Patent | Date |
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Apparatus and methods for controlling gas flows in a HVPE reactor Grant 9,416,464 - Dmitriev , et al. August 16, 2 | 2016-08-16 |
HVPE apparatus and methods for growth of p-type single crystal group III nitride materials Grant 8,647,435 - Dmitriev , et al. February 11, 2 | 2014-02-11 |
Bulk GaN and AlGaN single crystals Grant 8,372,199 - Melnik , et al. February 12, 2 | 2013-02-12 |
Method And Apparatus For Fabricating Crack-free Group Iii Nitride Semiconductor Materials App 20120076968 - Dmitriev; Vladimir A. ;   et al. | 2012-03-29 |
Method and apparatus for fabricating crack-free Group III nitride semiconductor materials Grant 8,092,597 - Dmitriev , et al. January 10, 2 | 2012-01-10 |
Bulk GaN and AlGaN single crystals Grant 8,092,596 - Melnik , et al. January 10, 2 | 2012-01-10 |
Method And Apparatus For Fabricating Crack-free Group Iii Nitride Semiconductor Materials App 20110114015 - Dmitriev; Vladimir A. ;   et al. | 2011-05-19 |
HVPE apparatus and methods for growth of indium containing materials and materials and structures grown thereby Grant 7,727,333 - Syrkin , et al. June 1, 2 | 2010-06-01 |
Apparatus for epitaxially growing semiconductor device structures with sharp layer interfaces utilizing HVPE Grant 7,670,435 - Tsvetkov , et al. March 2, 2 | 2010-03-02 |
Reactor for extended duration growth of gallium containing single crystals Grant 7,611,586 - Melnik , et al. November 3, 2 | 2009-11-03 |
Method for achieving low defect density AlGaN single crystal boules Grant 7,556,688 - Melnik , et al. July 7, 2 | 2009-07-07 |
BULK GaN AND AlGaN SINGLE CRYSTALS App 20090148984 - MELNIK; Yuri V. ;   et al. | 2009-06-11 |
Method For Simultaneously Producing Multiple Wafers During A Single Epitaxial Growth Run And Semiconductor Structure Grown Thereby App 20090130781 - Dmitriev; Vladimir A. ;   et al. | 2009-05-21 |
Method And Apparatus For Fabricating Crack-free Group Iii Nitride Semiconductor Materials App 20090092815 - Dmitriev; Vladimir A. ;   et al. | 2009-04-09 |
Method and apparatus for fabricating crack-free Group III nitride semiconductor materials Grant 7,501,023 - Dmitriev , et al. March 10, 2 | 2009-03-10 |
BULK GaN AND AlGaN SINGLE CRYSTALS App 20080257256 - MELNIK; Yuri V. ;   et al. | 2008-10-23 |
Reactor For Extended Duration Growth Of Gallium Containing Single Crystals App 20080022926 - Melnik; Yuri V. ;   et al. | 2008-01-31 |
Reactor for extended duration growth of gallium containing single crystals Grant 7,279,047 - Melnik , et al. October 9, 2 | 2007-10-09 |
Method for simultaneously producing multiple wafers during a single epitaxial growth run and semiconductor structure grown thereby App 20070032046 - Dmitriev; Vladimir A. ;   et al. | 2007-02-08 |
Method and apparatus for fabricating crack-free group III nitride semiconductor materials App 20060280668 - Dmitriev; Vladimir A. ;   et al. | 2006-12-14 |
HVPE apparatus for simultaneously producing multiple wafers during a single epitaxial growth run App 20060011135 - Dmitriev; Vladimir A. ;   et al. | 2006-01-19 |
Bulk GaN and AIGaN single crystals App 20050244997 - Melnik, Yuri V. ;   et al. | 2005-11-03 |
Manufacturing methods for semiconductor devices with multiple III-V material layers Grant 6,955,719 - Dmitriev , et al. October 18, 2 | 2005-10-18 |
Method for achieving low defect density AlGaN single crystal boules App 20050212001 - Melnik, Yuri V. ;   et al. | 2005-09-29 |
Bulk GaN and ALGaN single crystals Grant 6,936,357 - Melnik , et al. August 30, 2 | 2005-08-30 |
Bulk GaN and AlGaN single crystals App 20050164044 - Melnik, Yuri V. ;   et al. | 2005-07-28 |
Method and apparatus for fabricating crack-free Group III nitride semiconductor materials App 20050142391 - Dmitriev, Vladimir A. ;   et al. | 2005-06-30 |
Method for fabricating a P-N heterojunction device utilizing HVPE grown III-V compound layers and resultant device Grant 6,890,809 - Karpov , et al. May 10, 2 | 2005-05-10 |
Reactor for extended duration growth of gallium containing single crystals App 20050056222 - Melnik, Yuri V. ;   et al. | 2005-03-17 |
III-V compound semiconductor device with an AlxByInzGa1-x-y-zN1-a-bPaAsb non-continuous quantum dot layer Grant 6,849,862 - Nikolaev , et al. February 1, 2 | 2005-02-01 |
Manufacturing methods for semiconductor devices with multiple III-V material layers App 20040137657 - Dmitriev, Vladimir A. ;   et al. | 2004-07-15 |
Apparatus for epitaxially growing semiconductor device structures with submicron group III nitride layer utilizing HVPE Grant 6,706,119 - Tsvetkov , et al. March 16, 2 | 2004-03-16 |
III-V compound semiconductor device with an AIxByInzGa1-x-y-zN1-a-bPaAsb non-continuous quantum dot layer App 20040026704 - Nikolaev, Audrey E. ;   et al. | 2004-02-12 |
