Patent | Date |
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Method For Cleaning A Vacuum System Used In The Manufacture Of Oled Devices, Method For Vacuum Deposition On A Substrate To Manufacture Oled Devices, And Apparatus For Vacuum Deposition On A Substrate To Manufacture Oled Devices App 20210308725 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2021-10-07 |
Evaporation Source For Organic Material, Deposition Apparatus For Depositing Organic Materials In A Vacuum Chamber Having An Evaporation Source For Organic Material, And Method For Evaporating Organic Material App 20210269912 - BANGERT; Stefan ;   et al. | 2021-09-02 |
Deposition Platform For Flexible Substrates And Method Of Operation Thereof App 20200299842 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2020-09-24 |
Deposition platform for flexible substrates and method of operation thereof Grant 10,689,760 - Dieguez-Campo , et al. | 2020-06-23 |
Material Deposition Arrangement, Vacuum Deposition System And Methods Therefor App 20190390322 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2019-12-26 |
Methods of operating a deposition apparatus, and deposition apparatus Grant 10,483,465 - Dieguez-Campo , et al. Nov | 2019-11-19 |
Methods Of Operating A Deposition Apparatus, And Deposition Apparatus App 20190148642 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2019-05-16 |
Gas Separation By Adjustable Separation Wall App 20190112706 - LOTZ; Hans-Georg ;   et al. | 2019-04-18 |
Evaporator, Deposition Arrangement, Deposition Apparatus And Methods Of Operation Thereof App 20190071772 - KELLER; Stefan ;   et al. | 2019-03-07 |
A Processing Apparatus For Processing Devices, Particularly Devices Including Organic Materials Therein, And Method For Transferring An Evaporation Source From A Processing Vacuum Chamber To A Maintenance Vacuum Chamber Or From The Maintenance Vacuum Chamber To The Processing Vacuum Chamber App 20190032194 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2019-01-31 |
Masking Device For Use In A Lithium Deposition Process In The Manufacturing Of Thin Film Batteries, Apparatus Configured For A Lithium Deposition Process, Method For Manufacturing Electrodes Of Thin Film Batteries, And Thin Film Battery App 20180351164 - HELLMICH; Anke ;   et al. | 2018-12-06 |
Evaporation Source App 20180245206 - BANGERT; Stefan ;   et al. | 2018-08-30 |
Measurement Assembly For Measuring A Deposition Rate And Method Therefore App 20180187302 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2018-07-05 |
Common Deposition Platform, Processing Station, And Method Of Operation Thereof App 20180100236 - Morrison; Neil ;   et al. | 2018-04-12 |
System for depositing one or more layers on a substrate supported by a carrier and method using the same Grant 9,899,635 - Bangert , et al. February 20, 2 | 2018-02-20 |
Common deposition platform, processing station, and method of operation thereof Grant 9,873,945 - Morrison , et al. January 23, 2 | 2018-01-23 |
Evaporation Source For Organic Material, Deposition Apparatus For Depositing Organic Materials In A Vacuum Chamber Having An Evaporation Source For Organic Material, And Method For Evaporating Organic Material App 20170346044 - BANGERT; Stefan ;   et al. | 2017-11-30 |
Material Source Arrangment And Nozzle For Vacuum Deposition App 20170321318 - BANGERT; Stefan ;   et al. | 2017-11-09 |
Material Deposition Arrangement, A Vacuum Deposition System And Method For Depositing Material App 20170314120 - GEBELE; Thomas ;   et al. | 2017-11-02 |
System For Depositing One Or More Layers On A Substrate Supported By A Carrier And Method Using The Same App 20170244070 - BANGERT; Stefan ;   et al. | 2017-08-24 |
Tape assisted single step peel-off on sin layer above metal electrodes Grant 9,627,211 - Ozkeskin , et al. April 18, 2 | 2017-04-18 |
Evaporation Source For Organic Material App 20170092899 - BANGERT; Stefan ;   et al. | 2017-03-30 |
Evaporation Source For Organic Material App 20170081755 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2017-03-23 |
Deposition Platform For Flexible Substrates And Method Of Operation Thereof App 20170058404 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2017-03-02 |
