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System and Method for Thermally Cracking Ammonia App 20210395883 - Dip; Anthony | 2021-12-23 |
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Systems and Methods for Depositing a Layer on a Substrate Using Atomic Oxygen App 20210355580 - Dip; Anthony | 2021-11-18 |
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Internally Cooled Multi-hole Injectors For Delivery Of Process Chemicals App 20210156029 - Verbaas; Melvin ;   et al. | 2021-05-27 |
Multiple Zone Gas Injection For Control of Gas Phase Radicals App 20190360095 - Dip; Anthony | 2019-11-28 |
Method and apparatus for multi-film deposition and etching in a batch processing system Grant 9,831,099 - O'Meara , et al. November 28, 2 | 2017-11-28 |
Method And Apparatus For Multi-film Deposition And Etching In A Batch Processing System App 20170236719 - O'Meara; David L. ;   et al. | 2017-08-17 |
Multilayer sidewall spacer for seam protection of a patterned structure Grant 8,673,725 - O'Meara , et al. March 18, 2 | 2014-03-18 |
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Method of forming strained epitaxial carbon-doped silicon films Grant 8,466,045 - Gumpher , et al. June 18, 2 | 2013-06-18 |
Film deposition apparatus Grant 8,465,591 - Kato , et al. June 18, 2 | 2013-06-18 |
Film deposition apparatus Grant 8,465,592 - Kato , et al. June 18, 2 | 2013-06-18 |
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Method Of Forming Strained Epitaxial Carbon-doped Silicon Films App 20120003825 - Dip; Anthony | 2012-01-05 |
Atomic layer deposition systems and methods Grant 8,043,432 - Dip October 25, 2 | 2011-10-25 |
Multilayer Sidewall Spacer For Seam Protection Of A Patterned Structure App 20110241128 - O'Meara; David L. ;   et al. | 2011-10-06 |
Dual Sidewall Spacer For Seam Protection Of A Patterned Structure App 20110241085 - O'Meara; David L. ;   et al. | 2011-10-06 |
Low-temperature dielectric film formation by chemical vapor deposition Grant 7,994,070 - Dip , et al. August 9, 2 | 2011-08-09 |
Film Deposition Apparatus, Film Deposition Method, And Computer Readable Storage Medium App 20110151122 - KATO; HITOSHI ;   et al. | 2011-06-23 |
Thermal processing furnace, gas delivery system therefor, and methods for delivering a process gas thereto Grant 7,910,494 - Dip , et al. March 22, 2 | 2011-03-22 |
In-situ hybrid deposition of high dielectric constant films using atomic layer deposition and chemical vapor deposition Grant 7,816,278 - Reid , et al. October 19, 2 | 2010-10-19 |
In-situ formation of oxidized aluminum nitride films Grant 7,776,763 - Reid , et al. August 17, 2 | 2010-08-17 |
Silicon germanium surface layer for high-k dielectric integration Grant 7,737,051 - Dip , et al. June 15, 2 | 2010-06-15 |
Method for growing an oxynitride film on a substrate Grant 7,659,214 - Reid , et al. February 9, 2 | 2010-02-09 |
Film Deposition Apparatus, Film Deposition Method, And Computer Readable Storage Medium App 20090324828 - KATO; HITOSHI ;   et al. | 2009-12-31 |
Film Deposition Apparatus, Film Deposition Method, and Computer Readable Storage Medium App 20090324826 - Kato; Hitoshi ;   et al. | 2009-12-31 |
Method for replacing a nitrous oxide based oxidation process with a nitric oxide based oxidation process for substrate processing Grant 7,635,655 - Dip December 22, 2 | 2009-12-22 |
Thermal processing system with improved process gas flow and method for injecting a process gas into a thermal processing system Grant 7,632,354 - Dip , et al. December 15, 2 | 2009-12-15 |
Method for extending time between chamber cleaning processes Grant 7,604,841 - Joe , et al. October 20, 2 | 2009-10-20 |
In-situ Hybrid Deposition Of High Dielectric Constant Films Using Atomic Layer Deposition And Chemical Vapor Deposition App 20090246971 - Reid; Kimberly G. ;   et al. | 2009-10-01 |
Method for growing a thin oxynitride film on a substrate Grant 7,534,731 - Reid , et al. May 19, 2 | 2009-05-19 |
Method and system for removing an oxide from a substrate Grant 7,524,769 - Dip , et al. April 28, 2 | 2009-04-28 |
Method For Growing An Oxynitride Film On A Substrate App 20090088000 - Reid; Kimberly G. ;   et al. | 2009-04-02 |
Sequential oxide removal using fluorine and hydrogen Grant 7,501,349 - Dip , et al. March 10, 2 | 2009-03-10 |
Thermal Processing System And Method For Forming An Oxide Layer On Substrates App 20090035463 - Dip; Anthony | 2009-02-05 |
Deposition of silicon-containing films from hexachlorodisilane Grant 7,468,311 - Dip , et al. December 23, 2 | 2008-12-23 |