Bulk GaN and AlGaN single crystals App 20030226496 - Melnik, Yuri V. ;   et al. | 2003-12-11 |
Method of epitaxially growing device structures with submicron group III nitride layers utilizing HVPE Grant 6,660,083 - Tsvetkov , et al. December 9, 2 | 2003-12-09 |
Reactor For Extended Duration Growth Of Gallium Containing Single Crystals App 20030221619 - Melnik, Yuri V. ;   et al. | 2003-12-04 |
Method of epitaxially growing submicron group III nitride layers utilizing HVPE Grant 6,656,272 - Tsvetkov , et al. December 2, 2 | 2003-12-02 |
Reactor for extended duration growth of gallium containing single crystals Grant 6,656,285 - Melnik , et al. December 2, 2 | 2003-12-02 |
Method For Achieving Low Defect Density Aigan Single Crystal Boules App 20030205193 - Melnik, Yuri V. ;   et al. | 2003-11-06 |
Method for achieving low defect density GaN single crystal boules Grant 6,616,757 - Melnik , et al. September 9, 2 | 2003-09-09 |
Method for fabricating bulk GaN single crystals Grant 6,613,143 - Melnik , et al. September 2, 2 | 2003-09-02 |
Method for growing III-V compound semiconductor structures with an integral non-continuous quantum dot layer utilizing HVPE techniques Grant 6,599,133 - Nikolaev , et al. July 29, 2 | 2003-07-29 |
Method for fabricating bulk AlGaN single crystals Grant 6,576,054 - Melnik , et al. June 10, 2 | 2003-06-10 |
P-n heterojunction-based structures utilizing HVPE grown III-V compound layers Grant 6,559,467 - Nikolaev , et al. May 6, 2 | 2003-05-06 |
Method for growing p-type III-V compound material utilizing HVPE techniques Grant 6,555,452 - Nikolaev , et al. April 29, 2 | 2003-04-29 |
Method for fabricating a P-N heterojunction device utilizing HVPE grown III-V compound layers and resultant device App 20030049898 - Karpov, Sergey ;   et al. | 2003-03-13 |
Apparatus for epitaxially for growing semiconductor device structures with submicron group III nitride layer utilizing HVPE App 20020174833 - Tsvetkov, Denis V. ;   et al. | 2002-11-28 |
Method of epitaxially growing submicron group III nitride layers utilizing HVPE App 20020177312 - Tsvetkov, Denis V. ;   et al. | 2002-11-28 |
III-V compounds semiconductor device with an AlxByInzGa1-x-y-zN non continuous quantum dot layer Grant 6,479,839 - Nikolaev , et al. November 12, 2 | 2002-11-12 |
P-N homojunction-based structures utilizing HVPE growth III-V compound layers Grant 6,476,420 - Nikolaev , et al. November 5, 2 | 2002-11-05 |
Method for growing p-n homojunction-based structures utilizing HVPE techniques Grant 6,472,300 - Nikolaev , et al. October 29, 2 | 2002-10-29 |
Apparatus for epitaxially growing semiconductor device structures with sharp layer interfaces utilizing HVPE App 20020155713 - Tsvetkov, Denis V. ;   et al. | 2002-10-24 |
Method of epitaxially growing device structures with submicron group III nitride layers utilizing HVPE App 20020152951 - Tsvetkov, Denis V. ;   et al. | 2002-10-24 |
Method of epitaxially growing device structures with sharp layer interfaces utilizing HVPE App 20020155683 - Tsvetkov, Denis V. ;   et al. | 2002-10-24 |
P-n heterojunction-based structures utilizing HVPE grown III-V compound layers App 20020053679 - Nikolaev, Audrey E. ;   et al. | 2002-05-09 |
P-N homojunction-based structures utilizing HVPE grown III-V compound layers App 20020047127 - Nikolaev, Audrey E. ;   et al. | 2002-04-25 |
P-N junction-based structures utilizing HVPE grown III-V compound layers App 20020047135 - Nikolaev, Audrey E. ;   et al. | 2002-04-25 |
Method for growing p-n homojunction-based structures utilizing HVPE techniques App 20020039806 - Nikolaev, Audrey E. ;   et al. | 2002-04-04 |
III-V compounds semiconductor device with an AIxByInzGa1-x-y-zN non continuous quantum dot layer App 20020030192 - Nikolaev, Audrey E. ;   et al. | 2002-03-14 |
Method for growing p-type III-V compound material utilizing HVPE techniques App 20020028565 - Nikolaev, Audrey E. ;   et al. | 2002-03-07 |
Method for growing III-V compound semiconductor structures with an integral non-continuous quantum dot layer utilizing HVPE techniques App 20020025661 - Nikolaev, Audrey E. ;   et al. | 2002-02-28 |
Method for growing p-n heterojunction-based structures utilizing HVPE techniques App 20020022286 - Nikolaev, Audrey E. ;   et al. | 2002-02-21 |
III-V compound semiconductor device with an InGaN1-x-yPxASy non-continuous quantum dot layer App 20020017650 - Nikolaev, Audrey E. ;   et al. | 2002-02-14 |
Process for producing III-V nitride pn junctions and p-i-n junctions Grant 6,218,269 - Nikolaev , et al. April 17, 2 | 2001-04-17 |
Method for reducing micropipe formation in the epitaxial growth of silicon carbide and resulting silicon carbide structures Grant 5,679,153 - Dmitriev , et al. October 21, 1 | 1997-10-21 |