Di Regolo; Joseph A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Di Regolo; Joseph A..The latest application filed is for "measurement and control of wafer tilt for x-ray based metrology".

Company Profile

1.5.6

Di Regolo; Joseph A. - Livermore CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Measurement And Control Of Wafer Tilt For X-Ray Based Metrology App 20210262950 - Blasenheim; Barry ; et al.	2021-08-26
Methods and systems for characterization of an x-ray beam with high spatial resolution Grant 11,073,487 - Bykanov , et al. July 27, 2	2021-07-27
Calibration of a small angle X-ray scatterometry based metrology system Grant 10,481,111 - Hench , et al. Nov	2019-11-19
Beam shaping slit for small spot size transmission small angle X-ray scatterometry Grant 10,359,377 - Bykanov , et al.	2019-07-23
Methods And Systems For Characterization Of An X-Ray Beam With High Spatial Resolution App 20180328868 - Bykanov; Alexander ; et al.	2018-11-15
Calibration Of A Small Angle X-Ray Scatterometry Based Metrology System App 20180113084 - Hench; John ; et al.	2018-04-26
Beam Shaping Slit For Small Spot Size Transmission Small Angle X-Ray Scatterometry App 20170307548 - Bykanov; Alexander ; et al.	2017-10-26
Linear Stage for reflective electron beam lithography Grant 9,690,213 - Ummethala , et al. June 27, 2	2017-06-27
Linear Stage for Reflective Electron Beam Lithography App 20130293865 - Ummethala; Upendra ; et al.	2013-11-07

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