Which the Method is Used
App 20080257415 - Ohmi; Tadahiro ; et al. | 2008-10-23 |
Differential pressure type flowmeter and differential pressure type flow controller
Grant 7,367,241 - Ohmi , et al. May 6, 2 | 2008-05-06 |
Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device using the same
Grant 7,363,810 - Ikeda , et al. April 29, 2 | 2008-04-29 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
Grant 7,278,437 - Ohmi , et al. October 9, 2 | 2007-10-09 |
Gas Supply Facility Of A Chamber And A Fethod For An Internal Pressure Control Of The Chamber For Which The Facility Is Employed
App 20070193628 - Kannan; Hiroshi ; et al. | 2007-08-23 |
Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
App 20070168150 - Hirata; Kaoru ; et al. | 2007-07-19 |
Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device
App 20070151321 - Ohmi; Tadahiro ; et al. | 2007-07-05 |
Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method
Grant 7,219,533 - Ohmi , et al. May 22, 2 | 2007-05-22 |
Method For Closing Fluid Passage, And Water Hammerless Valve Device And Water Hammerless Closing Device Used In The Method
App 20070068577 - OHMI; Tadahiro ; et al. | 2007-03-29 |
Valve with an integral orifice
Grant 7,150,444 - Ohmi , et al. December 19, 2 | 2006-12-19 |
Differential pressure type flowmeter and differential pressure type flowmeter controller
App 20060236781 - Ohmi; Tadahiro ; et al. | 2006-10-26 |
Internal Pressure Controller Of Chamber And Internal Pressure Subject -to- Control Type Chamber
App 20060207595 - OHMI; Tadahiro ; et al. | 2006-09-21 |
Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus
Grant 7,085,628 - Ohmi , et al. August 1, 2 | 2006-08-01 |
Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method
App 20060076060 - Ohmi; Tadahiro ; et al. | 2006-04-13 |
Thermal type mass flow rate sensor made of corrosion resistant metal, and fluid supply equipment using the same
App 20060053878 - Ikeda; Nobukazu ; et al. | 2006-03-16 |
Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method
App 20050257603 - Ohmi, Tadahiro ; et al. | 2005-11-24 |
Pressure-type flow rate control apparatus
Grant 6,964,279 - Ohmi , et al. November 15, 2 | 2005-11-15 |
Valve with an integral orifice
App 20050109967 - Ohmi, Tadahiro ; et al. | 2005-05-26 |
Valve with an integral orifice
Grant 6,871,803 - Ohmi , et al. March 29, 2 | 2005-03-29 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
Grant 6,848,470 - Ohmi , et al. February 1, 2 | 2005-02-01 |
Method for supplying gas while dividing to chamber from gas supply facility equipped with flow controller
App 20050005994 - Sugiyama, Kazuhiko ; et al. | 2005-01-13 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
Grant 6,820,632 - Ohmi , et al. November 23, 2 | 2004-11-23 |
Advance pressure type flow control device
App 20040204794 - Ohmi, Tadahiro ; et al. | 2004-10-14 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
App 20040154664 - Ohmi, Tadahiro ; et al. | 2004-08-12 |
Structure or construction for mounting a pressure detector
Grant 6,606,912 - Ohmi , et al. August 19, 2 | 2003-08-19 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
App 20020179149 - Ohmi, Tadahiro ; et al. | 2002-12-05 |
Method of detecting abnormalities in flow rate in pressure-type flow controller
Grant 6,450,190 - Ohmi , et al. September 17, 2 | 2002-09-17 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
Grant 6,422,264 - Ohmi , et al. July 23, 2 | 2002-07-23 |
Method of detecting abnormalities in flow rate in pressure-type flow controller
App 20020005785 - Ohmi, Tadahiro ; et al. | 2002-01-17 |
Structure or construction for mounting a pressure detector
App 20010035052 - Ohmi, Tadahiro ; et al. | 2001-11-01 |
Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers
Grant 6,302,130 - Ohmi , et al. October 16, 2 | 2001-10-16 |
Gas supply system equipped with pressure-type flow rate control unit
Grant 6,289,923 - Ohmi , et al. September 18, 2 | 2001-09-18 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
App 20010004903 - Ohmi, Tadahiro ; et al. | 2001-06-28 |
Fluid supply apparatus
Grant 6,178,995 - Ohmi , et al. January 30, 2 | 2001-01-30 |
Pressure-type flow rate control apparatus
Grant 6,152,168 - Ohmi , et al. November 28, 2 | 2000-11-28 |
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