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Patent applications and USPTO patent grants for Dinh; Thuc.The latest application filed is for "apparatus for filtration and gas-vapor mixing in thin film deposition".
Patent | Date |
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Apparatus for filtration and gas-vapor mixing in thin film deposition App 20140096715 - Liu; Benjamin Y.H. ;   et al. | 2014-04-10 |
Integrated system for vapor generation and thin film deposition App 20130312674 - Liu; Benjamin Y.H. ;   et al. | 2013-11-28 |
Method and apparatus for generating vapor at high rates Grant 8,554,064 - Dinh , et al. October 8, 2 | 2013-10-08 |
Method and apparatus for particle filtration and enhancing tool performance in film deposition Grant 8,297,223 - Liu , et al. October 30, 2 | 2012-10-30 |
Integrated system for vapor generation and thin film deposition App 20110232588 - Liu; Benjamin Y.H. ;   et al. | 2011-09-29 |
Apparatus for filtration and gas-vapor mixing in thin film deposition App 20090293807 - Liu; Benjamin Y.H. ;   et al. | 2009-12-03 |
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