Patent | Date |
---|
Method and apparatus for pulse gas delivery Grant 11,404,290 - Ding , et al. August 2, 2 | 2022-08-02 |
Method and Apparatus for Pulse Gas Delivery with Pressure Control App 20220161288 - Ding; Junhua ;   et al. | 2022-05-26 |
Pressure Control Using An External Trigger App 20220147070 - Ding; Junhua ;   et al. | 2022-05-12 |
Methods and apparatus for pressure based mass flow ratio control Grant 11,187,561 - Ding November 30, 2 | 2021-11-30 |
Methods and Apparatus for Pressure Based Mass Flow Ratio Control App 20210263541 - Ding; Junhua | 2021-08-26 |
Method and Apparatus for Pulse Gas Delivery with Concentration Measurement App 20210215655 - Ye; Jim ;   et al. | 2021-07-15 |
System for and method of fast pulse gas delivery Grant 10,969,799 - Ding , et al. April 6, 2 | 2021-04-06 |
Method and apparatus for self verification of pressured based mass flow controllers Grant 10,801,867 - Ding October 13, 2 | 2020-10-13 |
Method and Apparatus for Pulse Gas Delivery App 20200321225 - Ding; Junhua ;   et al. | 2020-10-08 |
Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger App 20200301455 - L'Bassi; Michael ;   et al. | 2020-09-24 |
Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger App 20200241578 - L'Bassi; Michael ;   et al. | 2020-07-30 |
Method and apparatus for pulse gas delivery using an external pressure trigger Grant 10,725,484 - L'Bassi , et al. | 2020-07-28 |
Methods and apparatus for multiple channel mass flow and ratio control systems Grant 10,698,426 - Ding , et al. | 2020-06-30 |
Method and apparatus for pulse gas delivery with isolation valves Grant 10,649,471 - Ding , et al. | 2020-05-12 |
System for and method of monitoring flow through mass flow controllers in real time Grant 10,606,285 - Ding | 2020-03-31 |
Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger App 20200081459 - L'Bassi; Michael ;   et al. | 2020-03-12 |
Method and apparatus for pressure-based flow measurement in non-critical flow conditions Grant 10,514,712 - Ding , et al. Dec | 2019-12-24 |
Methods and Apparatus for Multiple Channel Mass Flow and Ratio Control Systems App 20190339725 - Ding; Junhua ;   et al. | 2019-11-07 |
Method And Apparatus For Pulse Gas Delivery With Isolation Valves App 20190243392 - Ding; Junhua ;   et al. | 2019-08-08 |
System for and method of fast pulse gas delivery Grant 10,353,408 - Ding , et al. July 16, 2 | 2019-07-16 |
System For And Method Of Fast Pulse Gas Delivery App 20190056755 - Ding; Junhua ;   et al. | 2019-02-21 |
System for and method of fast pulse gas delivery Grant 10,126,760 - Ding , et al. November 13, 2 | 2018-11-13 |
Method And Apparatus For Self Verification Of Pressured Based Mass Flow Controllers App 20180306615 - Ding; Junhua | 2018-10-25 |
Methods and apparatus for wide range mass flow verification Grant 10,031,004 - Ding , et al. July 24, 2 | 2018-07-24 |
System for and method of multiple channel fast pulse gas delivery Grant 10,031,531 - Ding July 24, 2 | 2018-07-24 |
Method and apparatus for self verification of pressure-based mass flow controllers Grant 10,031,005 - Ding July 24, 2 | 2018-07-24 |
Methods and Apparatus for Wide Range Mass Flow Verification App 20180172491 - Ding; Junhua ;   et al. | 2018-06-21 |
Upstream volume mass flow verification systems and methods Grant 9,952,078 - Ding , et al. April 24, 2 | 2018-04-24 |
System for and method of monitoring flow through mass flow controllers in real time Grant 9,846,074 - Ding December 19, 2 | 2017-12-19 |
System For And Method Of Monitoring Flow Through Mass Flow Controllers In Real Time App 20170199529 - Ding; Junhua | 2017-07-13 |
Method And Apparatus For Pressure-based Flow Measurement In Non-critical Flow Conditions App 20170060143 - Ding; Junhua ;   et al. | 2017-03-02 |
System for and method of monitoring flow through mass flow controllers in real time Grant 9,557,744 - Ding January 31, 2 | 2017-01-31 |
System for and method of providing pressure insensitive self verifying mass flow controller Grant 9,471,066 - Ding , et al. October 18, 2 | 2016-10-18 |
Method and apparatus for multiple-channel pulse gas delivery system Grant 9,348,339 - Ding , et al. May 24, 2 | 2016-05-24 |
Methods of and apparatus for controlling pressure in multiple zones of a process tool Grant 9,127,361 - Ding September 8, 2 | 2015-09-08 |
System for and method of fast pulse gas delivery Grant 8,997,686 - Ding April 7, 2 | 2015-04-07 |
Multiple-channel flow ratio controller Grant 8,997,791 - L'Bassi , et al. April 7, 2 | 2015-04-07 |
Upstream Volume Mass Flow Verification Systems and Methods App 20150066395 - Ding; Junhua ;   et al. | 2015-03-05 |
