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Patent applications and USPTO patent grants for Dilocker; Stephanie J..The latest application filed is for "thermally cured underlayer for lithographic application".
Patent | Date |
---|---|
Thermally cured underlayer for lithographic application Grant 8,535,872 - De , et al. September 17, 2 | 2013-09-17 |
Thermally Cured Underlayer For Lithographic Application App 20120178871 - De; Binod B. ;   et al. | 2012-07-12 |
Thermally cured underlayer for lithographic application Grant 8,153,346 - De , et al. April 10, 2 | 2012-04-10 |
Thermally Cured Underlayer For Lithographic Application App 20080206676 - De; Binod B. ;   et al. | 2008-08-28 |
Copolymer, photoresist compositions thereof and deep UV bilayer system thereof Grant 6,916,543 - De , et al. July 12, 2 | 2005-07-12 |
Acetal protected polymers and photoresists compositions thereof Grant 6,830,870 - Malik , et al. December 14, 2 | 2004-12-14 |
Novel copolymer, photoresist compositions thereof and deep UV bilayer system thereof App 20040137362 - De, Binod B. ;   et al. | 2004-07-15 |
Acetal protected polymers and photoresists compositions thereof App 20040034160 - Malik, Sanjay ;   et al. | 2004-02-19 |
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