Patent | Date |
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Retaining Ring For Cmp App 20190291238 - Nagengast; Andrew J. ;   et al. | 2019-09-26 |
System and process for in situ byproduct removal and platen cooling during CMP Grant 10,350,728 - Diao , et al. July 16, 2 | 2019-07-16 |
Retaining ring for CMP Grant 10,322,492 - Nagengast , et al. | 2019-06-18 |
Method And System To Accommodate Concurrent Private Sessions In A Virtual Conference App 20180139413 - DIAO; Jie | 2018-05-17 |
Retaining Ring For Cmp App 20180021918 - Nagengast; Andrew J. ;   et al. | 2018-01-25 |
Conveying attention information in virtual conference Grant 9,800,831 - Diao October 24, 2 | 2017-10-24 |
Conveying gaze information in virtual conference Grant 9,538,133 - Diao January 3, 2 | 2017-01-03 |
Conveying Attention Information In Virtual Conference App 20160373691 - DIAO; Jie | 2016-12-22 |
System And Process For In Situ Byproduct Removal And Platen Cooling During Cmp App 20160167195 - DIAO; Jie ;   et al. | 2016-06-16 |
Conveying gaze information in virtual conference Grant 9,369,667 - Diao June 14, 2 | 2016-06-14 |
Conveying Gaze Information In Virtual Conference App 20130271560 - DIAO; Jie | 2013-10-17 |
Chemical mechanical polisher with heater and method Grant 8,439,723 - Marks , et al. May 14, 2 | 2013-05-14 |
Conveying Gaze Information In Virtual Conference App 20130076853 - DIAO; Jie | 2013-03-28 |
Process sequence to achieve global planarity using a combination of fixed abrasive and high selectivity slurry for pre-metal dielectric CMP applications Grant 8,211,325 - Diao , et al. July 3, 2 | 2012-07-03 |
Process Sequence To Achieve Global Planarity Using A Combination Of Fixed Abrasive And High Selectivity Slurry For Pre-metal Dielectric Cmp Applications App 20100285666 - DIAO; JIE ;   et al. | 2010-11-11 |
Chemical Mechanical Polisher With Heater And Method App 20100035515 - Marks; Robert ;   et al. | 2010-02-11 |
Electrochemical method for Ecmp polishing pad conditioning Grant 7,504,018 - Wang , et al. March 17, 2 | 2009-03-17 |
Method and apparatus for electroprocessing a substrate with edge profile control Grant 7,422,982 - Wang , et al. September 9, 2 | 2008-09-09 |
Conductive pad with ion exchange membrane for electrochemical mechanical polishing Grant 7,344,432 - Chen , et al. March 18, 2 | 2008-03-18 |
Apparatus For Electroprocessing A Substrate With Edge Profile Control App 20080035474 - Wang; You ;   et al. | 2008-02-14 |
Method for conditioning a polishing pad App 20080020682 - Jia; Renhe ;   et al. | 2008-01-24 |
Method and apparatus for electroprocessing a substrate with edge profile control App 20080014709 - Wang; You ;   et al. | 2008-01-17 |
Abrasive Composition For Electrochemical Mechanical Polishing App 20070254485 - Mao; Daxin ;   et al. | 2007-11-01 |
Process for high copper removal rate with good planarization and surface finish App 20070235344 - Jia; Renhe ;   et al. | 2007-10-11 |
Method and apparatus for foam removal in an electrochemical mechanical substrate polishing process App 20070181442 - Jia; Renhe ;   et al. | 2007-08-09 |
Methods for electrochemical processing with pre-biased cells App 20070158207 - Diao; Jie ;   et al. | 2007-07-12 |
Fully conductive pad for electrochemical mechanical processing App 20070153453 - Wang; You ;   et al. | 2007-07-05 |
Electrochemical Method For Ecmp Polishing Pad Conditioning App 20070095677 - Wang; You ;   et al. | 2007-05-03 |
Conductive Pad With Ion Exchange Membrane For Electrochemical Mechanical Polishing App 20070099552 - Chen; Liang-Yuh ;   et al. | 2007-05-03 |
Method For Stabilized Polishing Process App 20070062815 - Jia; Renhe ;   et al. | 2007-03-22 |
Process and composition for electrochemical mechanical polishing App 20060249395 - Wang; You ;   et al. | 2006-11-09 |
Process and composition for electrochemical mechanical polishing App 20060249394 - Jia; Renhe ;   et al. | 2006-11-09 |