| Patent | Date |
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RF coupled plasma abatement system comprising an integrated power oscillator
Grant 8,932,430 - Srivastava , et al. January 13, 2 | 2015-01-13 |
Methods for beam current modulation by ion source parameter modulation
Grant 8,803,110 - Graf , et al. August 12, 2 | 2014-08-12 |
Inline Capacitive Ignition of Inductively Coupled Plasma Ion Source
App 20130305988 - DiVergilio; William F. ; et al. | 2013-11-21 |
Method And Apparatus For Cleaning Residue From An Ion Source Component
App 20130305989 - Srivastava; Aseem K. ; et al. | 2013-11-21 |
RF Coupled Plasma Abatement System Comprising an Integrated Power Oscillator
App 20120279657 - Srivastava; Aseem K. ; et al. | 2012-11-08 |
Enhanced low energy ion beam transport in ion implantation
Grant 8,237,135 - Vanderberg , et al. August 7, 2 | 2012-08-07 |
Microwave Plasma Electron Flood
App 20120187842 - DiVergilio; William F. ; et al. | 2012-07-26 |
Hybrid ion source/multimode ion source
Grant 8,193,513 - DiVergilio , et al. June 5, 2 | 2012-06-05 |
Double plasma ion source
Grant 7,947,966 - DiVergilio May 24, 2 | 2011-05-24 |
Method And Apparatus For Cleaning Residue From An Ion Source Component
App 20110108058 - Srivastava; Aseem K. ; et al. | 2011-05-12 |
Wide Area Radio Frequency Plasma Apparatus For Processing Multiple Substrates
App 20110036500 - DiVergilio; William F. ; et al. | 2011-02-17 |
Wide area radio frequency plasma apparatus for processing multiple substrates
Grant 7,845,310 - DiVergilio , et al. December 7, 2 | 2010-12-07 |
Plasma electron flood for ion beam implanter
Grant 7,800,083 - Vanderberg , et al. September 21, 2 | 2010-09-21 |
Enhanced Low Energy Ion Beam Transport In Ion Implantation
App 20100181499 - Vanderberg; Bo H. ; et al. | 2010-07-22 |
Segmented resonant antenna for radio frequency inductively coupled plasmas
Grant 7,748,344 - DiVergilio , et al. July 6, 2 | 2010-07-06 |
Elevated temperature RF ion source
Grant 7,750,314 - DiVergilio July 6, 2 | 2010-07-06 |
Methods for rapidly switching off an ion beam
Grant 7,589,333 - Graf , et al. September 15, 2 | 2009-09-15 |
Fluorine based cleaning of an ion source
Grant 7,531,819 - DiVergilio , et al. May 12, 2 | 2009-05-12 |
Double Plasma Ion Source
App 20090114841 - DiVergilio; William F. | 2009-05-07 |
Plasma Electron Flood For Ion Beam Implanter
App 20090114815 - Vanderberg; Bo H. ; et al. | 2009-05-07 |
Hybrid Ion Source/multimode Ion Source
App 20090032728 - DiVergilio; William F. ; et al. | 2009-02-05 |
Elevated Temperature Rf Ion Source
App 20090032727 - DiVergilio; William F. | 2009-02-05 |
Wide area radio frequency plasma apparatus for processing multiple substrates
App 20080138992 - DiVergilio; William F. ; et al. | 2008-06-12 |
Methods for rapidly switching off an ion beam
App 20080078955 - Graf; Michael A. ; et al. | 2008-04-03 |
Methods for beam current modulation by ion source parameter modulation
App 20080078957 - Graf; Michael A. ; et al. | 2008-04-03 |
Fluorine based cleaning of an ion source
App 20070137671 - DiVergilio; William F. ; et al. | 2007-06-21 |
Segmented resonant antenna for radio frequency inductively coupled plasmas
App 20070044717 - DiVergilio; William F. ; et al. | 2007-03-01 |
Ion beam scanning control methods and systems for ion implantation uniformity
Grant 7,078,707 - Benveniste , et al. July 18, 2 | 2006-07-18 |
Ion Beam Scanning Control Methods And Systems For Ion Implantation Uniformity
App 20060145096 - Benveniste; Victor M. ; et al. | 2006-07-06 |
