Patent | Date |
---|
High Voltage, Low Pressure Plasma Enhanced Atomic Layer Deposition App 20200350179 - Dickey; Eric R. | 2020-11-05 |
Water-insensitive Methods Of Forming Metal Oxide Films And Products Related Thereto App 20200017970 - Dickey; Eric R. | 2020-01-16 |
Low voltage embedded memory having conductive oxide and electrode stacks Grant 9,647,208 - Karpov , et al. May 9, 2 | 2017-05-09 |
Deposition Of High-quality Mixed Oxide Barrier Films App 20170088951 - Dickey; Eric R. ;   et al. | 2017-03-30 |
Mixed Metal-silicon-oxide Barriers App 20170025635 - Dickey; Eric R. ;   et al. | 2017-01-26 |
Atomic layer deposition method utilizing multiple precursor zones for coating flexible substrates Grant 9,469,901 - Dickey , et al. October 18, 2 | 2016-10-18 |
Plasma generation for thin film deposition on flexible substrates Grant 9,435,028 - Dickey September 6, 2 | 2016-09-06 |
High-speed Deposition Of Mixed Oxide Barrier Films App 20160108524 - Dickey; Eric R. ;   et al. | 2016-04-21 |
Substrate transport mechanism contacting a single side of a flexible web substrate for roll-to-roll thin film deposition Grant 9,297,076 - Dickey March 29, 2 | 2016-03-29 |
Low Voltage Embedded Memory Having Conductive Oxide And Electrode Stacks App 20160079523 - Karpov; Elijah V. ;   et al. | 2016-03-17 |
Mixed metal-silicon-oxide barriers Grant 9,263,359 - Dickey , et al. February 16, 2 | 2016-02-16 |
Atomic layer deposition method for coating flexible substrates Grant 9,238,868 - Dickey , et al. January 19, 2 | 2016-01-19 |
Low voltage embedded memory having conductive oxide and electrode stacks Grant 9,231,204 - Karpov , et al. January 5, 2 | 2016-01-05 |
Electrically- and chemically-active adlayers for plasma electrodes Grant 9,133,546 - Dickey , et al. September 15, 2 | 2015-09-15 |
Electrically- And Chemically-active Adlayers For Plasma Electrodes App 20150252478 - Dickey; Eric R. ;   et al. | 2015-09-10 |
Plasma Generation For Thin Film Deposition On Flexible Substrates App 20140329030 - Dickey; Eric R. | 2014-11-06 |
Mixed Metal-silicon-oxide Barriers App 20140242736 - Dickey; Eric R. ;   et al. | 2014-08-28 |
Low Voltage Embedded Memory Having Conductive Oxide And Electrode Stacks App 20140092666 - Karpov; Elijah V. ;   et al. | 2014-04-03 |
Oxygen radical generation for radical-enhanced thin film deposition Grant 8,637,123 - Dickey , et al. January 28, 2 | 2014-01-28 |
Inhibiting excess precursor transport between separate precursor zones in an atomic layer deposition system Grant 8,637,117 - Dickey , et al. January 28, 2 | 2014-01-28 |
Mixed Metal Oxide Barrier Films And Atomic Layer Deposition Method For Making Mixed Metal Oxide Barrier Films App 20130177760 - Dickey; Eric R. | 2013-07-11 |
Atomic Layer Deposition Method Utilizing Multiple Precursor Zones For Coating Flexible Substrates App 20120219708 - Dickey; Eric R. ;   et al. | 2012-08-30 |
Atomic Layer Deposition Method For Coating Flexible Substrates App 20120171371 - Dickey; Eric R. ;   et al. | 2012-07-05 |
Atomic layer deposition system utilizing multiple precursor zones for coating flexible substrates Grant 8,202,366 - Dickey , et al. June 19, 2 | 2012-06-19 |
Radical-enhanced atomic layer deposition system and method Grant 8,187,679 - Dickey , et al. May 29, 2 | 2012-05-29 |
Atomic layer deposition system for coating flexible substrates Grant 8,137,464 - Dickey , et al. March 20, 2 | 2012-03-20 |
Substrate Transport Mechanism Contacting A Single Side Of A Flexible Web Substrate For Roll-to-roll Thin Film Deposition App 20120021128 - Dickey; Eric R. | 2012-01-26 |
Inhibiting Excess Precursor Transport Between Separate Precursor Zones In An Atomic Layer Deposition System App 20110256323 - Dickey; Eric R. ;   et al. | 2011-10-20 |
Oxygen Radical Generation For Radical-enhanced Thin Film Deposition App 20110159204 - Dickey; Eric R. ;   et al. | 2011-06-30 |
Fabrication of composite materials using atomic layer deposition Grant 7,923,068 - Dickey , et al. April 12, 2 | 2011-04-12 |
Atomic Layer Deposition System And Method Utilizing Multiple Precursor Zones For Coating Flexible Substrates App 20100189900 - Dickey; Eric R. ;   et al. | 2010-07-29 |
High Rate Deposition Of Thin Films With Improved Barrier Layer Properties App 20100143710 - Dickey; Eric R. ;   et al. | 2010-06-10 |
Fabrication Of Composite Materials Using Atomic Layer Deposition App 20080193739 - Dickey; Eric R. ;   et al. | 2008-08-14 |
Radical-enhanced Atomic Layer Deposition System And Method App 20080026162 - Dickey; Eric R. ;   et al. | 2008-01-31 |
Atomic Layer Deposition System And Method For Coating Flexible Substrates App 20070224348 - Dickey; Eric R. ;   et al. | 2007-09-27 |
TFEL devices having insulating layers Grant 6,358,632 - Dickey , et al. March 19, 2 | 2002-03-19 |
Dual substrate full color TFEL panel with insulator bridge structure Grant 5,712,528 - Barrow , et al. January 27, 1 | 1998-01-27 |
Oxygen-doped thiogallate phosphor Grant 5,656,888 - Sun , et al. August 12, 1 | 1997-08-12 |
Geometries and configurations for magnetron sputtering apparatus Grant 5,618,388 - Seeser , et al. April 8, 1 | 1997-04-08 |
TFEL device with injection layer Grant 5,581,150 - Rack , et al. December 3, 1 | 1996-12-03 |
Black electrode TFEL display Grant 5,504,389 - Dickey April 2, 1 | 1996-04-02 |
Shielding for arc suppression in rotating magnetron sputtering systems Grant 5,470,452 - Dickey , et al. November 28, 1 | 1995-11-28 |
Four-layer antireflection coating for deposition in in-like DC sputtering apparatus Grant 5,450,238 - Bjornard , et al. September 12, 1 | 1995-09-12 |
DC reactively sputtered optical coatings including niobium oxide Grant 5,372,874 - Dickey , et al. December 13, 1 | 1994-12-13 |
D.C. reactively sputtered antireflection coatings Grant 5,270,858 - Dickey * December 14, 1 | 1993-12-14 |
Anode structures for magnetron sputtering apparatus Grant 5,106,474 - Dickey , et al. April 21, 1 | 1992-04-21 |
DC reactively sputtered antireflection coatings Grant 5,105,310 - Dickey April 14, 1 | 1992-04-14 |