| Patent | Date |
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Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method
Grant 11,446,714 - Dobashi , et al. September 20, 2 | 2022-09-20 |
Pattern enhancement using a gas cluster ion beam
Grant 11,450,506 - Dobashi , et al. September 20, 2 | 2022-09-20 |
Pattern Enhancement Using a Gas Cluster Ion Beam
App 20220277924 - Dobashi; Kazuya ; et al. | 2022-09-01 |
Gas Cluster Processing Device And Gas Cluster Processing Method
App 20220143655 - DOBASHI; Kazuya ; et al. | 2022-05-12 |
Gas cluster processing device and gas cluster processing method
Grant 11,267,021 - Dobashi , et al. March 8, 2 | 2022-03-08 |
Substrate Cleaning Method, Processing Container Cleaning Method, And Substrate Processing Device
App 20220001426 - IKEDA; Kyoko ; et al. | 2022-01-06 |
Pattern Enhancement Using a Gas Cluster Ion Beam
App 20210335568 - Dobashi; Kazuya ; et al. | 2021-10-28 |
Cleaning Method And Substrate Processing Apparatus
App 20210268556 - IKEDA; Kyoko ; et al. | 2021-09-02 |
Gas Cluster Processing Device and Gas Cluster Processing Method
App 20210107041 - DOBASHI; Kazuya ; et al. | 2021-04-15 |
Method for cleaning chamber of substrate processing apparatus
Grant 10,786,837 - Saito , et al. September 29, 2 | 2020-09-29 |
Method and apparatus for substrate processing
Grant 10,381,233 - Kagawa , et al. A | 2019-08-13 |
Substrate Cleaning Method, Substrate Cleaning Device, And Method Of Selecting Cluster Generating Gas
App 20190035651 - DOBASHI; Kazuya | 2019-01-31 |
Method For Cleaning Chamber Of Substrate Processing Apparatus
App 20180369881 - SAITO; Yukimasa ; et al. | 2018-12-27 |
Substrate cleaning method, substrate processing method, substrate processing system and semiconductor device manufacturing method
Grant 10,163,622 - Dobashi , et al. Dec | 2018-12-25 |
Substrate Cleaning Apparatus
App 20180355465 - SAITO; Yukimasa ; et al. | 2018-12-13 |
Substrate cleaning apparatus
Grant 10,049,899 - Dobashi , et al. August 14, 2 | 2018-08-14 |
Method And Apparatus For Substrate Processing
App 20180182638 - Kagawa; Koji ; et al. | 2018-06-28 |
Substrate cleaning method, substrate cleaning apparatus and vacuum processing system
Grant 9,960,056 - Dobashi , et al. May 1, 2 | 2018-05-01 |
Substrate cleaning method, substrate cleaning device, and vacuum processing device
Grant 9,881,815 - Matsuo , et al. January 30, 2 | 2018-01-30 |
Method for removing metal contamination and apparatus for removing metal contamination
Grant 9,875,915 - Ito , et al. January 23, 2 | 2018-01-23 |
Processing Apparatus And Processing Method, And Gas Cluster Generating Apparatus And Gas Cluster Generating Method
App 20180015510 - Dobashi; Kazuya ; et al. | 2018-01-18 |
Cleaning method, processing apparatus, and storage medium
Grant 9,837,260 - Inai , et al. December 5, 2 | 2017-12-05 |
Substrate Cleaning Method, Substrate Processing Method, Substrate Processing System And Semiconductor Device Manufacturing Method
App 20170207076 - DOBASHI; Kazuya ; et al. | 2017-07-20 |
Liquid Processing Method And Liquid Processing Apparatus
App 20170032984 - ITO; Yudai ; et al. | 2017-02-02 |
Method For Removing Metal Contamination And Apparatus For Removing Metal Contamination
App 20160175898 - Ito; Yudai ; et al. | 2016-06-23 |
Tantalum Oxide Film Removal Method And Apparatus
App 20160163533 - DOBASHI; Kazuya ; et al. | 2016-06-09 |
Titanium Oxide Film Removal Method And Apparatus
App 20160148818 - DOBASHI; Kazuya ; et al. | 2016-05-26 |
Substrate Cleaning Method And Substrate Cleaning Apparatus
App 20160001334 - DOBASHI; Kazuya | 2016-01-07 |
Substrate cleaning apparatus and vacuum processing system