Unipolar electrostatic quadrupole lens and switching methods for charged beam transport
Grant 6,949,895 - DiVergilio , et al. September 27, 2 | 2005-09-27 |
Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage
Grant 6,947,274 - Kellerman , et al. September 20, 2 | 2005-09-20 |
Segmented resonant antenna for radio frequency inductively coupled plasmas
App 20050098117 - DiVergilio, William F. ; et al. | 2005-05-12 |
Thin magnetron structures for plasma generation in ion implantation systems
Grant 6,879,109 - Benveniste , et al. April 12, 2 | 2005-04-12 |
Clamping And De-clamping Semiconductor Wafers On An Electrostatic Chuck Using Wafer Inertial Confinement By Applying A Single-phase Square Wave Ac Clamping Voltage
App 20050052817 - Kellerman, Peter L. ; et al. | 2005-03-10 |
Unipolar electrostatic quadrupole lens and switching methods for charged beam transport
App 20050045835 - DiVergilio, William F. ; et al. | 2005-03-03 |
Thin magnetron structures for plasma generation in ion implantation systems
App 20040227470 - Benveniste, Victor M. ; et al. | 2004-11-18 |
Method and system for ion beam containment in an ion beam guide
Grant 6,759,665 - Benveniste , et al. July 6, 2 | 2004-07-06 |
Ion source and coaxial inductive coupler for ion implantation system
Grant 6,664,548 - Benveniste , et al. December 16, 2 | 2003-12-16 |
Method and apparatus for improved ion acceleration in an ion implantation system
Grant 6,653,643 - Saadatmand , et al. November 25, 2 | 2003-11-25 |
Integrated resonator and amplifier system
Grant 6,653,803 - DiVergilio , et al. November 25, 2 | 2003-11-25 |
Ion source and coaxial inductive coupler for ion implantation system
App 20030205680 - Benveniste, Victor M. ; et al. | 2003-11-06 |
Slit double gap buncher and method for improved ion bunching in an ion implantation system
Grant 6,635,890 - Saadatmand , et al. October 21, 2 | 2003-10-21 |
Method and apparatus for improved ion bunching in an ion implantation system
Grant 6,583,429 - Saadatmand , et al. June 24, 2 | 2003-06-24 |
Waveguide for microwave excitation of plasma in an ion beam guide
Grant 6,541,781 - Benveniste , et al. April 1, 2 | 2003-04-01 |
Method and apparatus for improved ion bunching in an ion implantation system
App 20030038253 - Saadatmand, Kourosh ; et al. | 2003-02-27 |
Slit double gap buncher and method for improved ion bunching in an ion implantation system
App 20030038254 - Saadatmand, Kourosh ; et al. | 2003-02-27 |
Method and apparatus for improved ion acceleration in an ion implantation system
App 20020084427 - Saadatmand, Kourosh ; et al. | 2002-07-04 |
Method and system for microwave excitation of plasma in an ion beam guide
Grant 6,414,329 - Benveniste , et al. July 2, 2 | 2002-07-02 |
Method and system for ion beam containment in an ion beam guide
App 20020014587 - Benveniste, Victor M. ; et al. | 2002-02-07 |
Integrated power oscillator RF source of plasma immersion ion implantation system
Grant 6,305,316 - DiVergilio , et al. October 23, 2 | 2001-10-23 |
Glass-like insulator for electrically isolating electrodes from ion implanter housing
Grant 6,291,828 - Saadatmand , et al. September 18, 2 | 2001-09-18 |
Compact helical resonator coil for ion implanter linear accelerator
Grant 6,208,095 - DiVergilio , et al. March 27, 2 | 2001-03-27 |
Time of flight energy measurement apparatus for an ion beam implanter
Grant 6,137,112 - McIntyre , et al. October 24, 2 | 2000-10-24 |
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