Dinsmore; Robert
Patent Applications and Registrations
Patent applications and USPTO patent grants for Dinsmore; Robert.The latest application filed is for "finned shutter disk for a substrate process chamber".
- Dinsmore; Robert - Sunnyvale CA
| Patent | Date |
|---|---|
| In situ chamber clean with inert hydrogen helium mixture during wafer process Grant 9,269,562 - Dinsmore , et al. February 23, 2 | 2016-02-23 |
| Two piece shutter disk assembly for a substrate process chamber Grant 9,252,002 - Tsai , et al. February 2, 2 | 2016-02-02 |
| Finned shutter disk for a substrate process chamber Grant 9,147,558 - Chia , et al. September 29, 2 | 2015-09-29 |
| Finned Shutter Disk For A Substrate Process Chamber App 20140196848 - CHIA; BONNIE T. ; et al. | 2014-07-17 |
| In Situ Chamber Clean With Inert Hydrogen Helium Mixture During Wafer Process App 20140196746 - Dinsmore; Robert ; et al. | 2014-07-17 |
| Two Piece Shutter Disk Assembly For A Substrate Process Chamber App 20140020629 - TSAI; CHENG-HSIUNG MATTHEW ; et al. | 2014-01-23 |
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