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Patent applications and USPTO patent grants for Ding; Jie L..The latest application filed is for "minimizing grazing incidence reflections for reliable euv power measurements".
Patent | Date |
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Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamber Grant 10,210,963 - Senekerimyan , et al. Feb | 2019-02-19 |
Minimizing Grazing Incidence Reflections For Reliable Euv Power Measurements App 20170084360 - Senekerimyan; Vahan A. ;   et al. | 2017-03-23 |
Minimizing grazing incidence reflections for reliable EUV power measurements having a light source comprising plural tubes with centerlines disposed between a radiation region and corresponding photodetector modules Grant 9,546,901 - Senekerimyan , et al. January 17, 2 | 2017-01-17 |
Minimizing Grazing Incidence Reflections For Reliable Euv Power Measurements App 20160054174 - Senekerimyan; Vahan A. ;   et al. | 2016-02-25 |
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