Method For Growing A Thin Oxynitride Film On A Substrate App 20080242109 - Reid; Kimberly G. ;   et al. | 2008-10-02 |
Atomic Layer Deposition Systems And Methods App 20080193643 - Dip; Anthony | 2008-08-14 |
Low temperature formation of patterned epitaxial Si containing films Grant 7,405,140 - Dip , et al. July 29, 2 | 2008-07-29 |
Reduced Defect Silicon Or Silicon Germanium Deposition In Micro-features App 20080169534 - Dip; Anthony ;   et al. | 2008-07-17 |
Sequential deposition process for forming Si-containing films Grant 7,358,194 - Dip , et al. April 15, 2 | 2008-04-15 |
Thermal Processing System With Improved Process Gas Flow And Method For Injecting A Process Gas Into A Thermal Processing System App 20080035055 - Dip; Anthony ;   et al. | 2008-02-14 |
In-situ Formation Of Oxidized Aluminum Nitride Films App 20070259534 - Reid; Kimberly G. ;   et al. | 2007-11-08 |
Method For Replacing A Nitrous Oxide Based Oxidation Process With A Nitric Oxide Based Oxidation Process For Substrate Processing App 20070238313 - Dip; Anthony | 2007-10-11 |
Sequential oxide removal using fluorine and hydrogen App 20070238302 - Dip; Anthony ;   et al. | 2007-10-11 |
Thermal Processing Furnace, Gas Delivery System Therefor, And Methods For Delivering A Process Gas Thereto App 20070231757 - Dip; Anthony ;   et al. | 2007-10-04 |
Formation of ultra-thin oxide layers by self-limiting interfacial oxidation Grant 7,235,440 - O'Meara , et al. June 26, 2 | 2007-06-26 |
Micro-feature fill process and apparatus using hexachlorodisilane or other chlorine-containing silicon precursor Grant 7,205,187 - Leith , et al. April 17, 2 | 2007-04-17 |
Method of forming uniform ultra-thin oxynitride layers Grant 7,202,186 - O'Meara , et al. April 10, 2 | 2007-04-10 |
Interrupted deposition process for selective deposition of Si-containing films App 20070048956 - Dip; Anthony ;   et al. | 2007-03-01 |
Sequential deposition process for forming Si-containing films App 20070042570 - Dip; Anthony ;   et al. | 2007-02-22 |
Low temperature formation of patterned epitaxial Si containing films App 20070042569 - Dip; Anthony ;   et al. | 2007-02-22 |
Low-temperature oxide removal using fluorine App 20070039924 - Dip; Anthony ;   et al. | 2007-02-22 |
In-situ Atomic Layer Deposition App 20070037412 - Dip; Anthony ;   et al. | 2007-02-15 |
Built-in self test for a thermal processing system Grant 7,165,011 - Kaushal , et al. January 16, 2 | 2007-01-16 |
Heat treating device Grant 7,141,765 - Makiya , et al. November 28, 2 | 2006-11-28 |
Method and system for removing an oxide from a substrate App 20060228900 - Dip; Anthony ;   et al. | 2006-10-12 |
Micro-feature fill process and apparatus using hexachlorodisilane or other chlorine-containing silicon precursor App 20060160288 - Leith; Allen John ;   et al. | 2006-07-20 |
Semiconductor wafer susceptor Grant 7,022,192 - Dip , et al. April 4, 2 | 2006-04-04 |
Method for extending time between chamber cleaning processes App 20050221001 - Joe, Raymond ;   et al. | 2005-10-06 |
Wafer heater assembly App 20050217799 - O'Meara, David L. ;   et al. | 2005-10-06 |
Silicon-germanium thin layer semiconductor structure with variable silicon-germanium composition and method of fabrication App 20050199872 - Roy, Pradip K. ;   et al. | 2005-09-15 |
Silicon germanium surface layer for high-k dielectric integration App 20050199877 - Dip, Anthony ;   et al. | 2005-09-15 |
Deposition of silicon-containing films from hexachlorodisilane App 20050066892 - Dip, Anthony ;   et al. | 2005-03-31 |
Method of oxidizing work pieces and oxidation system Grant 6,869,892 - Suzuki , et al. March 22, 2 | 2005-03-22 |
Formation of a metal-containing film by sequential gas exposure in a batch type processing system App 20050056219 - Dip, Anthony ;   et al. | 2005-03-17 |
Multiple grow-etch cyclic surface treatment for substrate preparation App 20050048742 - Dip, Anthony ;   et al. | 2005-03-03 |
Method of forming uniform ultra-thin oxynitride layers App 20050026459 - O'Meara, David L. ;   et al. | 2005-02-03 |
Formation of ultra-thin oxide layers by self-limiting interfacial oxidation App 20050026453 - O'Meara, David L. ;   et al. | 2005-02-03 |
Removable semiconductor wafer susceptor Grant 6,799,940 - Joe , et al. October 5, 2 | 2004-10-05 |
Heat treating device App 20040115585 - Makiya, Toshiyuki ;   et al. | 2004-06-17 |
Removable semiconductor wafer susceptor App 20040109748 - Joe, Raymond ;   et al. | 2004-06-10 |
Semiconductor wafer susceptor App 20040040510 - Dip, Anthony ;   et al. | 2004-03-04 |
Thermal processing apparatus and process Grant 5,618,351 - Koble, Jr. , et al. April 8, 1 | 1997-04-08 |