Patent | Date |
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Method for aligning a mirror of a microlithographic projection exposure apparatus Grant 10,359,703 - Freimann , et al. July 23, 2 | 2019-07-23 |
Method For Aligning A Mirror Of A Microlithographic Projection Exposure Apparatus App 20190049853 - FREIMANN; Rolf ;   et al. | 2019-02-14 |
Method for aligning a mirror of a microlithographic projection exposure apparatus Grant 10,101,667 - Freimann , et al. October 16, 2 | 2018-10-16 |
Method For Aligning A Mirror Of A Microlithographic Projection Exposure Apparatus App 20170023865 - FREIMANN; Rolf ;   et al. | 2017-01-26 |
Method for operating a projection exposure tool and control apparatus Grant 9,310,693 - Gerhard , et al. April 12, 2 | 2016-04-12 |
Devices for determining layer thickness and/or contamination level of a belt Grant 9,250,062 - Doerband , et al. February 2, 2 | 2016-02-02 |
Devices For Determining Layer Thickness And/or Contamination Level Of A Belt App 20140185060 - Doerband; Bernd ;   et al. | 2014-07-03 |
Method and apparatus for determining a shape of an optical test surface Grant 8,687,203 - Doerband April 1, 2 | 2014-04-01 |
Method Of Measuring A Shape Of An Optical Surface Based On Computationally Combined Surface Region Measurements And Interferometric Measuring Device App 20140078513 - FREIMANN; Rolf ;   et al. | 2014-03-20 |
Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device Grant 8,593,642 - Freimann , et al. November 26, 2 | 2013-11-26 |
Method of measuring a deviation of an optical surface from a target shape using interferometric measurement results Grant 8,508,749 - Arnold , et al. August 13, 2 | 2013-08-13 |
Method for Operating a Projection Exposure Tool and Control Apparatus App 20130188162 - Gerhard; Michael ;   et al. | 2013-07-25 |
Method Of Measuring A Deviation Of An Optical Surface From A Target Shape App 20120330609 - ARNOLD; Ralf ;   et al. | 2012-12-27 |
Method And Apparatus For Determining A Shape Of An Optical Test Surface App 20120236316 - DOERBAND; Bernd | 2012-09-20 |
Method and an apparatus for measuring a deviation of an optical test surface from a target shape Grant 8,269,981 - Doerband , et al. September 18, 2 | 2012-09-18 |
Method of measuring a deviation of an optical surface from a target shape Grant 8,264,695 - Arnold , et al. September 11, 2 | 2012-09-11 |
Method and system for measuring a surface of an object Grant 8,243,281 - Doerband August 14, 2 | 2012-08-14 |
Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure Grant 8,089,634 - Hetzler , et al. January 3, 2 | 2012-01-03 |
Method Of Measuring A Deviation Of An Optical Surface From A Target Shape App 20110141484 - ARNOLD; Ralf ;   et al. | 2011-06-16 |
Method of measuring a deviation of an optical surface from a target shape Grant 7,936,521 - Arnold , et al. May 3, 2 | 2011-05-03 |
Method and apparatus for interferometrically measuring the shape of a test object Grant 7,791,737 - Doerband , et al. September 7, 2 | 2010-09-07 |
Method Of Measuring A Deviation Of An Optical Surface From A Target Shape App 20100177320 - Arnold; Ralf ;   et al. | 2010-07-15 |
Optical Element And Method Of Calibrating A Measuring Apparatus Comprising A Wave Shaping Structure App 20100177321 - HETZLER; Jochen ;   et al. | 2010-07-15 |
Method of manufacturing an optical element Grant 7,738,117 - Altenberger , et al. June 15, 2 | 2010-06-15 |
Optical system, method of manufacturing an optical system and method of manufacturing an optical element Grant 7,605,926 - Hetzler , et al. October 20, 2 | 2009-10-20 |
Method and Apparatus for Interferometrically Measuring the Shape of a Test Object App 20090237672 - Doerband; Bernd ;   et al. | 2009-09-24 |
Method of manufacturing an optical component Grant 7,581,305 - Geuppert , et al. September 1, 2 | 2009-09-01 |
System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape Grant 7,522,292 - Doerband April 21, 2 | 2009-04-21 |
Method And System for Measuring a Surface of an Object App 20090079992 - DOERBAND; Bernd | 2009-03-26 |
Method of calibrating an interferometer optics and of processing an optical element having an optical surface Grant 7,436,520 - Doerband October 14, 2 | 2008-10-14 |
Method of manufacturing an optical element App 20080117436 - Altenberger; Michael ;   et al. | 2008-05-22 |
Phase shifting interferometric method, interferometer apparatus and method of manufacturing an optical element Grant 7,274,467 - Doerband , et al. September 25, 2 | 2007-09-25 |
Method of processing an optical substrate Grant 7,167,251 - Ulrich , et al. January 23, 2 | 2007-01-23 |
Method of manufacturing an optical system Grant 7,133,225 - Freimann , et al. November 7, 2 | 2006-11-07 |
System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape App 20060215177 - Doerband; Bernd | 2006-09-28 |
Phase shifting interferometric method, interferometer apparatus and method of manufacturing an optical element App 20060146342 - Doerband; Bernd ;   et al. | 2006-07-06 |
Method of calibrating an interferometer and method of manufacturing an optical element App 20050275849 - Freimann, Rolf ;   et al. | 2005-12-15 |
Method of manufacturing an optical component and optical system using the same App 20050223539 - Geuppert, Bernhard ;   et al. | 2005-10-13 |
Method for measuring and manufacturing an optical element and optical apparatus App 20050225774 - Freimann, Rolf ;   et al. | 2005-10-13 |