| Patent | Date |
|---|
Method and apparatus for deposition of multilayer device with superconductive film
Grant 11,437,559 - Zhu , et al. September 6, 2 | 2022-09-06 |
Methods for depositing amorphous silicon layers or silicon oxycarbide layers via physical vapor deposition
Grant 11,313,034 - Zeng , et al. April 26, 2 | 2022-04-26 |
Oxygen Controlled Pvd Aln Buffer For Gan-based Optoelectronic And Electronic Devices
App 20210328104 - Zhu; Mingwei ; et al. | 2021-10-21 |
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices
Grant 11,081,623 - Zhu , et al. August 3, 2 | 2021-08-03 |
Magnetized substrate carrier apparatus with shadow mask for deposition
Grant 11,056,277 - Diehl , et al. July 6, 2 | 2021-07-06 |
Method For Depositing High Quality Pvd Films
App 20210123156 - YANG; Zihao ; et al. | 2021-04-29 |
Dose Reduction Of Patterned Metal Oxide Photoresists
App 20210033974 - SINGH; Tejinder ; et al. | 2021-02-04 |
Optical stack deposition and on-board metrology
Grant 10,886,155 - Zhu , et al. January 5, 2 | 2021-01-05 |
Substrate carrier
Grant D904,640 - Ruhland , et al. December 8, 2 | 2020-12-08 |
Method and Apparatus for Deposition of Multilayer Device with Superconductive Film
App 20200303616 - Zhu; Mingwei ; et al. | 2020-09-24 |
Method And Apparatus For Deposition Of Metal Nitrides
App 20200299830 - Zhu; Mingwei ; et al. | 2020-09-24 |
Film Stack For Lithography Applications
App 20200273705 - SINGH; Tejinder ; et al. | 2020-08-27 |
Substrate Carrier
App 20200234991 - RUHLAND; FRED ERIC ; et al. | 2020-07-23 |
Magnetized Substrate Carrier Apparatus With Shadow Mask For Deposition
App 20200211769 - DIEHL; DANIEL LEE ; et al. | 2020-07-02 |
Oxygen Controlled Pvd Aln Buffer For Gan-based Optoelectronic And Electronic Devices
App 20200127164 - Zhu; Mingwei ; et al. | 2020-04-23 |
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices
Grant 10,546,973 - Zhu , et al. Ja | 2020-01-28 |
PVD Films For EUV Lithography
App 20190212656 - Dai; Huixiong ; et al. | 2019-07-11 |
Oxygen Controlled Pvd Aln Buffer For Gan-based Optoelectronic And Electronic Devices
App 20190172973 - Zhu; Mingwei ; et al. | 2019-06-06 |
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices
Grant 10,236,412 - Zhu , et al. | 2019-03-19 |
Method For Graded Anti-reflective Coatings By Physical Vapor Deposition
App 20190051768 - CAO; Yong ; et al. | 2019-02-14 |
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices
Grant 10,193,014 - Zhu , et al. Ja | 2019-01-29 |
Aluminum-nitride buffer and active layers by physical vapor deposition
Grant 10,109,481 - Zhu , et al. October 23, 2 | 2018-10-23 |
Method for graded anti-reflective coatings by physical vapor deposition
Grant 10,096,725 - Cao , et al. October 9, 2 | 2018-10-09 |
Oxygen Controlled Pvd Aln Buffer For Gan-based Optoelectronic And Electronic Devices
App 20180261720 - ZHU; Mingwei ; et al. | 2018-09-13 |
Methods For Depositing Amorphous Silicon Layers Or Silicon Oxycarbide Layers Via Physical Vapor Deposition
App 20180142343 - ZENG; Weimin ; et al. | 2018-05-24 |
Surface Treatment For EUV Lithography
App 20180135183 - Zeng; Weimin ; et al. | 2018-05-17 |
Oxygen controlled PVD aluminum nitride buffer for gallium nitride-based optoelectronic and electronic devices
Grant 9,929,310 - Zhu , et al. March 27, 2 | 2018-03-27 |
Light Wave Separation Lattices And Methods Of Forming Light Wave Separation Lattices
App 20180011331 - DIEHL; DANIEL LEE ; et al. | 2018-01-11 |
Light wave separation lattices and methods of forming light wave separation lattices
Grant 9,746,678 - Diehl , et al. August 29, 2 | 2017-08-29 |
Methods for depositing dielectric films via physical vapor deposition processes
Grant 9,633,839 - Zeng , et al. April 25, 2 | 2017-04-25 |
Methods For Depositing Dielectric Films Via Physical Vapor Deposition Processes
App 20160372319 - ZENG; Weimin ; et al. | 2016-12-22 |
Optically tuned hardmask for multi-patterning applications
Grant 9,478,421 - Bencher , et al. October 25, 2 | 2016-10-25 |
Reusable substrate carrier
Grant 9,478,697 - Thirunavukarasu , et al. October 25, 2 | 2016-10-25 |
Reusable Substrate Carrier
App 20160133781 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2016-05-12 |
Method for critical dimension reduction using conformal carbon films
Grant 9,337,051 - Mebarki , et al. May 10, 2 | 2016-05-10 |
Method For Critical Dimension Reduction Using Conformal Carbon Films
App 20160049305 - MEBARKI; Bencherki ; et al. | 2016-02-18 |
Optically Tuned Hardmask For Multi-patterning Applications
App 20160042951 - BENCHER; Christopher Dennis ; et al. | 2016-02-11 |
Oxygen Controlled Pvd Aln Buffer For Gan-based Optoelectronic And Electronic Devices
App 20160035937 - Zhu; Mingwei ; et al. | 2016-02-04 |
Aluminum-nitride Buffer And Active Layers By Physical Vapor Deposition
App 20150348773 - ZHU; Mingwei ; et al. | 2015-12-03 |
Optically tuned hardmask for multi-patterning applications
Grant 9,177,796 - Bencher , et al. November 3, 2 | 2015-11-03 |
Light Wave Separation Lattices And Methods Of Forming Light Wave Separation Lattices
App 20150293363 - DIEHL; DANIEL LEE ; et al. | 2015-10-15 |
Method For Graded Anti-reflective Coatings By Physical Vapor Deposition
App 20150132551 - CAO; Yong ; et al. | 2015-05-14 |
Optically Tuned Hardmask For Multi-patterning Applications
App 20140327117 - BENCHER; Christopher Dennis ; et al. | 2014-11-06 |
Oxygen Controlled PVD Aluminum Nitride Buffer for Gallium Nitride-Based Optoelectronic and Electronic Devices
App 20140264363 - Zhu; Mingwei ; et al. | 2014-09-18 |
| 