Doba; Shigeki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Doba; Shigeki.The latest application filed is for "substrate processing method and substrate processing apparatus".
- Doba; Shigeki - Yamanashi JP
- DOBA; Shigeki - Nirasaki City JP
- Doba; Shigeki - Miyagi JP
- Doba; Shigeki - Nirasaki-shi JP
- Doba; Shigeki - Nirasaki JP
| Patent | Date |
|---|---|
| Substrate processing apparatus Grant 11,328,904 - Doba , et al. May 10, 2 | 2022-05-10 |
| Substrate Processing Method And Substrate Processing Apparatus App 20220108913 - NAITO; Hajime ; et al. | 2022-04-07 |
| Substrate Processing Apparatus App 20200321195 - DOBA; Shigeki ; et al. | 2020-10-08 |
| Substrate processing apparatus Grant 10,734,201 - Doba , et al. | 2020-08-04 |
| Plasma etching apparatus and plasma etching method Grant 10,090,161 - Doba , et al. October 2, 2 | 2018-10-02 |
| Substrate Processing Apparatus And Heat Shield Plate App 20180151380 - OGAWA; Hiroyuki ; et al. | 2018-05-31 |
| Substrate Processing Apparatus App 20170256382 - DOBA; Shigeki ; et al. | 2017-09-07 |
| Plasma Etching Apparatus And Plasma Etching Method App 20170133234 - DOBA; Shigeki ; et al. | 2017-05-11 |
| Substrate Mounting Table And Plasma Treatment Device App 20140311676 - Hatoh; Hideyuki ; et al. | 2014-10-23 |
| Plasma Etching Apparatus And Plasma Etching Method App 20140017900 - Doba; Shigeki ; et al. | 2014-01-16 |
| Annular Assembly For Plasma Processing, Plasma Processing Apparatus, And Outer Annular Member App 20090229759 - OGASAWARA; Masahiro ; et al. | 2009-09-17 |
| Exhaust ring for manufacturing semiconductors Grant D494,551 - Doba August 17, 2 | 2004-08-17 |
| Inner wall shield for a process chamber for manufacturing semiconductors Grant D491,963 - Doba June 22, 2 | 2004-06-22 |
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