Grant 9,214,364 - Dobashi , et al. December 15, 2 | 2015-12-15 |
Substrate Cleaning Method, Substrate Cleaning Apparatus And Vacuum Processing System
App 20150255316 - Dobashi; Kazuya ; et al. | 2015-09-10 |
Graphene Machining Method
App 20150251913 - MATSUMOTO; Takashi ; et al. | 2015-09-10 |
Substrate cleaning apparatus and substrate cleaning method
Grant 9,099,298 - Dobashi , et al. August 4, 2 | 2015-08-04 |
Gas Cluster Irradiation Mechanism, Substrate Processing Apparatus Using Same, And Gas Cluster Irradiation Method
App 20150144595 - Inai; Kensuke ; et al. | 2015-05-28 |
Substrate Cleaning Apparatus
App 20150052702 - DOBASHI; Kazuya ; et al. | 2015-02-26 |
Substrate Cleaning Method And Substrate Cleaning Apparatus
App 20150027501 - Dobashi; Kazuya ; et al. | 2015-01-29 |
Substrate Cleaning Method, Substrate Cleaning Device, And Vacuum Processing Device
App 20150007858 - Matsuo; Jiro ; et al. | 2015-01-08 |
Cleaning Method, Processing Apparatus, And Storage Medium
App 20140227882 - Inai; Kensuke ; et al. | 2014-08-14 |
Method and device for cleaning a substrate and storage medium
Grant 8,673,086 - Tamura , et al. March 18, 2 | 2014-03-18 |
Plasma generation method, cleaning method, and substrate processing method
Grant 8,574,448 - Kannan , et al. November 5, 2 | 2013-11-05 |
Plasma processing method and storage medium
Grant 8,404,590 - Lee , et al. March 26, 2 | 2013-03-26 |
Substrate Cleaning Apparatus And Substrate Cleaning Method
App 20130008470 - DOBASHI; Kazuya ; et al. | 2013-01-10 |
Resist Removal Apparatus And Resist Removal Method
App 20120312334 - DOBASHI; Kazuya ; et al. | 2012-12-13 |
Substrate Cleaning Apparatus And Vacuum Processing System
App 20120247670 - DOBASHI; Kazuya ; et al. | 2012-10-04 |
Method for analyzing quartz member
Grant 8,268,185 - Dobashi , et al. September 18, 2 | 2012-09-18 |
Vacuum Processing Apparatus, Vacuum Processing Method, and Micro-Machining Apparatus
App 20120071003 - Dobashi; Kazuya ; et al. | 2012-03-22 |
Plasma Processing Method And Storage Medium
App 20120021538 - Lee; Sung Tae ; et al. | 2012-01-26 |
Component For Semiconductor Processing Apparatus And Manufacturing Method Thereof
App 20110244693 - Tamura; Akitake ; et al. | 2011-10-06 |
Method And Device For Cleaning A Substrate And Storage Medium
App 20110155177 - Tamura; Akitake ; et al. | 2011-06-30 |
Analysis method and analysis apparatus
Grant 7,923,680 - Dobashi , et al. April 12, 2 | 2011-04-12 |
Plasma Generation Method, Cleaning Method, and Substrate Processing Method
App 20100252068 - KANNAN; Hiroshi ; et al. | 2010-10-07 |
Analyzing Method and Analyzing Apparatus
App 20090218483 - Dobashi; Kazuya ; et al. | 2009-09-03 |
Component for semicondutor processing apparatus and manufacturing method thereof
App 20090194233 - Tamura; Akitake ; et al. | 2009-08-06 |
Gas Purifying Apparatus And Semiconductor Manufacturing Apparatus
App 20090183476 - Dobashi; Kazuya ; et al. | 2009-07-23 |
Method for Analyzing Quartz Member
App 20080302762 - Dobashi; Kazuya ; et al. | 2008-12-11 |
Method of cleaning substrate-processing device and substrate-processing device
Grant 7,383,841 - Shinriki , et al. June 10, 2 | 2008-06-10 |
Method for generating plasma method for cleaning and method for treating substrate
App 20060226119 - Kannan; Hiroshi ; et al. | 2006-10-12 |
Method of cleaning substrate-processing device and substrate-processing device
App 20060175011 - Shinriki; Hiroshi ; et al. | 2006-08-10 |
Method of cleaning substrate processing apparatus and computer-readable recording medium
App 20050139234 - Dobashi, Kazuya ; et al. | 2005-06-30 |
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