Depositing Arrangement, Deposition Apparatus And Methods Of Operation Thereof App 20170022598 - SCHU LER; Uwe ;   et al. | 2017-01-26 |
A Processing Apparatus For Processing Devices, Particularly Devices Including Organic Materials Therein, And Method For Transferring An Evaporation Source From A Processing Vacuum Chamber To A Maintenance Vacuum Chamber Or From The Maintenance Vacuum Chamber To The Processing Vacuum Chamber App 20170022601 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2017-01-26 |
Evaporation Source For Organic Material, Apparatus Having An Evaporation Source For Organic Material, System Having An Evaporation Deposition Apparatus With An Evaporation Source For Organic Materials, And Method For Operating An Evaporation Source For Organic Material App 20170005297 - BANGERT; Stefan ;   et al. | 2017-01-05 |
Method for encapsulating an organic light emitting diode Grant 9,293,706 - Haas , et al. March 22, 2 | 2016-03-22 |
Evaporator, Deposition Arrangement, Deposition Apparatus And Methods Of Operation Thereof App 20150299853 - KELLER; Stefan ;   et al. | 2015-10-22 |
Tape Assisted Single Step Peel-off On Sin Layer Above Metal Electrodes App 20150214057 - Ozkeskin; Fatih Mert ;   et al. | 2015-07-30 |
Tooling carrier for inline coating machine, method of operating thereof and process of coating a substrate Grant 8,961,690 - Hoffmann , et al. February 24, 2 | 2015-02-24 |
Deposition Platform For Flexible Substrates And Method Of Operation Thereof App 20140290861 - DIEGUEZ-CAMPO; Jose Manuel ;   et al. | 2014-10-02 |
Common Deposition Platform, Processing Station, And Method Of Operation Thereof App 20140212600 - NEIL; Morrison ;   et al. | 2014-07-31 |
Gas Separation By Adjustable Separation Wall App 20140208565 - LOTZ; Hans-Georg ;   et al. | 2014-07-31 |
Method For Encapsulating An Organic Light Emitting Diode App 20120208306 - HAAS; Dieter ;   et al. | 2012-08-16 |
Arrangement for coating a substrate Grant 8,192,548 - Hoffmann , et al. June 5, 2 | 2012-06-05 |
Arrangement and method for removing alkali- or alkaline earth-metals from a vacuum coating chamber Grant 8,083,859 - Bangert , et al. December 27, 2 | 2011-12-27 |
Method of cleaning a patterning device, method of depositing a layer system on a substrate, system for cleaning a patterning device, and coating system for depositing a layer system on a substrate Grant 7,973,345 - Hoffmann , et al. July 5, 2 | 2011-07-05 |
Coating Of Masked Substrates App 20100092658 - Dieguez-Campo; Jose Manuel ;   et al. | 2010-04-15 |
Processing System And Method For Processing A Substrate App 20090317562 - Dieguez-Campo; Jose Manuel ;   et al. | 2009-12-24 |
Method Of Cleaning A Patterning Device, Method Of Depositing A Layer System On A Substrate, System For Cleaning A Patterning Device, And Coating System For Depositing A Layer System On A Substrate App 20090317927 - Hoffmann; Uwe ;   et al. | 2009-12-24 |
Arrangement For Coating A Substrate App 20090293810 - BANGERT; STEFAN ;   et al. | 2009-12-03 |
Arrangement And Method For Removing Alkali- Or Alkaline Earth-metals From A Vacuum Coating Chamber App 20090293909 - BANGERT; STEFAN ;   et al. | 2009-12-03 |
Method Of Providing An Encapsulation Layer Stack, Coating Device And Coating System App 20090098293 - Hoffmann; Uwe ;   et al. | 2009-04-16 |
Encapsulation for organic device Grant 7,518,142 - Hoffmann , et al. April 14, 2 | 2009-04-14 |
Sputter Coating Device And Method Of Depositing A Layer On A Substrate App 20090020416 - Scholhammer; James ;   et al. | 2009-01-22 |
Processing Device And Method For Processing A Substrate App 20080261409 - Hoffmann; Uwe ;   et al. | 2008-10-23 |
System And Method For Control Of Electromagnetic Radiation In Pecvd Discharge Processes App 20080113108 - Stowell; Michael W. ;   et al. | 2008-05-15 |
Encapsulation For Organic Device App 20070290201 - Hoffmann; Uwe ;   et al. | 2007-12-20 |
System and method for power function ramping of microwave liner discharge sources App 20070095281 - Stowell; Michael W. ;   et al. | 2007-05-03 |
Arrangement for coating a substrate App 20060130765 - Hoffmann; Uwe ;   et al. | 2006-06-22 |