Dinh; Thuc M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Dinh; Thuc M..The latest application filed is for "apparatus and method for vapor generation and film deposition".
- Dinh; Thuc M. - Shakopee MN
- Dinh; Thuc M. - Savage MN
| Patent | Date |
|---|---|
| Apparatus and method for vapor generation and film deposition Grant 10,287,679 - Dinh , et al. | 2019-05-14 |
| Apparatus and method for vapor generation and film deposition App 20180044789 - Dinh; Thuc M. ; et al. | 2018-02-15 |
| Apparatus and method for vapor generation and film deposition Grant 9,797,593 - Dinh , et al. October 24, 2 | 2017-10-24 |
| Apparatus and method for vapor generation and film deposition App 20160334099 - Dinh; Thuc M. ; et al. | 2016-11-17 |
| Air conditioning system with vapor bypassing App 20160091228 - Naqwi; Amir A. ; et al. | 2016-03-31 |
| Method and apparatus for vapor and gas filtration Grant 9,089,800 - Liu , et al. July 28, 2 | 2015-07-28 |
| Fine droplet atomization for liquid precursor vaporization Grant 8,986,784 - Liu , et al. March 24, 2 | 2015-03-24 |
| Method and apparatus for vapor generation and wafer cleaning Grant 8,945,281 - Dinh , et al. February 3, 2 | 2015-02-03 |
| Liquid flow control for film deposition Grant 8,783,652 - Dinh , et al. July 22, 2 | 2014-07-22 |
| Apparatus for vapor condensation and recovery Grant 8,728,240 - Liu , et al. May 20, 2 | 2014-05-20 |
| Apparatus for counting particles in a gas Grant 8,711,338 - Liu , et al. April 29, 2 | 2014-04-29 |
| Apparatus for counting particles in a gas Grant 8,603,247 - Liu , et al. December 10, 2 | 2013-12-10 |
| Fine droplet atomizer for liquid precursor vaporization App 20130292485 - Liu; Benjamin Y.H. ; et al. | 2013-11-07 |
| Method for vapor condensation and recovery App 20130295776 - Liu; Benjamin Y.H. ; et al. | 2013-11-07 |
| Apparatus for vapor condensation and recovery App 20130295749 - Liu; Benjamin Y.H. ; et al. | 2013-11-07 |
| Apparatus for counting particles in a gas App 20130239888 - Liu; Benjamin Y.H. ; et al. | 2013-09-19 |
| Liquid flow control for film deposition App 20130233395 - Dinh; Thuc M. ; et al. | 2013-09-12 |
| Fine droplet atomizer for liquid precursor vaporization Grant 8,511,583 - Liu , et al. August 20, 2 | 2013-08-20 |
| Method and apparatus for vapor and gas filtration App 20130203264 - Liu; Benjamin Y.H. ; et al. | 2013-08-08 |
| Method for counting particles in a gas Grant 8,465,791 - Liu , et al. June 18, 2 | 2013-06-18 |
| Method and apparatus for counting particles in a gas App 20130036973 - Liu; Benjamin Y.H. ; et al. | 2013-02-14 |
| Fine droplet atomizer for liquid precursor vaporization App 20110192909 - Liu; Benjamin Y.H. ; et al. | 2011-08-11 |
| Method and apparatus for counting particles in a gas App 20110091649 - Liu; Benjamin Y.H. ; et al. | 2011-04-21 |
| Method And Apparatus For Particle Filtration And Enhancing Tool Performance In Film Deposition App 20090084315 - Liu; Benjamin Y.H. ; et al. | 2009-04-02 |
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