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Patent applications and USPTO patent grants for DiRegolo; Joseph A..The latest application filed is for "system for electron beam detection".
Patent | Date |
---|---|
System for electron beam detection Grant 9,778,186 - Kojima , et al. October 3, 2 | 2017-10-03 |
Light collection optics for measuring flux and spectrum from light-emitting devices Grant 9,347,824 - McCord , et al. May 24, 2 | 2016-05-24 |
System for Electron Beam Detection App 20160011110 - Kojima; Shinichi ;   et al. | 2016-01-14 |
Alignment measurement system Grant 9,030,661 - Mieher , et al. May 12, 2 | 2015-05-12 |
Light Collection Optics for Measuring Flux and Spectrum from Light-Emitting Devices App 20150124253 - McCord; Mark A. ;   et al. | 2015-05-07 |
Linear stage and metrology architecture for reflective electron beam lithography Grant 8,724,115 - Ummethala , et al. May 13, 2 | 2014-05-13 |
Linear Stage and Metrology Architecture for Reflective Electron Beam Lithography App 20130342827 - Ummethala; Upendra ;   et al. | 2013-12-26 |
Liquid chemical dispensing system Grant 4,601,409 - DiRegolo July 22, 1 | 1986-07-22 |
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