Patent | Date |
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Microelectromechanical device having single crystalline components and metallic components Grant 6,628,039 - Dhuler September 30, 2 | 2003-09-30 |
Method for fabricating a microelectromechanical bearing Grant 6,555,201 - Dhuler , et al. April 29, 2 | 2003-04-29 |
Moveable microelectromechanical mirror structures and associated methods Grant 6,428,173 - Dhuler , et al. August 6, 2 | 2002-08-06 |
Methods of fabricating in-plane MEMS thermal actuators Grant 6,410,361 - Dhuler , et al. June 25, 2 | 2002-06-25 |
Microelectromechanical valves including single crystalline material components Grant 6,386,507 - Dhuler , et al. May 14, 2 | 2002-05-14 |
Microelectromechanical actuators including driven arched beams for mechanical advantage Grant 6,360,539 - Hill , et al. March 26, 2 | 2002-03-26 |
Method of fabricating a microelectro mechanical structure having an arched beam Grant 6,324,748 - Dhuler , et al. December 4, 2 | 2001-12-04 |
Microelectromechanical device having single crystalline components and metallic components App 20010038254 - Dhuler, Vijayakumar R. | 2001-11-08 |
Microelectromechanical device having single crystalline components and metallic components Grant 6,291,922 - Dhuler September 18, 2 | 2001-09-18 |
Microelectromechanical valves including single crystalline material components App 20010017358 - Dhuler, Vijayakumar R. ;   et al. | 2001-08-30 |
MEMS variable optical attenuator Grant 6,275,320 - Dhuler , et al. August 14, 2 | 2001-08-14 |
Methods of fabricating in-plane MEMS thermal actuators App 20010008357 - Dhuler, Vijayakumar R. ;   et al. | 2001-07-19 |
Microelectromechanical devices including rotating plates and related methods Grant 6,256,134 - Dhuler , et al. July 3, 2 | 2001-07-03 |
Microactuators including a metal layer on distal portions of an arched beam Grant 6,255,757 - Dhuler , et al. July 3, 2 | 2001-07-03 |
Methods of fabricating tunable capacitors App 20010002872 - Dhuler, Vijayakumar R. | 2001-06-07 |
Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays Grant 6,218,762 - Hill , et al. April 17, 2 | 2001-04-17 |
In-plane MEMS thermal actuator and associated fabrication methods Grant 6,211,598 - Dhuler , et al. April 3, 2 | 2001-04-03 |
Reflective mems actuator with a laser Grant 6,134,042 - Dhuler , et al. October 17, 2 | 2000-10-17 |
Fiber optic connector having a microelectromechanical positioning apparatus and an associated fabrication method Grant 6,124,663 - Haake , et al. September 26, 2 | 2000-09-26 |
Thermal arched beam microelectromechanical valve Grant 6,114,794 - Dhuler , et al. September 5, 2 | 2000-09-05 |
Microelectromechanical beam for allowing a plate to rotate in relation to a frame in a microelectromechanical device Grant 6,087,747 - Dhuler , et al. July 11, 2 | 2000-07-11 |
Thermal arched beam microelectromechanical structure Grant 6,023,121 - Dhuler , et al. February 8, 2 | 2000-02-08 |
Thermal arched beam microelectromechanical devices and associated fabrication methods Grant 5,994,816 - Dhuler , et al. November 30, 1 | 1999-11-30 |
Micromechanical memory sensor Grant 5,966,066 - Mehregany , et al. October 12, 1 | 1999-10-12 |
Microelectromechanical positioning apparatus Grant 5,962,949 - Dhuler , et al. October 5, 1 | 1999-10-05 |
Thermal arched beam microelectromechanical switching array Grant 5,955,817 - Dhuler , et al. September 21, 1 | 1999-09-21 |
Microelectromechanical devices including rotating plates and related methods Grant 5,914,801 - Dhuler , et al. June 22, 1 | 1999-06-22 |
Thermal arched beam microelectromechanical actuators Grant 5,909,078 - Wood , et al. June 1, 1 | 1999-06-01 |
Microactuator for precisely aligning an optical fiber and an associated fabrication method Grant 5,870,518 - Haake , et al. February 9, 1 | 1999-02-09 |
Micromechanical memory sensor Grant 5,712,609 - Mehregany , et al. January 27, 1 | 1998-01-27 |