Pressure-balanced Control Valves App 20140326909 - Ding; Junhua ;   et al. | 2014-11-06 |
Method of and apparatus for multiple channel flow ratio controller system Grant 8,849,466 - Ding September 30, 2 | 2014-09-30 |
System for and Method of Multiple Channel Fast Pulse Gas Delivery App 20140238498 - Ding; Junhua | 2014-08-28 |
Upstream volume mass flow verification systems and methods Grant 8,793,082 - Ding , et al. July 29, 2 | 2014-07-29 |
System for and Method of Fast Pulse Gas Delivery App 20140190571 - Ding; Junhua ;   et al. | 2014-07-10 |
System for and Method of Monitoring Flow Through Mass Flow Controllers in Real Time App 20140190579 - Ding; Junhua | 2014-07-10 |
System for and Method of Providing Pressure Insensitive Self Verifying Mass Flow Controller App 20140158211 - Ding; Junhua ;   et al. | 2014-06-12 |
Method and Apparatus for Self Verification of Pressured Based Mass Flow Controllers App 20140083514 - Ding; Junhua | 2014-03-27 |
System For And Method Of Monitoring Flow Through Mass Flow Controllers In Real Time App 20130186486 - Ding; Junhua | 2013-07-25 |
Method of and Apparatus for Multiple Channel Flow Ratio Controller System App 20130085618 - Ding; Junhua | 2013-04-04 |
Systems and methods for updating valve cracking current in mass flow controllers Grant 8,386,083 - Ding February 26, 2 | 2013-02-26 |
System for and Method of Fast Pulse Gas Delivery App 20120216888 - Ding; Junhua ;   et al. | 2012-08-30 |
Method And Apparatus For Multiple-channel Pulse Gas Delivery System App 20120076935 - Ding; Junhua ;   et al. | 2012-03-29 |
System For And Method Of Fast Pulse Gas Delivery App 20120073672 - Ding; Junhua | 2012-03-29 |
Controller gain scheduling for mass flow controllers Grant 8,079,383 - Ding December 20, 2 | 2011-12-20 |
Methods Of And Apparatus For Controlling Pressure In Multiple Zones Of A Process Tool App 20110135821 - Ding; Junhua | 2011-06-09 |
Dual-mode mass flow verification and mass flow delivery system and method Grant 7,891,228 - Ding , et al. February 22, 2 | 2011-02-22 |
Upstream volume mass flow verification systems and methods field of the disclosure App 20110022334 - Ding; Junhua ;   et al. | 2011-01-27 |
High accuracy mass flow verifier with multiple inlets Grant 7,757,554 - Ding , et al. July 20, 2 | 2010-07-20 |
Dual-Mode Mass Flow Verification and Mass Flow Delivery System and Method App 20100125424 - Ding; Junhua ;   et al. | 2010-05-20 |
Integrated pressure and flow ratio control system Grant 7,706,925 - Ding , et al. April 27, 2 | 2010-04-27 |
Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement Grant 7,673,645 - Ding , et al. March 9, 2 | 2010-03-09 |
Systems and Methods for Updating Valve Cracking Current in Mass Flow Controllers App 20100036534 - Ding; Junhua | 2010-02-11 |
Gas delivery method and system including a flow ratio controller using antisymmetric optimal control Grant 7,621,290 - Ding , et al. November 24, 2 | 2009-11-24 |
High Accuracy Mass Flow Verifier with Multiple Inlets App 20090112504 - Ding; Junhua ;   et al. | 2009-04-30 |
Critical flow based mass flow verifier Grant 7,474,968 - Ding , et al. January 6, 2 | 2009-01-06 |
Compensation for thermal siphoning in mass flow controllers Grant 7,467,027 - Ding , et al. December 16, 2 | 2008-12-16 |
Mass flow verifiers capable of providing different volumes, and related methods Grant 7,461,549 - Ding , et al. December 9, 2 | 2008-12-09 |
Mass flow device using a flow equalizer for improving the output response App 20080250854 - Ding; Junhua ;   et al. | 2008-10-16 |
Integrated pressure and flow ratio control system App 20080167748 - Ding; Junhua ;   et al. | 2008-07-10 |
Controller gain scheduling for mass flow controllers App 20080140260 - Ding; Junhua | 2008-06-12 |
Vertical mount mass flow sensor Grant 7,296,465 - Ding , et al. November 20, 2 | 2007-11-20 |
Multiple-Channel Flow Ratio Controller App 20070240778 - L'Bassi; Michael ;   et al. | 2007-10-18 |
Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement App 20070186983 - Ding; Junhua ;   et al. | 2007-08-16 |
Compensation for thermal siphoning in mass flow controllers App 20070174016 - Ding; Junhua ;   et al. | 2007-07-26 |
Vertical mount mass flow sensor App 20070113641 - Ding; Junhua ;   et al. | 2007-05-24 |
Critical flow based mass flow verifier App 20060283254 - Ding; Junhua ;   et al. | 2006-12-21 |
Gas delivery method and system including a flow ratio controller using antisymmetric optimal control App 20060237063 - Ding; Junhua ;   et al. | 2006-10-26 |